DE20001533U1 - Temperaturkammer - Google Patents
TemperaturkammerInfo
- Publication number
- DE20001533U1 DE20001533U1 DE20001533U DE20001533U DE20001533U1 DE 20001533 U1 DE20001533 U1 DE 20001533U1 DE 20001533 U DE20001533 U DE 20001533U DE 20001533 U DE20001533 U DE 20001533U DE 20001533 U1 DE20001533 U1 DE 20001533U1
- Authority
- DE
- Germany
- Prior art keywords
- heating
- electronic components
- cooling chamber
- plate
- conveying means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
Description
Claims (24)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20001533U DE20001533U1 (de) | 2000-01-29 | 2000-01-29 | Temperaturkammer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20001533U DE20001533U1 (de) | 2000-01-29 | 2000-01-29 | Temperaturkammer |
Publications (1)
Publication Number | Publication Date |
---|---|
DE20001533U1 true DE20001533U1 (de) | 2000-09-07 |
Family
ID=7936550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE20001533U Expired - Lifetime DE20001533U1 (de) | 2000-01-29 | 2000-01-29 | Temperaturkammer |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE20001533U1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011078707A1 (de) * | 2011-07-05 | 2013-01-10 | Dürr Systems GmbH | Fördervorrichtung |
-
2000
- 2000-01-29 DE DE20001533U patent/DE20001533U1/de not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011078707A1 (de) * | 2011-07-05 | 2013-01-10 | Dürr Systems GmbH | Fördervorrichtung |
US9284127B2 (en) | 2011-07-05 | 2016-03-15 | Dürr Systems GmbH | Conveyors having a rotatable transfer section |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R207 | Utility model specification |
Effective date: 20001012 |
|
R081 | Change of applicant/patentee |
Owner name: IEF WERNER GMBH, DE Free format text: FORMER OWNER: DUAL-M-TECH AG, 83209 PRIEN, DE Effective date: 20021203 |
|
R150 | Term of protection extended to 6 years |
Effective date: 20030417 |
|
R081 | Change of applicant/patentee |
Owner name: IEF WERNER GMBH, DE Free format text: FORMER OWNER: SYSKO GMBH, 83278 TRAUNSTEIN, DE Effective date: 20051122 |
|
R151 | Term of protection extended to 8 years |
Effective date: 20060317 |
|
R152 | Term of protection extended to 10 years |
Effective date: 20080317 |
|
R071 | Expiry of right |