DE2041422A1 - Elementanalysator - Google Patents
ElementanalysatorInfo
- Publication number
- DE2041422A1 DE2041422A1 DE19702041422 DE2041422A DE2041422A1 DE 2041422 A1 DE2041422 A1 DE 2041422A1 DE 19702041422 DE19702041422 DE 19702041422 DE 2041422 A DE2041422 A DE 2041422A DE 2041422 A1 DE2041422 A1 DE 2041422A1
- Authority
- DE
- Germany
- Prior art keywords
- energy
- analyzer
- sample
- ions
- primary ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 150000002500 ions Chemical class 0.000 claims description 94
- 239000012528 membrane Substances 0.000 claims description 27
- 238000010884 ion-beam technique Methods 0.000 claims description 17
- 229910052756 noble gas Inorganic materials 0.000 claims description 13
- 239000007787 solid Substances 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 238000004458 analytical method Methods 0.000 claims description 6
- 238000005056 compaction Methods 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 2
- 235000013601 eggs Nutrition 0.000 claims 3
- 239000011261 inert gas Substances 0.000 claims 1
- 210000004072 lung Anatomy 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- SYTBZMRGLBWNTM-UHFFFAOYSA-N flurbiprofen Chemical compound FC1=CC(C(C(O)=O)C)=CC=C1C1=CC=CC=C1 SYTBZMRGLBWNTM-UHFFFAOYSA-N 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004969 ion scattering spectroscopy Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/282—Static spectrometers using electrostatic analysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US85081069A | 1969-08-18 | 1969-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2041422A1 true DE2041422A1 (de) | 1971-03-11 |
Family
ID=25309168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702041422 Withdrawn DE2041422A1 (de) | 1969-08-18 | 1970-08-17 | Elementanalysator |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3665182A (cg-RX-API-DMAC7.html) |
| JP (1) | JPS5544345B1 (cg-RX-API-DMAC7.html) |
| CA (1) | CA925631A (cg-RX-API-DMAC7.html) |
| CH (1) | CH513512A (cg-RX-API-DMAC7.html) |
| DE (1) | DE2041422A1 (cg-RX-API-DMAC7.html) |
| FR (1) | FR2058139A5 (cg-RX-API-DMAC7.html) |
| GB (1) | GB1326051A (cg-RX-API-DMAC7.html) |
| NL (1) | NL7011751A (cg-RX-API-DMAC7.html) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3930155A (en) * | 1973-01-19 | 1975-12-30 | Hitachi Ltd | Ion microprobe analyser |
| US3916191A (en) * | 1974-03-01 | 1975-10-28 | Minnesota Mining & Mfg | Imaging apparatus and method for use with ion scattering spectrometer |
| US3916190A (en) * | 1974-03-01 | 1975-10-28 | Minnesota Mining & Mfg | Depth profile analysis apparatus |
| US3920989A (en) * | 1974-09-20 | 1975-11-18 | Minnesota Mining & Mfg | Ion scattering spectrometer utilizing charge exchange processes |
| US3937958A (en) | 1975-03-31 | 1976-02-10 | Minnesota Mining And Manufacturing Company | Charged particle beam apparatus |
| US4058724A (en) * | 1975-06-27 | 1977-11-15 | Minnesota Mining And Manufacturing Company | Ion Scattering spectrometer with two analyzers preferably in tandem |
| US3997846A (en) * | 1975-06-30 | 1976-12-14 | International Business Machines Corporation | Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus |
| US4363774A (en) * | 1978-01-24 | 1982-12-14 | Bennett Willard H | Production and utilization of ion cluster acceleration |
| US4657722A (en) * | 1980-05-14 | 1987-04-14 | Bennett Willard H | Ion cluster acceleration |
| GB8725459D0 (en) * | 1987-10-30 | 1987-12-02 | Nat Research Dev Corpn | Generating particle beams |
| US5302827A (en) * | 1993-05-11 | 1994-04-12 | Mks Instruments, Inc. | Quadrupole mass spectrometer |
| US5671045A (en) * | 1993-10-22 | 1997-09-23 | Masachusetts Institute Of Technology | Microwave plasma monitoring system for the elemental composition analysis of high temperature process streams |
| US5825485A (en) * | 1995-11-03 | 1998-10-20 | Cohn; Daniel R. | Compact trace element sensor which utilizes microwave generated plasma and which is portable by an individual |
| CN103336147B (zh) * | 2013-06-27 | 2015-05-27 | 西安交通大学 | 一种扫描离子电导显微镜的高频振动夹持器 |
-
1969
- 1969-08-18 US US850810A patent/US3665182A/en not_active Expired - Lifetime
-
1970
- 1970-08-07 NL NL7011751A patent/NL7011751A/xx unknown
- 1970-08-17 CA CA090949A patent/CA925631A/en not_active Expired
- 1970-08-17 CH CH1229970A patent/CH513512A/de not_active IP Right Cessation
- 1970-08-17 JP JP7199070A patent/JPS5544345B1/ja active Pending
- 1970-08-17 GB GB3957270A patent/GB1326051A/en not_active Expired
- 1970-08-17 DE DE19702041422 patent/DE2041422A1/de not_active Withdrawn
- 1970-08-17 FR FR7030151A patent/FR2058139A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5544345B1 (cg-RX-API-DMAC7.html) | 1980-11-12 |
| CH513512A (de) | 1971-09-30 |
| NL7011751A (cg-RX-API-DMAC7.html) | 1971-02-22 |
| CA925631A (en) | 1973-05-01 |
| US3665182A (en) | 1972-05-23 |
| FR2058139A5 (cg-RX-API-DMAC7.html) | 1971-05-21 |
| GB1326051A (en) | 1973-08-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69132461T2 (de) | Verfahren und vorrichtung zur spurenanalyse | |
| DE3940900C2 (cg-RX-API-DMAC7.html) | ||
| DE68929392T2 (de) | Massenspektrometer und Verfahren mit verbesserter Ionenübertragung | |
| DE3856268T2 (de) | Verfahren und vorrichtung zur erzeugung von teilchenbündeln | |
| DE882769C (de) | Verfahren und Einrichtung zur Trennung geladener Teilchen von verschiedenem e/m-Verhaeltnis | |
| DE1058811T1 (de) | Verfahren und systeme für die multi-spectralabbildung und charakterisierung von hautgeweben | |
| DE813228T1 (de) | Plasma-Massenspektrometer | |
| DE1798021B2 (de) | Einrichtung zur buendelung eines primaer-ionenstrahls eines mikroanalysators | |
| DE2151167C3 (de) | Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis | |
| DE4134905A1 (de) | Tandem-massenspektrometer basierend auf flugzeitanalyse | |
| DE2152467C3 (de) | Gerät zur Elementenanalyse | |
| DE2627085A1 (de) | Ionenstreuspektrometeranalysatoren, die vorzugsweise im tandem angeordnet sind | |
| DE69418063T2 (de) | Zykloidisches massenspektrometer | |
| DE69207388T2 (de) | Massenspektrometer mit plasmaquelle zur bestimmung des isotopenverhaeltnisses | |
| DE3636954A1 (de) | Massenspektrometer mit atmosphaerendruck-ionisation | |
| DE2255302C3 (de) | Einrichtung für die Sekundär-Ionen-Massenspektroskopie | |
| DE1937482A1 (de) | Mikrostrahlsonde | |
| DE3331136A1 (de) | Verfahren zur aufnahme von ionen-zyklotron-resonanz-spektren und vorrichtung zur durchfuehrung des verfahrens | |
| DE2331091C3 (de) | Einrichtung zur Bestimmung der Energie geladener Teilchen | |
| DE102007013693B4 (de) | Ionennachweissystem mit Unterdrückung neutralen Rauschens | |
| DE2420275C3 (de) | Vorrichtung zum Analysieren einer Oberflächenschicht durch Ionenzerstreuung | |
| DE19635645A1 (de) | Hochauflösende Ionendetektion für lineare Flugzeitmassenspektrometer | |
| DE2458025A1 (de) | Vorrichtung fuer massenanalyse und strukturanalyse einer oberflaechenschicht durch ionenstreuung | |
| DE2608958A1 (de) | Vorrichtung zum erzeugen von strahlen aus geladenen teilchen | |
| EP0221339B1 (de) | Ionen-Zyklotron-Resonanz-Spektrometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |