DE2112812C2 - Halbleiterbauelement mit gitterförmiger Metallelektrode und Verfahren zu dessen Herstellung - Google Patents

Halbleiterbauelement mit gitterförmiger Metallelektrode und Verfahren zu dessen Herstellung

Info

Publication number
DE2112812C2
DE2112812C2 DE2112812A DE2112812A DE2112812C2 DE 2112812 C2 DE2112812 C2 DE 2112812C2 DE 2112812 A DE2112812 A DE 2112812A DE 2112812 A DE2112812 A DE 2112812A DE 2112812 C2 DE2112812 C2 DE 2112812C2
Authority
DE
Germany
Prior art keywords
semiconductor
semiconductor component
component according
coated
metal electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2112812A
Other languages
German (de)
English (en)
Other versions
DE2112812A1 (de
Inventor
Horst Dipl.-Phys. Dr. 7100 Heilbronn Fischer
Eduard Prof.Dr. 3300 Braunschweig Justi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs GmbH
Original Assignee
Licentia Patent Verwaltungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs GmbH filed Critical Licentia Patent Verwaltungs GmbH
Priority to DE2112812A priority Critical patent/DE2112812C2/de
Priority to FR7147400A priority patent/FR2130071B1/fr
Priority to US00217597A priority patent/US3778684A/en
Priority to GB960272A priority patent/GB1360701A/en
Priority to IT21271/72A priority patent/IT949770B/it
Priority to NL7203295A priority patent/NL7203295A/xx
Publication of DE2112812A1 publication Critical patent/DE2112812A1/de
Application granted granted Critical
Publication of DE2112812C2 publication Critical patent/DE2112812C2/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07331—Connecting techniques
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/30—Die-attach connectors
    • H10W72/351—Materials of die-attach connectors
    • H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
DE2112812A 1971-03-17 1971-03-17 Halbleiterbauelement mit gitterförmiger Metallelektrode und Verfahren zu dessen Herstellung Expired DE2112812C2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE2112812A DE2112812C2 (de) 1971-03-17 1971-03-17 Halbleiterbauelement mit gitterförmiger Metallelektrode und Verfahren zu dessen Herstellung
FR7147400A FR2130071B1 (enExample) 1971-03-17 1971-12-29
US00217597A US3778684A (en) 1971-03-17 1972-01-13 Semiconductor element and method of making it
GB960272A GB1360701A (en) 1971-03-17 1972-03-01 Semiconductor element and method of making it
IT21271/72A IT949770B (it) 1971-03-17 1972-03-01 Componente semiconduttore
NL7203295A NL7203295A (enExample) 1971-03-17 1972-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2112812A DE2112812C2 (de) 1971-03-17 1971-03-17 Halbleiterbauelement mit gitterförmiger Metallelektrode und Verfahren zu dessen Herstellung

Publications (2)

Publication Number Publication Date
DE2112812A1 DE2112812A1 (de) 1972-10-19
DE2112812C2 true DE2112812C2 (de) 1984-02-09

Family

ID=5801811

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2112812A Expired DE2112812C2 (de) 1971-03-17 1971-03-17 Halbleiterbauelement mit gitterförmiger Metallelektrode und Verfahren zu dessen Herstellung

Country Status (6)

Country Link
US (1) US3778684A (enExample)
DE (1) DE2112812C2 (enExample)
FR (1) FR2130071B1 (enExample)
GB (1) GB1360701A (enExample)
IT (1) IT949770B (enExample)
NL (1) NL7203295A (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3982260A (en) * 1975-08-01 1976-09-21 Mobil Tyco Solar Energy Corporation Light sensitive electronic devices
DE2543222B1 (de) * 1975-09-25 1977-03-03 Itt Ind Gmbh Deutsche Leuchtdiode
US4082569A (en) * 1977-02-22 1978-04-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Solar cell collector
DE2709741A1 (de) * 1977-03-05 1978-09-07 Licentia Gmbh Solarzellenanordnung fuer den terrestrischen bereich
DE2732933C2 (de) * 1977-07-21 1984-11-15 Bloss, Werner H., Prof. Dr.-Ing., 7065 Winterbach Verfahren zum Herstellen von Dünnschicht-Solarzellen mit pn-Heteroübergang
US4133699A (en) * 1978-04-26 1979-01-09 Communications Satellite Corporation Shaped edge solar cell coverslide
US4267398A (en) * 1979-05-29 1981-05-12 University Of Delaware Thin film photovoltaic cells
IL60680A (en) * 1979-08-22 1983-07-31 Ses Inc Electrode for photovoltaic cell
US4260428A (en) * 1980-03-05 1981-04-07 Ses, Incorporated Photovoltaic cell
US4319258A (en) * 1980-03-07 1982-03-09 General Dynamics, Pomona Division Schottky barrier photovoltaic detector
JPS59110179A (ja) * 1982-12-16 1984-06-26 Hitachi Ltd 半導体装置およびその製造法
JPS59167096A (ja) * 1983-03-11 1984-09-20 日本電気株式会社 回路基板
DE3516117A1 (de) * 1985-05-04 1986-11-06 Telefunken electronic GmbH, 7100 Heilbronn Solarzelle
DE3627641A1 (de) * 1986-08-14 1988-02-25 Telefunken Electronic Gmbh Solarzelle und verfahren zu ihrer herstellung
US5022930A (en) * 1989-06-20 1991-06-11 Photon Energy, Inc. Thin film photovoltaic panel and method
US5073518A (en) * 1989-11-27 1991-12-17 Micron Technology, Inc. Process to mechanically and plastically deform solid ductile metal to fill contacts of conductive channels with ductile metal and process for dry polishing excess metal from a semiconductor wafer
US7022910B2 (en) * 2002-03-29 2006-04-04 Konarka Technologies, Inc. Photovoltaic cells utilizing mesh electrodes
SE0103740D0 (sv) * 2001-11-08 2001-11-08 Forskarpatent I Vaest Ab Photovoltaic element and production methods
US20070251570A1 (en) * 2002-03-29 2007-11-01 Konarka Technologies, Inc. Photovoltaic cells utilizing mesh electrodes
JP5350587B2 (ja) * 2003-03-24 2013-11-27 メルク パテント ゲーエムベーハー メッシュ電極を備える光電セル
US20070224464A1 (en) * 2005-03-21 2007-09-27 Srini Balasubramanian Dye-sensitized photovoltaic cells
US20070193621A1 (en) * 2005-12-21 2007-08-23 Konarka Technologies, Inc. Photovoltaic cells
US9184317B2 (en) * 2007-04-02 2015-11-10 Merck Patent Gmbh Electrode containing a polymer and an additive
US20130056054A1 (en) * 2011-09-06 2013-03-07 Intermolecular, Inc. High work function low resistivity back contact for thin film solar cells

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE829194C (de) * 1949-10-29 1952-01-24 Licentia Gmbh Mit Stromzufuehrungen versehener Halbleiterfotowiderstand
DE1000533B (de) * 1954-10-22 1957-01-10 Siemens Ag Verfahren zur Kontaktierung eines Halbleiterkoerpers
DE1218073B (de) * 1963-11-18 1966-06-02 Akad Wissenschaften Ddr Verfahren zur Herstellung von Oberflaechenbarriere-Detektoren fuer Kernstrahlung
FR1419202A (fr) * 1963-12-31 1965-11-26 Ibm Contacts ohmiques pour éléments semi-conducteurs
DE1539777A1 (de) * 1965-05-22 1969-07-17 Ckd Praha Halbleiterbauelement mit flaechenhafter Halbleiteranordnung
FR1450654A (fr) * 1965-07-01 1966-06-24 Radiotechnique Perfectionnements aux dispositifs semi-conducteurs de détection de radiations ionisantes
US3496427A (en) * 1966-01-13 1970-02-17 Gen Electric Semiconductor device with composite encapsulation
US3492621A (en) * 1966-06-24 1970-01-27 Nippon Kogaku Kk High sensitivity photoconductive cell
US3523222A (en) * 1966-09-15 1970-08-04 Texas Instruments Inc Semiconductive contacts
DE1564377A1 (de) * 1966-12-21 1970-07-30 Matsushita Electric Ind Co Ltd Photoelektrische Zelle und Herstellungsverfahren
US3442007A (en) * 1966-12-29 1969-05-06 Kewanee Oil Co Process of attaching a collector grid to a photovoltaic cell
US3483038A (en) * 1967-01-05 1969-12-09 Rca Corp Integrated array of thin-film photovoltaic cells and method of making same
US3541679A (en) * 1967-05-18 1970-11-24 Nasa Method of attaching a cover glass to a silicon solar cell
FR1562163A (enExample) * 1968-02-16 1969-04-04
US3536965A (en) * 1968-05-10 1970-10-27 Texas Instruments Inc Metallic contact and interconnection system for semiconductor devices
US3686080A (en) * 1971-07-21 1972-08-22 Rca Corp Method of fabrication of semiconductor devices

Also Published As

Publication number Publication date
FR2130071A1 (enExample) 1972-11-03
US3778684A (en) 1973-12-11
DE2112812A1 (de) 1972-10-19
GB1360701A (en) 1974-07-17
IT949770B (it) 1973-06-11
NL7203295A (enExample) 1972-09-19
FR2130071B1 (enExample) 1977-08-05

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Legal Events

Date Code Title Description
8125 Change of the main classification

Ipc: H01L 31/04

8181 Inventor (new situation)

Free format text: FISCHER, HORST, DIPL.-PHYS. DR., 7100 HEILBRONN, DE JUSTI, EDUARD, PROF.DR., 3300 BRAUNSCHWEIG, DE

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee