GB1300487A - Improvements relating to the coating of articles by cathode sputtering - Google Patents

Improvements relating to the coating of articles by cathode sputtering

Info

Publication number
GB1300487A
GB1300487A GB5749970A GB5749970A GB1300487A GB 1300487 A GB1300487 A GB 1300487A GB 5749970 A GB5749970 A GB 5749970A GB 5749970 A GB5749970 A GB 5749970A GB 1300487 A GB1300487 A GB 1300487A
Authority
GB
United Kingdom
Prior art keywords
cathode
screen
wire
cathode tube
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5749970A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bekaert NV SA
Original Assignee
Bekaert NV SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert NV SA filed Critical Bekaert NV SA
Publication of GB1300487A publication Critical patent/GB1300487A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1300487 Coating with metal by spattering BEKAERT SA NV 3 Dec 1970 [3 Dec 1969] 57499/70 Heading C7F A wire 1 of e.g. steel is coated with e.g. brass or Sn by cathode sputtering in a cathode tube 2 which has a screen 3 interposed between the wire and cathode tube. The screen is such that, in operation, when at a positive potential with respect to the cathode, particles of the coating material pass through the screen but electrically charged particles are trapped by the screen. In one embodiment, the apparatus is located in a chamber with an argon pressure of 10<SP>-3</SP> Torr and a potential of 1 to 5kV applied between the screen (as an anode) 3 and cathode 2. A glow discharge plasma is formed confined to the space between screen and cathode. Ion-bombarded particles pass from the cathode 2 through the screen 3 on to the wire 1. The plasma can be energized by electron beams obtained from tungsten filaments 5 at each end of the cathode 2. So that electrons emitted from one end of the cathode do not reach the opposing tungsten filaments, the filaments may be arranged to the side of the axes of the cathode tube, and the electron beams produced bent by electrostatic shields . The plasma can be intensified by surrounding the cathode tube 2 by a solenoid and the apparatus can be arranged so that the wire 1 passes through the cathode tube several times.
GB5749970A 1969-12-03 1970-12-03 Improvements relating to the coating of articles by cathode sputtering Expired GB1300487A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6918196A NL6918196A (en) 1969-12-03 1969-12-03

Publications (1)

Publication Number Publication Date
GB1300487A true GB1300487A (en) 1972-12-20

Family

ID=19808541

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5749970A Expired GB1300487A (en) 1969-12-03 1970-12-03 Improvements relating to the coating of articles by cathode sputtering

Country Status (4)

Country Link
BE (1) BE759020A (en)
FR (1) FR2072369A5 (en)
GB (1) GB1300487A (en)
NL (1) NL6918196A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006002673A1 (en) * 2004-06-30 2006-01-12 Pirelli Tyre S.P.A. Method for producing a metal wire coated with a layer of brass
EP1576202B1 (en) * 2002-12-23 2013-05-29 Pirelli Tyre S.p.A. Methods for producing coated metal wire

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2533071B1 (en) * 1982-09-10 1985-07-05 Centre Nat Rech Scient IMPROVEMENTS IN SUBSTRATES COATED WITH A THIN LAYER OF PLATIN OXIDE, IN DEVICES FOR OBTAINING SUCH COATED SUBSTRATES, AND IN PRODUCTS OBTAINED FROM SUCH COATED SUBSTRATES

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1576202B1 (en) * 2002-12-23 2013-05-29 Pirelli Tyre S.p.A. Methods for producing coated metal wire
WO2006002673A1 (en) * 2004-06-30 2006-01-12 Pirelli Tyre S.P.A. Method for producing a metal wire coated with a layer of brass
CN1977067B (en) * 2004-06-30 2012-04-18 倍耐力轮胎股份公司 Method for producing a metal wire coated with a layer of brass

Also Published As

Publication number Publication date
NL6918196A (en) 1971-06-07
BE759020A (en) 1971-04-30
FR2072369A5 (en) 1971-09-24

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees