DE2218153A1 - Katalytisches Element sowie Verfahren und Vorrichtung zu seiner Herstellung - Google Patents
Katalytisches Element sowie Verfahren und Vorrichtung zu seiner HerstellungInfo
- Publication number
- DE2218153A1 DE2218153A1 DE19722218153 DE2218153A DE2218153A1 DE 2218153 A1 DE2218153 A1 DE 2218153A1 DE 19722218153 DE19722218153 DE 19722218153 DE 2218153 A DE2218153 A DE 2218153A DE 2218153 A1 DE2218153 A1 DE 2218153A1
- Authority
- DE
- Germany
- Prior art keywords
- wire
- ions
- devices
- ion
- bundle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003197 catalytic effect Effects 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000000034 method Methods 0.000 title claims description 4
- 150000002500 ions Chemical class 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 239000012876 carrier material Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 description 23
- 239000000356 contaminant Substances 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000001518 atomic anions Chemical class 0.000 description 1
- 150000001793 charged compounds Polymers 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/341—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of electric or magnetic fields, wave energy or particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/348—Electrochemical processes, e.g. electrochemical deposition or anodisation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Catalysts (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7113515A FR2133315A5 (enrdf_load_stackoverflow) | 1971-04-16 | 1971-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2218153A1 true DE2218153A1 (de) | 1972-10-26 |
Family
ID=9075390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19722218153 Pending DE2218153A1 (de) | 1971-04-16 | 1972-04-14 | Katalytisches Element sowie Verfahren und Vorrichtung zu seiner Herstellung |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE2218153A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2133315A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1392358A (enrdf_load_stackoverflow) |
| NL (1) | NL7205025A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2412939A1 (fr) * | 1977-12-23 | 1979-07-20 | Anvar | Implanteur d'ions a fort courant |
| JPS57182864U (enrdf_load_stackoverflow) * | 1981-05-18 | 1982-11-19 |
-
1971
- 1971-04-16 FR FR7113515A patent/FR2133315A5/fr not_active Expired
-
1972
- 1972-04-14 GB GB1741072A patent/GB1392358A/en not_active Expired
- 1972-04-14 NL NL7205025A patent/NL7205025A/xx unknown
- 1972-04-14 DE DE19722218153 patent/DE2218153A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL7205025A (enrdf_load_stackoverflow) | 1972-10-18 |
| GB1392358A (en) | 1975-04-30 |
| FR2133315A5 (enrdf_load_stackoverflow) | 1972-11-24 |
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