DE2041422A1 - Elementanalysator - Google Patents

Elementanalysator

Info

Publication number
DE2041422A1
DE2041422A1 DE19702041422 DE2041422A DE2041422A1 DE 2041422 A1 DE2041422 A1 DE 2041422A1 DE 19702041422 DE19702041422 DE 19702041422 DE 2041422 A DE2041422 A DE 2041422A DE 2041422 A1 DE2041422 A1 DE 2041422A1
Authority
DE
Germany
Prior art keywords
energy
analyzer
sample
ions
primary ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19702041422
Other languages
German (de)
English (en)
Inventor
Goff Robert Frederick
Smith Davis Philip
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE2041422A1 publication Critical patent/DE2041422A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE19702041422 1969-08-18 1970-08-17 Elementanalysator Withdrawn DE2041422A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85081069A 1969-08-18 1969-08-18

Publications (1)

Publication Number Publication Date
DE2041422A1 true DE2041422A1 (de) 1971-03-11

Family

ID=25309168

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702041422 Withdrawn DE2041422A1 (de) 1969-08-18 1970-08-17 Elementanalysator

Country Status (8)

Country Link
US (1) US3665182A (ja)
JP (1) JPS5544345B1 (ja)
CA (1) CA925631A (ja)
CH (1) CH513512A (ja)
DE (1) DE2041422A1 (ja)
FR (1) FR2058139A5 (ja)
GB (1) GB1326051A (ja)
NL (1) NL7011751A (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3930155A (en) * 1973-01-19 1975-12-30 Hitachi Ltd Ion microprobe analyser
US3916191A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Imaging apparatus and method for use with ion scattering spectrometer
US3916190A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Depth profile analysis apparatus
US3920989A (en) * 1974-09-20 1975-11-18 Minnesota Mining & Mfg Ion scattering spectrometer utilizing charge exchange processes
US3937958A (en) 1975-03-31 1976-02-10 Minnesota Mining And Manufacturing Company Charged particle beam apparatus
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
US3997846A (en) * 1975-06-30 1976-12-14 International Business Machines Corporation Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4363774A (en) * 1978-01-24 1982-12-14 Bennett Willard H Production and utilization of ion cluster acceleration
US4657722A (en) * 1980-05-14 1987-04-14 Bennett Willard H Ion cluster acceleration
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
US5302827A (en) * 1993-05-11 1994-04-12 Mks Instruments, Inc. Quadrupole mass spectrometer
US5671045A (en) * 1993-10-22 1997-09-23 Masachusetts Institute Of Technology Microwave plasma monitoring system for the elemental composition analysis of high temperature process streams
US5825485A (en) * 1995-11-03 1998-10-20 Cohn; Daniel R. Compact trace element sensor which utilizes microwave generated plasma and which is portable by an individual
CN103336147B (zh) * 2013-06-27 2015-05-27 西安交通大学 一种扫描离子电导显微镜的高频振动夹持器

Also Published As

Publication number Publication date
FR2058139A5 (ja) 1971-05-21
GB1326051A (en) 1973-08-08
JPS5544345B1 (ja) 1980-11-12
NL7011751A (ja) 1971-02-22
CA925631A (en) 1973-05-01
CH513512A (de) 1971-09-30
US3665182A (en) 1972-05-23

Similar Documents

Publication Publication Date Title
DE3940900C2 (ja)
DE882769C (de) Verfahren und Einrichtung zur Trennung geladener Teilchen von verschiedenem e/m-Verhaeltnis
DE1798021B2 (de) Einrichtung zur buendelung eines primaer-ionenstrahls eines mikroanalysators
DE2151167C3 (de) Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis
DE4134905A1 (de) Tandem-massenspektrometer basierend auf flugzeitanalyse
DE2152467C3 (de) Gerät zur Elementenanalyse
DE2041422A1 (de) Elementanalysator
DE2627085A1 (de) Ionenstreuspektrometeranalysatoren, die vorzugsweise im tandem angeordnet sind
DE3636954A1 (de) Massenspektrometer mit atmosphaerendruck-ionisation
DE2255302C3 (de) Einrichtung für die Sekundär-Ionen-Massenspektroskopie
DE2556291C3 (de) Raster-Ionenmikroskop
DE1937482A1 (de) Mikrostrahlsonde
DE3331136A1 (de) Verfahren zur aufnahme von ionen-zyklotron-resonanz-spektren und vorrichtung zur durchfuehrung des verfahrens
DE102007013693B4 (de) Ionennachweissystem mit Unterdrückung neutralen Rauschens
DE2331091C3 (de) Einrichtung zur Bestimmung der Energie geladener Teilchen
DE2420275C3 (de) Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung
DE19635645A1 (de) Hochauflösende Ionendetektion für lineare Flugzeitmassenspektrometer
EP0221339B1 (de) Ionen-Zyklotron-Resonanz-Spektrometer
DE69629536T2 (de) Verfahren und Vorrichtung zur Massenanalyse einer gelösten Probe
DE2542362C3 (de) Ionenstreuspektroskopisches Verfahren und Vorrichtung zur Durchführung desselben
DE2363581A1 (de) Verfahren zur zerstoerungsfreien chemischen analyse
DE3515766A1 (de) Ionen-zyklotron-resonanz-spektrometer
DE2752933A1 (de) Elektronenmikroskop
DE10297199T5 (de) Vorrichtung und Verfahren zur Elementaren Massenspektrometrie
DE3015352A1 (de) Verfahren und vorrichtung zum spektoskopischen naschweis von an der oberflaeche eines festkoerpers befindlichen elementen

Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee