CA936398A - High resolution contact printing - Google Patents
High resolution contact printingInfo
- Publication number
- CA936398A CA936398A CA082978A CA82978A CA936398A CA 936398 A CA936398 A CA 936398A CA 082978 A CA082978 A CA 082978A CA 82978 A CA82978 A CA 82978A CA 936398 A CA936398 A CA 936398A
- Authority
- CA
- Canada
- Prior art keywords
- high resolution
- contact printing
- resolution contact
- printing
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/02—Exposure apparatus for contact printing
- G03B27/14—Details
- G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
- G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Projection-Type Copiers In General (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US83532169A | 1969-06-23 | 1969-06-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA936398A true CA936398A (en) | 1973-11-06 |
Family
ID=25269209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA082978A Expired CA936398A (en) | 1969-06-23 | 1970-05-19 | High resolution contact printing |
Country Status (6)
Country | Link |
---|---|
US (1) | US3604800A (en) |
JP (1) | JPS4938726B1 (en) |
CA (1) | CA936398A (en) |
DE (1) | DE2028181A1 (en) |
FR (1) | FR2052373A5 (en) |
GB (1) | GB1287340A (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3834815A (en) * | 1973-07-06 | 1974-09-10 | Ipt Corp | Photocopying apparatus with vacuum means |
GB1511332A (en) * | 1974-04-30 | 1978-05-17 | Hoechst Ag | Printing frame |
JPS51105012U (en) * | 1975-02-18 | 1976-08-23 | ||
US4007987A (en) * | 1976-01-12 | 1977-02-15 | Tamarack Scientific Co. Inc. | Vacuum contact printing system and process for electronic circuit photomask replication |
US4054383A (en) * | 1976-02-02 | 1977-10-18 | International Business Machines Corporation | Jig and process for contact printing |
EP0225941B1 (en) * | 1985-12-17 | 1990-05-23 | Agfa-Gevaert N.V. | Vacuum contact exposure apparatus |
CS263521B1 (en) * | 1987-04-24 | 1989-04-14 | Slavata Bohumil | Chuck frame of contact copying machine for working masks copying |
FR2667957B1 (en) * | 1990-10-15 | 1993-10-22 | Albert Visage | DEVICE FOR REPRODUCING IMAGES, BY CONTACT, ON A BLANK PHOTOGRAPHIC FILM FROM A TRANSPARENT ORIGINAL. |
CN113391525A (en) * | 2021-06-08 | 2021-09-14 | 吉林华微电子股份有限公司 | Photoetching plate copying machine and photoetching plate copying system |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3521953A (en) * | 1968-03-13 | 1970-07-28 | Kulicke & Soffa Ind Inc | Adjustable separation wafer clamp |
-
1969
- 1969-06-23 US US835321A patent/US3604800A/en not_active Expired - Lifetime
-
1970
- 1970-05-12 FR FR7017088A patent/FR2052373A5/fr not_active Expired
- 1970-05-19 CA CA082978A patent/CA936398A/en not_active Expired
- 1970-05-27 JP JP45044932A patent/JPS4938726B1/ja active Pending
- 1970-06-08 GB GB27555/70A patent/GB1287340A/en not_active Expired
- 1970-06-09 DE DE19702028181 patent/DE2028181A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2052373A5 (en) | 1971-04-09 |
US3604800A (en) | 1971-09-14 |
DE2028181A1 (en) | 1970-12-23 |
JPS4938726B1 (en) | 1974-10-19 |
GB1287340A (en) | 1972-08-31 |
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