GB1357917A - Method for forming moire fringe contour lines - Google Patents

Method for forming moire fringe contour lines

Info

Publication number
GB1357917A
GB1357917A GB3045771A GB3045771A GB1357917A GB 1357917 A GB1357917 A GB 1357917A GB 3045771 A GB3045771 A GB 3045771A GB 3045771 A GB3045771 A GB 3045771A GB 1357917 A GB1357917 A GB 1357917A
Authority
GB
United Kingdom
Prior art keywords
moire
fringes
lens
prism
flatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3045771A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of GB1357917A publication Critical patent/GB1357917A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/60—Systems using moiré fringes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

1357917 Measuring surface flatness using moire fring patterns NIPPON KOGAKU K K 29 June 1971 [2 July 1970] 30457/71 Heading G2J The invention relates to measuring the flatness of a surface in a recess using moire fringes. If light from a laser L, Fig. 1, is brought to a point focus 2 and then passed through a prism B to give rise to two effective point sources 3, 4, which are located at the focus of a collimating lens 5 two collimated light beams are produced which are so angled to one another that they are obliquely incident on and interfere on the surface 6 being investigated. If the interference fringes are photographed at 8 through lens 7 and the photograph superimposed on a similar photograph taken when a flat reference surface 9 is substituted for surface 6, a moire pattern appears, from which the difference in height of various portions of surface 6 can be deduced. However if the surface 10, Fig. 2, lies at the bottom of a recess, some of the oblique rays of the Fig. 1 arrangement would not reach the surface. Accordingly the collimated light beam paths 30, 40 are directed nearly normally towards surface 10 and are deflected on to the surface 10 by a prism 20. As shown the surface is that of a film in a camera and accordingly acts itself to record the fringes. The process is repeated using as a test flat surface a photographic plate 25 in place of the film. The two records are then superimposed and the moire fringe pattern observed through a converging lens (30'), Fig.3, (not shown) and an apertured diaphragm (35).
GB3045771A 1970-07-02 1971-06-29 Method for forming moire fringe contour lines Expired GB1357917A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5729270 1970-07-02

Publications (1)

Publication Number Publication Date
GB1357917A true GB1357917A (en) 1974-06-26

Family

ID=13051463

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3045771A Expired GB1357917A (en) 1970-07-02 1971-06-29 Method for forming moire fringe contour lines

Country Status (3)

Country Link
DE (1) DE2132269A1 (en)
FR (1) FR2100855B1 (en)
GB (1) GB1357917A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2439382A1 (en) * 1978-10-19 1980-05-16 Experim Rech Etu Batim Centre Fringe method measuring deformations over large surface area - involves projection of two coherent beams onto grating on object surface

Also Published As

Publication number Publication date
DE2132269A1 (en) 1972-01-13
FR2100855B1 (en) 1974-05-31
FR2100855A1 (en) 1972-03-24

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees