DE2115385A1 - Legierungs-Flächentransistor und Verfahren zu seiner Herstellung - Google Patents
Legierungs-Flächentransistor und Verfahren zu seiner HerstellungInfo
- Publication number
- DE2115385A1 DE2115385A1 DE19712115385 DE2115385A DE2115385A1 DE 2115385 A1 DE2115385 A1 DE 2115385A1 DE 19712115385 DE19712115385 DE 19712115385 DE 2115385 A DE2115385 A DE 2115385A DE 2115385 A1 DE2115385 A1 DE 2115385A1
- Authority
- DE
- Germany
- Prior art keywords
- recrystallized
- metal
- recrystallized layer
- layer
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000956 alloy Substances 0.000 title claims description 64
- 229910045601 alloy Inorganic materials 0.000 title claims description 64
- 238000000034 method Methods 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 58
- 239000002184 metal Substances 0.000 claims description 58
- 239000004065 semiconductor Substances 0.000 claims description 35
- 239000012535 impurity Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 28
- 230000007704 transition Effects 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 239000000356 contaminant Substances 0.000 claims description 15
- 230000002452 interceptive effect Effects 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 7
- 238000005275 alloying Methods 0.000 claims description 4
- 238000000866 electrolytic etching Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 241000607479 Yersinia pestis Species 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 210000002468 fat body Anatomy 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000011282 treatment Methods 0.000 description 36
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 21
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 15
- 229910052732 germanium Inorganic materials 0.000 description 14
- 229910052738 indium Inorganic materials 0.000 description 14
- 230000003321 amplification Effects 0.000 description 13
- 238000003199 nucleic acid amplification method Methods 0.000 description 13
- 229910052787 antimony Inorganic materials 0.000 description 8
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 102100038123 Teneurin-4 Human genes 0.000 description 1
- 101710122302 Teneurin-4 Proteins 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001462 antimony Chemical class 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002471 indium Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/24—Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2683270 | 1970-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2115385A1 true DE2115385A1 (de) | 1971-10-21 |
Family
ID=12204225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712115385 Pending DE2115385A1 (de) | 1970-03-31 | 1971-03-30 | Legierungs-Flächentransistor und Verfahren zu seiner Herstellung |
Country Status (3)
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE529698A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1953-06-19 | |||
| DE1250003B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1963-06-28 |
-
1971
- 1971-03-29 NL NL7104206A patent/NL7104206A/xx unknown
- 1971-03-30 DE DE19712115385 patent/DE2115385A1/de active Pending
- 1971-03-30 FR FR7111168A patent/FR2091988B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL7104206A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-10-04 |
| FR2091988B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-08 |
| FR2091988A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-01-21 |
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