DE2132269A1 - Vorrichtung und Verfahren zum Erzeugen von Moire-Effekt-Interferenzmustern - Google Patents

Vorrichtung und Verfahren zum Erzeugen von Moire-Effekt-Interferenzmustern

Info

Publication number
DE2132269A1
DE2132269A1 DE19712132269 DE2132269A DE2132269A1 DE 2132269 A1 DE2132269 A1 DE 2132269A1 DE 19712132269 DE19712132269 DE 19712132269 DE 2132269 A DE2132269 A DE 2132269A DE 2132269 A1 DE2132269 A1 DE 2132269A1
Authority
DE
Germany
Prior art keywords
light
measured
interference patterns
generating
light rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712132269
Other languages
German (de)
English (en)
Inventor
Satoru Anzai
Yoshinobu Ito
Tadao Tsuruta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of DE2132269A1 publication Critical patent/DE2132269A1/de
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/60Systems using moiré fringes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19712132269 1970-07-02 1971-06-29 Vorrichtung und Verfahren zum Erzeugen von Moire-Effekt-Interferenzmustern Pending DE2132269A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5729270 1970-07-02

Publications (1)

Publication Number Publication Date
DE2132269A1 true DE2132269A1 (de) 1972-01-13

Family

ID=13051463

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712132269 Pending DE2132269A1 (de) 1970-07-02 1971-06-29 Vorrichtung und Verfahren zum Erzeugen von Moire-Effekt-Interferenzmustern

Country Status (3)

Country Link
DE (1) DE2132269A1 (enExample)
FR (1) FR2100855B1 (enExample)
GB (1) GB1357917A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2439382A1 (fr) * 1978-10-19 1980-05-16 Experim Rech Etu Batim Centre Procede et dispositif pour mesurer les deformations d'un subjectile au moyen d'un reseau

Also Published As

Publication number Publication date
GB1357917A (en) 1974-06-26
FR2100855A1 (enExample) 1972-03-24
FR2100855B1 (enExample) 1974-05-31

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Legal Events

Date Code Title Description
OHA Expiration of time for request for examination