DE2028181A1 - Verfahren und Einrichtung zur Herstellung von Kontaktabzügen - Google Patents
Verfahren und Einrichtung zur Herstellung von KontaktabzügenInfo
- Publication number
- DE2028181A1 DE2028181A1 DE19702028181 DE2028181A DE2028181A1 DE 2028181 A1 DE2028181 A1 DE 2028181A1 DE 19702028181 DE19702028181 DE 19702028181 DE 2028181 A DE2028181 A DE 2028181A DE 2028181 A1 DE2028181 A1 DE 2028181A1
- Authority
- DE
- Germany
- Prior art keywords
- plates
- housing
- chamber
- chambers
- airtight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title description 4
- 238000003384 imaging method Methods 0.000 claims description 16
- 230000008602 contraction Effects 0.000 claims 1
- 239000011229 interlayer Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000002508 contact lithography Methods 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/02—Exposure apparatus for contact printing
- G03B27/14—Details
- G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
- G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Projection-Type Copiers In General (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US83532169A | 1969-06-23 | 1969-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2028181A1 true DE2028181A1 (de) | 1970-12-23 |
Family
ID=25269209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702028181 Pending DE2028181A1 (de) | 1969-06-23 | 1970-06-09 | Verfahren und Einrichtung zur Herstellung von Kontaktabzügen |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3604800A (enExample) |
| JP (1) | JPS4938726B1 (enExample) |
| CA (1) | CA936398A (enExample) |
| DE (1) | DE2028181A1 (enExample) |
| FR (1) | FR2052373A5 (enExample) |
| GB (1) | GB1287340A (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3834815A (en) * | 1973-07-06 | 1974-09-10 | Ipt Corp | Photocopying apparatus with vacuum means |
| GB1511332A (en) * | 1974-04-30 | 1978-05-17 | Hoechst Ag | Printing frame |
| JPS51105012U (enExample) * | 1975-02-18 | 1976-08-23 | ||
| US4007987A (en) * | 1976-01-12 | 1977-02-15 | Tamarack Scientific Co. Inc. | Vacuum contact printing system and process for electronic circuit photomask replication |
| US4054383A (en) * | 1976-02-02 | 1977-10-18 | International Business Machines Corporation | Jig and process for contact printing |
| DE3577929D1 (de) * | 1985-12-17 | 1990-06-28 | Agfa Gevaert Nv | Vakuum-kontaktbelichtungsgeraet. |
| CS263521B1 (en) * | 1987-04-24 | 1989-04-14 | Slavata Bohumil | Chuck frame of contact copying machine for working masks copying |
| FR2667957B1 (fr) * | 1990-10-15 | 1993-10-22 | Albert Visage | Dispositif pour la reproduction d'images, par contact, sur un film photographique vierge a partir d'un original transparent. |
| CN113391525A (zh) * | 2021-06-08 | 2021-09-14 | 吉林华微电子股份有限公司 | 一种光刻版翻版机及光刻版翻版系统 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3521953A (en) * | 1968-03-13 | 1970-07-28 | Kulicke & Soffa Ind Inc | Adjustable separation wafer clamp |
-
1969
- 1969-06-23 US US835321A patent/US3604800A/en not_active Expired - Lifetime
-
1970
- 1970-05-12 FR FR7017088A patent/FR2052373A5/fr not_active Expired
- 1970-05-19 CA CA082978A patent/CA936398A/en not_active Expired
- 1970-05-27 JP JP45044932A patent/JPS4938726B1/ja active Pending
- 1970-06-08 GB GB27555/70A patent/GB1287340A/en not_active Expired
- 1970-06-09 DE DE19702028181 patent/DE2028181A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3604800A (en) | 1971-09-14 |
| GB1287340A (en) | 1972-08-31 |
| CA936398A (en) | 1973-11-06 |
| JPS4938726B1 (enExample) | 1974-10-19 |
| FR2052373A5 (enExample) | 1971-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0024515B1 (de) | Verfahren zum Herstellen von Trenndüsenelementen zur Trennung gas-oder dampfförmiger Gemische, insbesondere Isotopengemische, und nach diesem Verfahren hergestellte Trenndüsenelemente | |
| DE2322874A1 (de) | Verfahren zum photobedrucken einer platte | |
| DE4243750C5 (de) | Verfahren zur Herstellung einer Druckform für den Tiefdruck, Siebdruck, Flexodruck oder Offsetdruck | |
| DE4424274C1 (de) | Einrichtung zur Manipulation eines Synchrotronstrahlenbündels | |
| DE3688826T2 (de) | Vakuumkontaktsystem. | |
| DE2015176A1 (de) | Hochvakuumröhre mit Teilchenstrahl, insbesondere Elektronenmikroskop | |
| DE1205634B (de) | Verschluss fuer ein Elektronenmikroskop | |
| WO2002054398A1 (de) | Verfahren und vorrichtung zum zusammenfügen von substraten | |
| DE2507906C3 (de) | Halteeinrichtung für das lichtempfindliche Material in einer Mikrofilm-Aufnahmekamera | |
| DE2358757B2 (de) | Verfahren und Vorrichtung zum Prägen eines Flächengebildes aus thermoplastischem Kunststoff | |
| DE3643817A1 (de) | Kontaktkopiergeraet | |
| EP0109634B1 (de) | Belichtungsvorrichtung | |
| DE10356450A1 (de) | Belichtungsvorrichtung | |
| DE1195596B (de) | Kopierprojektionsanordnung | |
| DE2060827C3 (de) | Kontaktkopiergerät zur gleichzeitigen doppelseitigen Belichtung von Leiterplatten | |
| DE2001699A1 (de) | Vorrichtung zum schnellen Zurueckfuehren des Spiegels einer einaeugigen Spiegelreflexkamera | |
| DE2403907A1 (de) | Kopierrahmen fuer fotoplatten | |
| DE2229384A1 (de) | Vakuumkammer | |
| DE1148870B (de) | Repetierkopiermaschine | |
| DE4438413C2 (de) | Vorrichtung zur Herstellung von Druckplatten | |
| DE862807C (de) | Anordnung zur Herstellung von fotografischen Innenaufnahmen in Korpuskularstrahlapparaten, insbesondere Elektronenmikroskopen | |
| DE2207751C3 (de) | Schrittkopiergerät zum mehrmaligen Kopieren einer Vorlage | |
| DE536148C (de) | Vorrichtung zum Ausgleichen der Kontraste bei der photographischen Wiedergabe von Negativen | |
| DE584195C (de) | Rollfilmkassette | |
| DE540182C (de) | Vorrichtung zur photographischen Wiedergabe von Urbildern |