DE2016038B2 - Ionenquelle - Google Patents

Ionenquelle

Info

Publication number
DE2016038B2
DE2016038B2 DE19702016038 DE2016038A DE2016038B2 DE 2016038 B2 DE2016038 B2 DE 2016038B2 DE 19702016038 DE19702016038 DE 19702016038 DE 2016038 A DE2016038 A DE 2016038A DE 2016038 B2 DE2016038 B2 DE 2016038B2
Authority
DE
Germany
Prior art keywords
anode
electrode
ion source
potential
expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19702016038
Other languages
German (de)
English (en)
Other versions
DE2016038A1 (de
Inventor
Lucien Les Clayes sous Bois; Faure Jean Les Essarts Ie Roi; Vienet Roger Gif fur Yvette; Bex (Frankreich)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE2016038A1 publication Critical patent/DE2016038A1/de
Publication of DE2016038B2 publication Critical patent/DE2016038B2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H01J27/12—Duoplasmatrons ; Duopigatrons provided with an expansion cup

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19702016038 1969-04-04 1970-04-03 Ionenquelle Granted DE2016038B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6910569A FR2061809A5 (enExample) 1969-04-04 1969-04-04

Publications (2)

Publication Number Publication Date
DE2016038A1 DE2016038A1 (de) 1970-10-08
DE2016038B2 true DE2016038B2 (de) 1972-12-07

Family

ID=9031993

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702016038 Granted DE2016038B2 (de) 1969-04-04 1970-04-03 Ionenquelle

Country Status (8)

Country Link
US (1) US3702416A (enExample)
BE (1) BE747725A (enExample)
CH (1) CH508979A (enExample)
DE (1) DE2016038B2 (enExample)
ES (1) ES378259A1 (enExample)
FR (1) FR2061809A5 (enExample)
GB (1) GB1263043A (enExample)
NL (1) NL7004792A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242993A1 (en) * 1986-03-24 1987-10-28 The Welding Institute Apparatus and method for collecting charged particles

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
US3924134A (en) * 1974-11-29 1975-12-02 Ibm Double chamber ion source
DE2610165C2 (de) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron-Ionenquelle zur Erzeugung mehrfach geladener Ionen
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
EP0145119A1 (en) * 1983-08-15 1985-06-19 Applied Materials, Inc. Apparatus for ion implantation
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US6250070B1 (en) * 2000-05-09 2001-06-26 Hughes Electronics Corporation Ion thruster with ion-extraction grids having compound contour shapes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285354A (enExample) * 1961-12-11
FR1366023A (fr) * 1963-05-02 1964-07-10 Csf Perfectionnements aux dispositifs de propulsion à faisceau ionique neutralisé
US3287598A (en) * 1964-01-02 1966-11-22 High Voltage Engineering Corp Ion source having an expansion cup for effecting beam divergence
US3238414A (en) * 1965-07-28 1966-03-01 George G Kelley High output duoplasmatron-type ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242993A1 (en) * 1986-03-24 1987-10-28 The Welding Institute Apparatus and method for collecting charged particles

Also Published As

Publication number Publication date
ES378259A1 (es) 1973-03-16
US3702416A (en) 1972-11-07
CH508979A (fr) 1971-06-15
GB1263043A (en) 1972-02-09
NL7004792A (enExample) 1970-10-06
FR2061809A5 (enExample) 1971-06-25
DE2016038A1 (de) 1970-10-08
BE747725A (fr) 1970-08-31

Similar Documents

Publication Publication Date Title
EP0396019B1 (de) Ionen-Zyklotron-Resonanz-Spektrometer
DE1036414B (de) Neutronenquelle fuer Bohrschachtuntersuchungen
DE882769C (de) Verfahren und Einrichtung zur Trennung geladener Teilchen von verschiedenem e/m-Verhaeltnis
DE3429591A1 (de) Ionenquelle mit wenigstens zwei ionisationskammern, insbesondere zur bildung von chemisch aktiven ionenstrahlen
DE2633778C3 (de) Ionentriebwerk
DE2302938A1 (de) Mehrstufiger beschleuniger fuer geladene teilchen mit hochvakuumisolation
DE68926167T2 (de) Hochauflösendes plasmamassenspektrometer
DE2619071A1 (de) Elektronenkanone
DE2243708A1 (de) Verfahren und vorrichtung zur erzeugung von glimmentladungen
DE10130464A1 (de) Plasmabeschleuniger-Anordnung
DE2552783B2 (de) Verfahren und anordnung zur erzeugung von ionen
DE3111305A1 (de) Mikrowellen-entladungs-ionenquelle
DE69112166T2 (de) Plasmaquellenvorrichtung für Ionenimplantierung.
DE1944882A1 (de) Kaltkathoden-Glimmentladevorrichtung
DE2445603B2 (de) Ionenquelle
DE3881579T2 (de) Ionenquelle.
DE2016038B2 (de) Ionenquelle
DE3424449A1 (de) Quelle fuer negative ionen
DE2602078B2 (de) Niederdruck-gasentladungsroehre
DE69207616T2 (de) Schnelle Atomstrahlquelle
DE1953659C3 (de) Ionenquelle für die Zerstäubung mit langsamen Ionen
DE1190590B (de) Ionenquelle
EP0221339B1 (de) Ionen-Zyklotron-Resonanz-Spektrometer
DE1218078B (de) Vorrichtung zum Erzeugen und Einschliessen eines Plasmas
DE1934328A1 (de) Vorrichtung zur wahlweisen Zerstaeubung fester Substanzen durch Ionenbeschuss nach der Plasma- oder Ionenstrahlmethode

Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977