DE2238413C3 - Vorrichtung zum Messen der Verschiebung zweier gegeneinander beweglicher Teile - Google Patents
Vorrichtung zum Messen der Verschiebung zweier gegeneinander beweglicher TeileInfo
- Publication number
- DE2238413C3 DE2238413C3 DE2238413A DE2238413A DE2238413C3 DE 2238413 C3 DE2238413 C3 DE 2238413C3 DE 2238413 A DE2238413 A DE 2238413A DE 2238413 A DE2238413 A DE 2238413A DE 2238413 C3 DE2238413 C3 DE 2238413C3
- Authority
- DE
- Germany
- Prior art keywords
- grids
- light
- pair
- grating
- grid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 25
- 230000005540 biological transmission Effects 0.000 claims description 12
- 239000011295 pitch Substances 0.000 claims description 6
- 238000005286 illumination Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Illuminated Signs And Luminous Advertising (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17238371A | 1971-08-17 | 1971-08-17 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2238413A1 DE2238413A1 (de) | 1973-03-01 |
| DE2238413B2 DE2238413B2 (de) | 1980-12-18 |
| DE2238413C3 true DE2238413C3 (de) | 1981-09-03 |
Family
ID=22627487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2238413A Expired DE2238413C3 (de) | 1971-08-17 | 1972-08-04 | Vorrichtung zum Messen der Verschiebung zweier gegeneinander beweglicher Teile |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3768911A (enrdf_load_stackoverflow) |
| JP (1) | JPS5531882B2 (enrdf_load_stackoverflow) |
| CA (1) | CA953908A (enrdf_load_stackoverflow) |
| CH (1) | CH553962A (enrdf_load_stackoverflow) |
| DE (1) | DE2238413C3 (enrdf_load_stackoverflow) |
| GB (1) | GB1367039A (enrdf_load_stackoverflow) |
| SE (1) | SE388273B (enrdf_load_stackoverflow) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1432122A (en) * | 1973-04-02 | 1976-04-14 | Facit Ab | Device for sensing the direction of movement of a perforated code carrier |
| DE2431551C2 (de) * | 1974-07-01 | 1981-09-17 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Anordnung zur Messung von Bewegungen und Geschwindigkeiten |
| NL185178C (nl) * | 1974-03-15 | 1990-02-01 | Nat Res Dev | Inrichting voor het foto-elektrisch meten van een relatieve verschuiving tussen twee elementen. |
| GB1504691A (en) * | 1974-03-15 | 1978-03-22 | Nat Res Dev | Measurement apparatus |
| DE2427236C2 (de) * | 1974-06-06 | 1985-09-05 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Beugung von interferenzfähigem Licht |
| GB1523584A (en) * | 1974-09-05 | 1978-09-06 | Strathearn Audio Ltd | Apparatus for indicating angular displacement |
| US3957378A (en) * | 1974-11-25 | 1976-05-18 | The Bendix Corporation | Two-axis moire fringe displacement transducer |
| US4049965A (en) * | 1975-03-06 | 1977-09-20 | National Research Development Corporation | Measurement apparatus |
| US4039805A (en) * | 1975-03-27 | 1977-08-02 | The Measuregraph Company | Apparatus for calculating the price of measured lengths of material |
| US4021116A (en) * | 1975-09-02 | 1977-05-03 | Bausch & Lomb Incorporated | High resolution distance measuring apparatus |
| FR2436967A1 (fr) * | 1978-09-19 | 1980-04-18 | Thomson Csf | Procede d'alignement optique de motifs dans deux plans rapproches et dispositif d'alignement mettant en oeuvre un tel procede |
| US4318617A (en) * | 1979-12-14 | 1982-03-09 | Keuffel & Esser Company | DC Shift error correction for electro-optical measuring system |
| US4293188A (en) * | 1980-03-24 | 1981-10-06 | Sperry Corporation | Fiber optic small displacement sensor |
| US4286871A (en) * | 1980-08-11 | 1981-09-01 | Keuffel & Esser Company | Photogrammetric measuring system |
| DE3412980A1 (de) * | 1984-04-06 | 1985-10-17 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Auflichtphasengitter und verfahren zur herstellung eines auflichtphasengitters |
| DE3526735A1 (de) * | 1985-07-26 | 1987-02-05 | Heidenhain Gmbh Dr Johannes | Fehlergesicherte inkrementale positionsmesseinrichtung |
| AT397308B (de) * | 1985-07-10 | 1994-03-25 | Rsf Elektronik Gmbh | Messsystem für die messung von längen und winkeln |
| US4731744A (en) * | 1985-07-16 | 1988-03-15 | Neal Hare | Position sensor and system |
| GB8615197D0 (en) * | 1986-06-21 | 1986-07-23 | Renishaw Plc | Opto-electronic scale reading apparatus |
| IN168444B (enrdf_load_stackoverflow) * | 1986-08-15 | 1991-04-06 | Mitutoyo Mfg Co Ltd | |
| US4722600A (en) * | 1986-10-14 | 1988-02-02 | Chiang Fu Pen | Apparatus and method for measuring strain |
| DE3636744C1 (de) * | 1986-10-29 | 1988-03-24 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Laengen- oder Winkelmesseinrichtung |
| US4827436A (en) * | 1987-04-22 | 1989-05-02 | Micro Component Technology, Inc. | Non-contact high resolution displacement measurement technique |
| US4943716A (en) * | 1988-01-22 | 1990-07-24 | Mitutoyo Corporation | Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations |
| JPH07888Y2 (ja) * | 1988-02-22 | 1995-01-11 | 株式会社ミツトヨ | 光学式変位検出器 |
| DE3810165C1 (enrdf_load_stackoverflow) * | 1988-03-25 | 1989-07-27 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De | |
| US5012080A (en) * | 1990-04-19 | 1991-04-30 | Griscom Daniel T | Directional particle filter |
| JP2862417B2 (ja) * | 1990-11-16 | 1999-03-03 | キヤノン株式会社 | 変位測定装置及び方法 |
| EP0486050B1 (en) * | 1990-11-16 | 1998-02-04 | Canon Kabushiki Kaisha | Method and apparatus for measuring displacement |
| US5430537A (en) * | 1993-09-03 | 1995-07-04 | Dynamics Research Corporation | Light beam distance encoder |
| US6535280B1 (en) * | 2001-08-31 | 2003-03-18 | Advanced Micro Devices, Inc. | Phase-shift-moiré focus monitor |
| JP2006013400A (ja) * | 2004-06-29 | 2006-01-12 | Canon Inc | ２つの対象物間の相対的位置ずれ検出方法及び装置 |
| JP4918593B2 (ja) * | 2006-08-21 | 2012-04-18 | ジーエスアイ・グループ・コーポレーション | 共用レチクル基板を有する複数のサブエンコーダを利用する光学式回転エンコーダ |
| RU2509324C2 (ru) * | 2010-05-11 | 2014-03-10 | Рустам Сабирович Закируллин | Способ регулирования направленного светопропускания |
| EP2946045A4 (en) * | 2013-01-01 | 2016-11-16 | Active Glass Technologies Ltd | CONTROLLED PERMEABILITY AND REFLECTION IN WINDOWS |
| JP6386337B2 (ja) * | 2014-10-23 | 2018-09-05 | 株式会社ミツトヨ | 光学式エンコーダ |
| CN110487219A (zh) * | 2019-08-15 | 2019-11-22 | 卢振武 | 一种运动机构直线度的检测系统及其检测方法 |
| CN113029006B (zh) * | 2021-04-27 | 2022-09-30 | 重庆理工大学 | 一种基于莫尔条纹的检测装置和检测方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1153909B (de) * | 1956-01-27 | 1963-09-05 | Schenck Gmbh Carl | Vorrichtung zum Messen von Verstellwegen |
| US2993279A (en) * | 1958-04-08 | 1961-07-25 | North American Aviation Inc | Photoelectric gage |
| DE1084928B (de) * | 1958-06-12 | 1960-07-07 | North American Aviation Inc | Messvorrichtung mit zwei optischen Gittern |
| DE1259621B (de) * | 1965-03-25 | 1968-01-25 | Telefunken Patent | Lichtelektrischer Messgenerator |
-
1971
- 1971-08-17 US US00172383A patent/US3768911A/en not_active Expired - Lifetime
-
1972
- 1972-08-04 DE DE2238413A patent/DE2238413C3/de not_active Expired
- 1972-08-08 CH CH1170872A patent/CH553962A/xx not_active IP Right Cessation
- 1972-08-14 SE SE7210537A patent/SE388273B/xx unknown
- 1972-08-14 GB GB3774572A patent/GB1367039A/en not_active Expired
- 1972-08-15 JP JP8177972A patent/JPS5531882B2/ja not_active Expired
- 1972-08-16 CA CA149,528A patent/CA953908A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA953908A (en) | 1974-09-03 |
| US3768911A (en) | 1973-10-30 |
| JPS5531882B2 (enrdf_load_stackoverflow) | 1980-08-21 |
| DE2238413B2 (de) | 1980-12-18 |
| GB1367039A (en) | 1974-09-18 |
| SE388273B (sv) | 1976-09-27 |
| JPS4829464A (enrdf_load_stackoverflow) | 1973-04-19 |
| DE2238413A1 (de) | 1973-03-01 |
| CH553962A (de) | 1974-09-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |