DE2113853C3 - Verfahren zur Herstellung von fest haftenden verschleißfesten Überzügen aus Metallnitrid oder karbonitnd auf Hartmetallteilen - Google Patents
Verfahren zur Herstellung von fest haftenden verschleißfesten Überzügen aus Metallnitrid oder karbonitnd auf HartmetallteilenInfo
- Publication number
- DE2113853C3 DE2113853C3 DE19712113853 DE2113853A DE2113853C3 DE 2113853 C3 DE2113853 C3 DE 2113853C3 DE 19712113853 DE19712113853 DE 19712113853 DE 2113853 A DE2113853 A DE 2113853A DE 2113853 C3 DE2113853 C3 DE 2113853C3
- Authority
- DE
- Germany
- Prior art keywords
- metal
- production
- hard
- hard metal
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 32
- 239000002184 metal Substances 0.000 title claims description 32
- 238000000576 coating method Methods 0.000 title claims description 15
- 150000004767 nitrides Chemical class 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000000034 method Methods 0.000 title claims 4
- CKFGINPQOCXMAZ-UHFFFAOYSA-N methanediol Chemical compound OCO CKFGINPQOCXMAZ-UHFFFAOYSA-N 0.000 title 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 238000005520 cutting process Methods 0.000 claims description 8
- 229910001507 metal halide Inorganic materials 0.000 claims description 8
- 150000005309 metal halides Chemical class 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910000039 hydrogen halide Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 206010010144 Completed suicide Diseases 0.000 description 1
- 229910001208 Crucible steel Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012433 hydrogen halide Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712113853 DE2113853C3 (de) | 1971-03-23 | 1971-03-23 | Verfahren zur Herstellung von fest haftenden verschleißfesten Überzügen aus Metallnitrid oder karbonitnd auf Hartmetallteilen |
| AT42172A AT308488B (de) | 1971-03-23 | 1972-01-19 | Verfahren zur Herstellung von festhaftenden, verschleißfesten Überzügen aus Metallnitrid oder -karbonitrid |
| IT4810472A IT948410B (it) | 1971-03-23 | 1972-02-02 | Procedimento per la produzione di rivestimenti di nitruro o carboni turo metallico resistente all usu ra e saldamente aderenti su parti di metallo duro |
| GB965872A GB1332878A (en) | 1971-03-23 | 1972-03-01 | Method of producing firmly bonded wear-resistant coat9ngs of metal nitride or carbonitride on metal parts |
| FR7209597A FR2130445B1 (https=) | 1971-03-23 | 1972-03-20 | |
| SE363072A SE379559B (https=) | 1971-03-23 | 1972-03-21 | |
| JP47029367A JPS5147155B1 (https=) | 1971-03-23 | 1972-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712113853 DE2113853C3 (de) | 1971-03-23 | 1971-03-23 | Verfahren zur Herstellung von fest haftenden verschleißfesten Überzügen aus Metallnitrid oder karbonitnd auf Hartmetallteilen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2113853A1 DE2113853A1 (de) | 1972-10-12 |
| DE2113853B2 DE2113853B2 (de) | 1973-05-17 |
| DE2113853C3 true DE2113853C3 (de) | 1973-12-13 |
Family
ID=5802407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712113853 Expired DE2113853C3 (de) | 1971-03-23 | 1971-03-23 | Verfahren zur Herstellung von fest haftenden verschleißfesten Überzügen aus Metallnitrid oder karbonitnd auf Hartmetallteilen |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5147155B1 (https=) |
| AT (1) | AT308488B (https=) |
| DE (1) | DE2113853C3 (https=) |
| FR (1) | FR2130445B1 (https=) |
| GB (1) | GB1332878A (https=) |
| IT (1) | IT948410B (https=) |
| SE (1) | SE379559B (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3141310A1 (de) * | 1980-10-24 | 1982-06-16 | Kabushiki Kaisha Suwa Seikosha, Tokyo | Verfahren zur chemischen dampfabscheidung |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4150195A (en) * | 1976-06-18 | 1979-04-17 | Sumitomo Electric Industries, Ltd. | Surface-coated cemented carbide article and a process for the production thereof |
| US4268569A (en) * | 1979-02-07 | 1981-05-19 | General Electric Company | Coating underlayers |
| USRE34180E (en) * | 1981-03-27 | 1993-02-16 | Kennametal Inc. | Preferentially binder enriched cemented carbide bodies and method of manufacture |
| US4803127A (en) * | 1983-02-25 | 1989-02-07 | Liburdi Engineering Limited | Vapor deposition of metal compound coating utilizing metal sub-halides and coated metal article |
| JPS60251274A (ja) * | 1984-05-28 | 1985-12-11 | Toyota Central Res & Dev Lab Inc | 窒化物被覆方法 |
| DE3544975C1 (de) * | 1985-12-19 | 1992-09-24 | Krupp Gmbh | Verfahren zur Herstellung eines beschichteten Formkoerpers |
| SE514181C2 (sv) * | 1995-04-05 | 2001-01-15 | Sandvik Ab | Belagt hårmetallskär för fräsning av gjutjärn |
-
1971
- 1971-03-23 DE DE19712113853 patent/DE2113853C3/de not_active Expired
-
1972
- 1972-01-19 AT AT42172A patent/AT308488B/de not_active IP Right Cessation
- 1972-02-02 IT IT4810472A patent/IT948410B/it active
- 1972-03-01 GB GB965872A patent/GB1332878A/en not_active Expired
- 1972-03-20 FR FR7209597A patent/FR2130445B1/fr not_active Expired
- 1972-03-21 SE SE363072A patent/SE379559B/xx unknown
- 1972-03-23 JP JP47029367A patent/JPS5147155B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3141310A1 (de) * | 1980-10-24 | 1982-06-16 | Kabushiki Kaisha Suwa Seikosha, Tokyo | Verfahren zur chemischen dampfabscheidung |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2113853B2 (de) | 1973-05-17 |
| SE379559B (https=) | 1975-10-13 |
| AT308488B (de) | 1973-07-10 |
| JPS5147155B1 (https=) | 1976-12-13 |
| FR2130445B1 (https=) | 1976-08-06 |
| IT948410B (it) | 1973-05-30 |
| DE2113853A1 (de) | 1972-10-12 |
| FR2130445A1 (https=) | 1972-11-03 |
| GB1332878A (en) | 1973-10-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EGA | New person/name/address of the applicant | ||
| 8339 | Ceased/non-payment of the annual fee |