GB1300487A - Improvements relating to the coating of articles by cathode sputtering - Google Patents
Improvements relating to the coating of articles by cathode sputteringInfo
- Publication number
- GB1300487A GB1300487A GB5749970A GB5749970A GB1300487A GB 1300487 A GB1300487 A GB 1300487A GB 5749970 A GB5749970 A GB 5749970A GB 5749970 A GB5749970 A GB 5749970A GB 1300487 A GB1300487 A GB 1300487A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- screen
- wire
- cathode tube
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1300487 Coating with metal by spattering BEKAERT SA NV 3 Dec 1970 [3 Dec 1969] 57499/70 Heading C7F A wire 1 of e.g. steel is coated with e.g. brass or Sn by cathode sputtering in a cathode tube 2 which has a screen 3 interposed between the wire and cathode tube. The screen is such that, in operation, when at a positive potential with respect to the cathode, particles of the coating material pass through the screen but electrically charged particles are trapped by the screen. In one embodiment, the apparatus is located in a chamber with an argon pressure of 10<SP>-3</SP> Torr and a potential of 1 to 5kV applied between the screen (as an anode) 3 and cathode 2. A glow discharge plasma is formed confined to the space between screen and cathode. Ion-bombarded particles pass from the cathode 2 through the screen 3 on to the wire 1. The plasma can be energized by electron beams obtained from tungsten filaments 5 at each end of the cathode 2. So that electrons emitted from one end of the cathode do not reach the opposing tungsten filaments, the filaments may be arranged to the side of the axes of the cathode tube, and the electron beams produced bent by electrostatic shields . The plasma can be intensified by surrounding the cathode tube 2 by a solenoid and the apparatus can be arranged so that the wire 1 passes through the cathode tube several times.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6918196A NL6918196A (en) | 1969-12-03 | 1969-12-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1300487A true GB1300487A (en) | 1972-12-20 |
Family
ID=19808541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5749970A Expired GB1300487A (en) | 1969-12-03 | 1970-12-03 | Improvements relating to the coating of articles by cathode sputtering |
Country Status (4)
Country | Link |
---|---|
BE (1) | BE759020A (en) |
FR (1) | FR2072369A5 (en) |
GB (1) | GB1300487A (en) |
NL (1) | NL6918196A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006002673A1 (en) * | 2004-06-30 | 2006-01-12 | Pirelli Tyre S.P.A. | Method for producing a metal wire coated with a layer of brass |
EP1576202B1 (en) * | 2002-12-23 | 2013-05-29 | Pirelli Tyre S.p.A. | Methods for producing coated metal wire |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2533071B1 (en) * | 1982-09-10 | 1985-07-05 | Centre Nat Rech Scient | IMPROVEMENTS IN SUBSTRATES COATED WITH A THIN LAYER OF PLATIN OXIDE, IN DEVICES FOR OBTAINING SUCH COATED SUBSTRATES, AND IN PRODUCTS OBTAINED FROM SUCH COATED SUBSTRATES |
-
0
- BE BE759020D patent/BE759020A/en unknown
-
1969
- 1969-12-03 NL NL6918196A patent/NL6918196A/xx unknown
-
1970
- 1970-11-25 FR FR7042299A patent/FR2072369A5/fr not_active Expired
- 1970-12-03 GB GB5749970A patent/GB1300487A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1576202B1 (en) * | 2002-12-23 | 2013-05-29 | Pirelli Tyre S.p.A. | Methods for producing coated metal wire |
WO2006002673A1 (en) * | 2004-06-30 | 2006-01-12 | Pirelli Tyre S.P.A. | Method for producing a metal wire coated with a layer of brass |
CN1977067B (en) * | 2004-06-30 | 2012-04-18 | 倍耐力轮胎股份公司 | Method for producing a metal wire coated with a layer of brass |
Also Published As
Publication number | Publication date |
---|---|
NL6918196A (en) | 1971-06-07 |
BE759020A (en) | 1971-04-30 |
FR2072369A5 (en) | 1971-09-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |