JPS5544345B1 - - Google Patents

Info

Publication number
JPS5544345B1
JPS5544345B1 JP7199070A JP7199070A JPS5544345B1 JP S5544345 B1 JPS5544345 B1 JP S5544345B1 JP 7199070 A JP7199070 A JP 7199070A JP 7199070 A JP7199070 A JP 7199070A JP S5544345 B1 JPS5544345 B1 JP S5544345B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7199070A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5544345B1 publication Critical patent/JPS5544345B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/282Static spectrometers using electrostatic analysers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
JP7199070A 1969-08-18 1970-08-17 Pending JPS5544345B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85081069A 1969-08-18 1969-08-18

Publications (1)

Publication Number Publication Date
JPS5544345B1 true JPS5544345B1 (ja) 1980-11-12

Family

ID=25309168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7199070A Pending JPS5544345B1 (ja) 1969-08-18 1970-08-17

Country Status (8)

Country Link
US (1) US3665182A (ja)
JP (1) JPS5544345B1 (ja)
CA (1) CA925631A (ja)
CH (1) CH513512A (ja)
DE (1) DE2041422A1 (ja)
FR (1) FR2058139A5 (ja)
GB (1) GB1326051A (ja)
NL (1) NL7011751A (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3930155A (en) * 1973-01-19 1975-12-30 Hitachi Ltd Ion microprobe analyser
US3916191A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Imaging apparatus and method for use with ion scattering spectrometer
US3916190A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Depth profile analysis apparatus
US3920989A (en) * 1974-09-20 1975-11-18 Minnesota Mining & Mfg Ion scattering spectrometer utilizing charge exchange processes
US3937958A (en) 1975-03-31 1976-02-10 Minnesota Mining And Manufacturing Company Charged particle beam apparatus
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
US3997846A (en) * 1975-06-30 1976-12-14 International Business Machines Corporation Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4363774A (en) * 1978-01-24 1982-12-14 Bennett Willard H Production and utilization of ion cluster acceleration
US4657722A (en) * 1980-05-14 1987-04-14 Bennett Willard H Ion cluster acceleration
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
US5302827A (en) * 1993-05-11 1994-04-12 Mks Instruments, Inc. Quadrupole mass spectrometer
US5671045A (en) * 1993-10-22 1997-09-23 Masachusetts Institute Of Technology Microwave plasma monitoring system for the elemental composition analysis of high temperature process streams
US5825485A (en) * 1995-11-03 1998-10-20 Cohn; Daniel R. Compact trace element sensor which utilizes microwave generated plasma and which is portable by an individual
CN103336147B (zh) * 2013-06-27 2015-05-27 西安交通大学 一种扫描离子电导显微镜的高频振动夹持器

Also Published As

Publication number Publication date
NL7011751A (ja) 1971-02-22
CH513512A (de) 1971-09-30
DE2041422A1 (de) 1971-03-11
CA925631A (en) 1973-05-01
US3665182A (en) 1972-05-23
GB1326051A (en) 1973-08-08
FR2058139A5 (ja) 1971-05-21

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