DE2311083A1 - Zerstaeubungsionenpumpe - Google Patents
ZerstaeubungsionenpumpeInfo
- Publication number
- DE2311083A1 DE2311083A1 DE19732311083 DE2311083A DE2311083A1 DE 2311083 A1 DE2311083 A1 DE 2311083A1 DE 19732311083 DE19732311083 DE 19732311083 DE 2311083 A DE2311083 A DE 2311083A DE 2311083 A1 DE2311083 A1 DE 2311083A1
- Authority
- DE
- Germany
- Prior art keywords
- vapor pressure
- atomizing
- discharge
- high vapor
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 238000004544 sputter deposition Methods 0.000 claims description 12
- 238000000889 atomisation Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 102000006391 Ion Pumps Human genes 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 4
- 238000005546 reactive sputtering Methods 0.000 claims description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 239000011777 magnesium Substances 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 239000011572 manganese Substances 0.000 claims description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23182872A | 1972-03-06 | 1972-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2311083A1 true DE2311083A1 (de) | 1973-09-13 |
Family
ID=22870778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732311083 Pending DE2311083A1 (de) | 1972-03-06 | 1973-03-06 | Zerstaeubungsionenpumpe |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3781133A (cg-RX-API-DMAC10.html) |
| JP (1) | JPS48104109A (cg-RX-API-DMAC10.html) |
| DE (1) | DE2311083A1 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2175465A5 (cg-RX-API-DMAC10.html) |
| IL (1) | IL41704A0 (cg-RX-API-DMAC10.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2826501B1 (de) * | 1978-06-16 | 1979-11-08 | Siemens Ag | Evakuierungsvorrichtung zur Erzeugung eines Isoliervakuums um die supraleitende Wicklung eines Rotors |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
-
1972
- 1972-03-06 US US00231828A patent/US3781133A/en not_active Expired - Lifetime
-
1973
- 1973-03-06 DE DE19732311083 patent/DE2311083A1/de active Pending
- 1973-03-06 FR FR7307889A patent/FR2175465A5/fr not_active Expired
- 1973-03-06 IL IL41704A patent/IL41704A0/xx unknown
- 1973-03-06 JP JP48026542A patent/JPS48104109A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS48104109A (cg-RX-API-DMAC10.html) | 1973-12-27 |
| US3781133A (en) | 1973-12-25 |
| IL41704A0 (en) | 1973-05-31 |
| FR2175465A5 (cg-RX-API-DMAC10.html) | 1973-10-19 |
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