CN101775581B - 热处理腔 - Google Patents
热处理腔 Download PDFInfo
- Publication number
- CN101775581B CN101775581B CN2009102667216A CN200910266721A CN101775581B CN 101775581 B CN101775581 B CN 101775581B CN 2009102667216 A CN2009102667216 A CN 2009102667216A CN 200910266721 A CN200910266721 A CN 200910266721A CN 101775581 B CN101775581 B CN 101775581B
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- CN
- China
- Prior art keywords
- chamber
- inner cavity
- base
- shell
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001816 cooling Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 14
- 241001672694 Citrus reticulata Species 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 abstract description 19
- 238000011065 in-situ storage Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 19
- 239000007788 liquid Substances 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 7
- 238000005401 electroluminescence Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Drying Of Solid Materials (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102667216A CN101775581B (zh) | 2009-12-30 | 2009-12-30 | 热处理腔 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102667216A CN101775581B (zh) | 2009-12-30 | 2009-12-30 | 热处理腔 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101775581A CN101775581A (zh) | 2010-07-14 |
CN101775581B true CN101775581B (zh) | 2012-05-02 |
Family
ID=42512165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009102667216A Expired - Fee Related CN101775581B (zh) | 2009-12-30 | 2009-12-30 | 热处理腔 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101775581B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102419341A (zh) * | 2011-12-06 | 2012-04-18 | 中南大学 | 水泥乳化沥青砂浆材料热变形测试仪 |
CN103415133B (zh) * | 2013-08-06 | 2016-08-31 | 北京航空航天大学 | 一种催化协同旋转滑动电弧放电等离子体发生装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2326612Y (zh) * | 1998-01-12 | 1999-06-30 | 深圳威士达真空系统工程有限公司 | 真空镀膜室的薄壳结构 |
CN2694132Y (zh) * | 2004-02-25 | 2005-04-20 | 孙新全 | 双吹式采暖炉 |
CN1635608A (zh) * | 2003-12-26 | 2005-07-06 | 清华大学 | 带竖立式热处理腔的半导体快速热处理设备 |
-
2009
- 2009-12-30 CN CN2009102667216A patent/CN101775581B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2326612Y (zh) * | 1998-01-12 | 1999-06-30 | 深圳威士达真空系统工程有限公司 | 真空镀膜室的薄壳结构 |
CN1635608A (zh) * | 2003-12-26 | 2005-07-06 | 清华大学 | 带竖立式热处理腔的半导体快速热处理设备 |
CN2694132Y (zh) * | 2004-02-25 | 2005-04-20 | 孙新全 | 双吹式采暖炉 |
Also Published As
Publication number | Publication date |
---|---|
CN101775581A (zh) | 2010-07-14 |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PP01 | Preservation of patent right |
Effective date of registration: 20131205 Granted publication date: 20120502 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20120502 |
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PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20120502 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20120502 |
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PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20120502 |
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RINS | Preservation of patent right or utility model and its discharge | ||
PD01 | Discharge of preservation of patent |
Date of cancellation: 20210905 Granted publication date: 20120502 |
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PD01 | Discharge of preservation of patent | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120502 Termination date: 20131230 |