JPS4938726B1 - - Google Patents

Info

Publication number
JPS4938726B1
JPS4938726B1 JP45044932A JP4493270A JPS4938726B1 JP S4938726 B1 JPS4938726 B1 JP S4938726B1 JP 45044932 A JP45044932 A JP 45044932A JP 4493270 A JP4493270 A JP 4493270A JP S4938726 B1 JPS4938726 B1 JP S4938726B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45044932A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4938726B1 publication Critical patent/JPS4938726B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP45044932A 1969-06-23 1970-05-27 Pending JPS4938726B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83532169A 1969-06-23 1969-06-23

Publications (1)

Publication Number Publication Date
JPS4938726B1 true JPS4938726B1 (ja) 1974-10-19

Family

ID=25269209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45044932A Pending JPS4938726B1 (ja) 1969-06-23 1970-05-27

Country Status (6)

Country Link
US (1) US3604800A (ja)
JP (1) JPS4938726B1 (ja)
CA (1) CA936398A (ja)
DE (1) DE2028181A1 (ja)
FR (1) FR2052373A5 (ja)
GB (1) GB1287340A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105012U (ja) * 1975-02-18 1976-08-23

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3834815A (en) * 1973-07-06 1974-09-10 Ipt Corp Photocopying apparatus with vacuum means
GB1511332A (en) * 1974-04-30 1978-05-17 Hoechst Ag Printing frame
US4007987A (en) * 1976-01-12 1977-02-15 Tamarack Scientific Co. Inc. Vacuum contact printing system and process for electronic circuit photomask replication
US4054383A (en) * 1976-02-02 1977-10-18 International Business Machines Corporation Jig and process for contact printing
EP0225941B1 (en) * 1985-12-17 1990-05-23 Agfa-Gevaert N.V. Vacuum contact exposure apparatus
CS263521B1 (en) * 1987-04-24 1989-04-14 Slavata Bohumil Chuck frame of contact copying machine for working masks copying
FR2667957B1 (fr) * 1990-10-15 1993-10-22 Albert Visage Dispositif pour la reproduction d'images, par contact, sur un film photographique vierge a partir d'un original transparent.
CN113391525A (zh) * 2021-06-08 2021-09-14 吉林华微电子股份有限公司 一种光刻版翻版机及光刻版翻版系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521953A (en) * 1968-03-13 1970-07-28 Kulicke & Soffa Ind Inc Adjustable separation wafer clamp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105012U (ja) * 1975-02-18 1976-08-23

Also Published As

Publication number Publication date
CA936398A (en) 1973-11-06
FR2052373A5 (ja) 1971-04-09
US3604800A (en) 1971-09-14
DE2028181A1 (de) 1970-12-23
GB1287340A (en) 1972-08-31

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