DE2131450B2 - Verfahren zur Herstellung passiver, integrierter, optischer Bauelemente - Google Patents

Verfahren zur Herstellung passiver, integrierter, optischer Bauelemente

Info

Publication number
DE2131450B2
DE2131450B2 DE19712131450 DE2131450A DE2131450B2 DE 2131450 B2 DE2131450 B2 DE 2131450B2 DE 19712131450 DE19712131450 DE 19712131450 DE 2131450 A DE2131450 A DE 2131450A DE 2131450 B2 DE2131450 B2 DE 2131450B2
Authority
DE
Germany
Prior art keywords
layer
exposure
light
refractive index
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712131450
Other languages
German (de)
English (en)
Other versions
DE2131450A1 (de
Inventor
Horst Dr. Kiemle
Guenter Dipl.-Ing. Zeidler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19712131450 priority Critical patent/DE2131450B2/de
Priority to NL7207990A priority patent/NL7207990A/xx
Priority to GB2795372A priority patent/GB1394747A/en
Priority to FR7221817A priority patent/FR2143044A1/fr
Priority to IT2597172A priority patent/IT956735B/it
Priority to LU65581D priority patent/LU65581A1/xx
Priority to BE785362A priority patent/BE785362A/xx
Publication of DE2131450A1 publication Critical patent/DE2131450A1/de
Publication of DE2131450B2 publication Critical patent/DE2131450B2/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/05—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect with ferro-electric properties
    • G02F1/0541—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect with ferro-electric properties using photorefractive effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
DE19712131450 1971-06-24 1971-06-24 Verfahren zur Herstellung passiver, integrierter, optischer Bauelemente Pending DE2131450B2 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE19712131450 DE2131450B2 (de) 1971-06-24 1971-06-24 Verfahren zur Herstellung passiver, integrierter, optischer Bauelemente
NL7207990A NL7207990A (enExample) 1971-06-24 1972-06-12
GB2795372A GB1394747A (en) 1971-06-24 1972-06-15 Optical systems including passive integrated optical components
FR7221817A FR2143044A1 (enExample) 1971-06-24 1972-06-16
IT2597172A IT956735B (it) 1971-06-24 1972-06-21 Procedimento per fabbricare compo nenti ottici integrati passivi
LU65581D LU65581A1 (enExample) 1971-06-24 1972-06-22
BE785362A BE785362A (fr) 1971-06-24 1972-06-23 Procede pour fabriquer des composants optiques integres et passifs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712131450 DE2131450B2 (de) 1971-06-24 1971-06-24 Verfahren zur Herstellung passiver, integrierter, optischer Bauelemente

Publications (2)

Publication Number Publication Date
DE2131450A1 DE2131450A1 (de) 1973-02-01
DE2131450B2 true DE2131450B2 (de) 1973-09-13

Family

ID=5811725

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712131450 Pending DE2131450B2 (de) 1971-06-24 1971-06-24 Verfahren zur Herstellung passiver, integrierter, optischer Bauelemente

Country Status (7)

Country Link
BE (1) BE785362A (enExample)
DE (1) DE2131450B2 (enExample)
FR (1) FR2143044A1 (enExample)
GB (1) GB1394747A (enExample)
IT (1) IT956735B (enExample)
LU (1) LU65581A1 (enExample)
NL (1) NL7207990A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042514A1 (de) * 1980-06-20 1981-12-30 Siemens Aktiengesellschaft Planare Wellenleiterlinse, ihre Verwendung und Verfahren zu ihrer Herstellung
DE3024104A1 (de) * 1980-06-27 1982-01-21 Fa. Carl Zeiss, 7920 Heidenheim Integrierte mikrooptische vorrichtung zur verwendung mit multimode-lichtleitfasern und verfahren zu ihrer herstellung

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609252A (en) * 1979-04-02 1986-09-02 Hughes Aircraft Company Organic optical waveguide device and method of making
DE3011166A1 (de) * 1979-04-02 1980-10-16 Hughes Aircraft Co Verfahren zur herstellung einer optischen wellenleiteranordnung
FR2459986A1 (fr) * 1979-06-22 1981-01-16 Commissariat Energie Atomique Lentille de fresnel integree
JPS5850568A (ja) * 1981-09-22 1983-03-25 Sumitomo Electric Ind Ltd 光導波路ホログラム
CA1211868A (en) * 1982-04-16 1986-09-23 Yoshikazu Nishiwaki Method of forming diffraction gratings and optical branching filter elements produced thereby
GB2133900A (en) * 1983-01-15 1984-08-01 Marconi Co Ltd Planar waveguides including a lens portion
GB2170923A (en) * 1985-02-07 1986-08-13 Tektronix Inc Optical waveguide structures and their fabrication
DE3527433A1 (de) * 1985-07-31 1987-02-05 Schott Glaswerke Modenunabhaengiger integriert-optischer lichtwellenstrahlteiler und verfahren zu seiner herstellung
US4715027A (en) * 1986-05-29 1987-12-22 Polaroid Corporation Integrated optic multi/demultiplexer
CA1327285C (en) * 1988-01-15 1994-03-01 Bruce Lee Booth Optical waveguide devices, elements for making the devices and methods of making the devices and elements
US5292620A (en) * 1988-01-15 1994-03-08 E. I. Du Pont De Nemours And Company Optical waveguide devices, elements for making the devices and methods of making the devices and elements
GB2220080A (en) * 1988-06-24 1989-12-28 Marconi Gec Ltd Improvements in optical waveguides
US5439782A (en) * 1993-12-13 1995-08-08 At&T Corp. Methods for making microstructures
KR100288742B1 (ko) * 1997-03-12 2001-05-02 윤종용 광도파로소자의제조방법
IT1302219B1 (it) * 1998-09-16 2000-09-05 Mantegazza A Arti Grafici Procedimento di stampa ad alta definizione, particolarmente per filidi sicurezza per banconote e simili.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042514A1 (de) * 1980-06-20 1981-12-30 Siemens Aktiengesellschaft Planare Wellenleiterlinse, ihre Verwendung und Verfahren zu ihrer Herstellung
DE3024104A1 (de) * 1980-06-27 1982-01-21 Fa. Carl Zeiss, 7920 Heidenheim Integrierte mikrooptische vorrichtung zur verwendung mit multimode-lichtleitfasern und verfahren zu ihrer herstellung

Also Published As

Publication number Publication date
NL7207990A (enExample) 1972-12-28
BE785362A (fr) 1972-10-16
DE2131450A1 (de) 1973-02-01
LU65581A1 (enExample) 1972-10-25
IT956735B (it) 1973-10-10
FR2143044A1 (enExample) 1973-02-02
GB1394747A (en) 1975-05-21

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