DE2102616A1 - Elektronenstrahlgerat - Google Patents

Elektronenstrahlgerat

Info

Publication number
DE2102616A1
DE2102616A1 DE19712102616 DE2102616A DE2102616A1 DE 2102616 A1 DE2102616 A1 DE 2102616A1 DE 19712102616 DE19712102616 DE 19712102616 DE 2102616 A DE2102616 A DE 2102616A DE 2102616 A1 DE2102616 A1 DE 2102616A1
Authority
DE
Germany
Prior art keywords
deflection
lens
electron
arrangement
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712102616
Other languages
German (de)
English (en)
Inventor
Christopher Geoffrey van Beckenham Kent Essen (Großbritannien), Schulson, Erland Maxwell, Deep River, Ontario (Kanada), Donaghay, Richard Hugh, Heading ton, Oxford (Großbritannien)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Scientific Instruments Ltd
Original Assignee
Cambridge Scientific Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Scientific Instruments Ltd filed Critical Cambridge Scientific Instruments Ltd
Publication of DE2102616A1 publication Critical patent/DE2102616A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE19712102616 1970-01-21 1971-01-20 Elektronenstrahlgerat Pending DE2102616A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB282970 1970-01-21
GB3205970 1970-07-02

Publications (1)

Publication Number Publication Date
DE2102616A1 true DE2102616A1 (de) 1971-07-29

Family

ID=26237761

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712102616 Pending DE2102616A1 (de) 1970-01-21 1971-01-20 Elektronenstrahlgerat

Country Status (5)

Country Link
US (1) US3702398A (enExample)
JP (1) JPS5425391B1 (enExample)
DE (1) DE2102616A1 (enExample)
FR (1) FR2075739A5 (enExample)
GB (1) GB1284061A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009052392A1 (de) * 2009-11-09 2011-12-15 Carl Zeiss Nts Gmbh SACP-Verfahren und teilchenoptisches System zur Ausführung eines solchen Verfahrens
US8129693B2 (en) 2009-06-26 2012-03-06 Carl Zeiss Nts Gmbh Charged particle beam column and method of operating same

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7204859A (enExample) * 1972-04-12 1973-10-16
US3801784A (en) * 1972-04-14 1974-04-02 Research Corp Scanning electron microscope operating in area scan and angle scan modes
US3801792A (en) * 1973-05-23 1974-04-02 Bell Telephone Labor Inc Electron beam apparatus
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
JPS5788659A (en) * 1980-11-21 1982-06-02 Jeol Ltd Electron ray device
DE3636506A1 (de) * 1986-10-27 1988-04-28 Atomika Tech Physik Gmbh Spiralabtastverfahren
US4780216A (en) * 1986-11-19 1988-10-25 Olin Corporation Calcium hypochlorite sanitizing compositions
JPH0233843A (ja) * 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡
US4990779A (en) * 1989-06-06 1991-02-05 Nippon Steel Corporation Method and apparatus for evaluating strains in crystals
JP2002217088A (ja) * 2001-01-17 2002-08-02 Nikon Corp 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法
US7498564B2 (en) * 2001-02-06 2009-03-03 University Of Bristol Of Senate House Resonant scanning near-field optical microscope
US7473887B2 (en) * 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
US6930308B1 (en) * 2002-07-11 2005-08-16 Kla-Tencor Technologies Corporation SEM profile and surface reconstruction using multiple data sets
EP3343210B1 (en) * 2016-12-30 2020-11-18 IMEC vzw Characterization of regions with different crystallinity in materials

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB832500A (en) * 1955-12-12 1960-04-13 Ass Elect Ind Improvements relating to electron optical apparatus
DE1514706C2 (de) * 1966-03-15 1975-11-06 Siemens Ag, 1000 Berlin Und 8000 Muenchen Ablenksystem für Korpuskularstrahlgeräte
FR2010485A1 (enExample) * 1968-05-28 1970-02-20 Jeol Ltd
US3549883A (en) * 1968-10-07 1970-12-22 Gen Electric Scanning electron microscope wherein an image is formed as a function of specimen current

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8129693B2 (en) 2009-06-26 2012-03-06 Carl Zeiss Nts Gmbh Charged particle beam column and method of operating same
US8558190B2 (en) 2009-06-26 2013-10-15 Carl Zeiss Microscopy Gmbh Charged particle beam column and method of operating same
DE102009052392A1 (de) * 2009-11-09 2011-12-15 Carl Zeiss Nts Gmbh SACP-Verfahren und teilchenoptisches System zur Ausführung eines solchen Verfahrens
US9093246B2 (en) 2009-11-09 2015-07-28 Carl Zeiss Microscopy Gmbh SACP method and particle optical system for performing the method

Also Published As

Publication number Publication date
GB1284061A (en) 1972-08-02
US3702398A (en) 1972-11-07
FR2075739A5 (enExample) 1971-10-08
JPS5425391B1 (enExample) 1979-08-28

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Legal Events

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OD Request for examination
OHJ Non-payment of the annual fee