DE2000054A1 - Getter-Spruehvorrichtung und Verfahren zum Aufspruehen eines Werkstoffs auf ein Substrat - Google Patents
Getter-Spruehvorrichtung und Verfahren zum Aufspruehen eines Werkstoffs auf ein SubstratInfo
- Publication number
- DE2000054A1 DE2000054A1 DE19702000054 DE2000054A DE2000054A1 DE 2000054 A1 DE2000054 A1 DE 2000054A1 DE 19702000054 DE19702000054 DE 19702000054 DE 2000054 A DE2000054 A DE 2000054A DE 2000054 A1 DE2000054 A1 DE 2000054A1
- Authority
- DE
- Germany
- Prior art keywords
- spray
- getter
- cathode
- substrate
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007921 spray Substances 0.000 title claims description 59
- 239000000758 substrate Substances 0.000 title claims description 43
- 239000000463 material Substances 0.000 title claims description 19
- 238000005507 spraying Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 title claims description 9
- 239000007789 gas Substances 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 239000010408 film Substances 0.000 description 10
- 229910052786 argon Inorganic materials 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 240000000731 Fagus sylvatica Species 0.000 description 1
- 235000010099 Fagus sylvatica Nutrition 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB38069 | 1969-01-02 | ||
| GB5695969 | 1969-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2000054A1 true DE2000054A1 (de) | 1971-03-04 |
Family
ID=26235885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702000054 Pending DE2000054A1 (de) | 1969-01-02 | 1970-01-02 | Getter-Spruehvorrichtung und Verfahren zum Aufspruehen eines Werkstoffs auf ein Substrat |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3691053A (enrdf_load_stackoverflow) |
| DE (1) | DE2000054A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2027696A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1301653A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3811599A1 (de) * | 1988-04-07 | 1989-10-19 | Battelle Institut E V | Vorrichtung zur beschichtung der innenwand eines kunststoff-kraftfahrzeugtanks mit einer sperrschicht |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1485266A (en) * | 1973-11-20 | 1977-09-08 | Atomic Energy Authority Uk | Storage of material |
| US3904503A (en) * | 1974-05-31 | 1975-09-09 | Western Electric Co | Depositing material on a substrate using a shield |
| US4622452A (en) * | 1983-07-21 | 1986-11-11 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition electrode apparatus |
| DE3569265D1 (en) * | 1985-01-17 | 1989-05-11 | Ibm Deutschland | Process for the production of low-resistance contacts |
| US4961832A (en) * | 1989-03-14 | 1990-10-09 | Shagun Vladimir A | Apparatus for applying film coatings onto substrates in vacuum |
| CA2065581C (en) | 1991-04-22 | 2002-03-12 | Andal Corp. | Plasma enhancement apparatus and method for physical vapor deposition |
| US5223112A (en) * | 1991-04-30 | 1993-06-29 | Applied Materials, Inc. | Removable shutter apparatus for a semiconductor process chamber |
| US5656091A (en) * | 1995-11-02 | 1997-08-12 | Vacuum Plating Technology Corporation | Electric arc vapor deposition apparatus and method |
| JP4344019B2 (ja) * | 1997-05-28 | 2009-10-14 | キヤノンアネルバ株式会社 | イオン化スパッタ方法 |
| KR20040044994A (ko) * | 2001-09-27 | 2004-05-31 | 이 아이 듀폰 디 네모아 앤드 캄파니 | 스퍼터 증착을 위한 이중 소스, 단일 챔버 방법 및 장치 |
| US20230037882A1 (en) * | 2021-08-06 | 2023-02-09 | Duke University | High stability optomechanical system and cryo-package assembly for quantum computing |
-
1969
- 1969-01-02 GB GB38069A patent/GB1301653A/en not_active Expired
- 1969-12-29 US US888493A patent/US3691053A/en not_active Expired - Lifetime
-
1970
- 1970-01-02 FR FR7000086A patent/FR2027696A1/fr not_active Withdrawn
- 1970-01-02 DE DE19702000054 patent/DE2000054A1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3811599A1 (de) * | 1988-04-07 | 1989-10-19 | Battelle Institut E V | Vorrichtung zur beschichtung der innenwand eines kunststoff-kraftfahrzeugtanks mit einer sperrschicht |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2027696A1 (enrdf_load_stackoverflow) | 1970-10-02 |
| GB1301653A (enrdf_load_stackoverflow) | 1973-01-04 |
| US3691053A (en) | 1972-09-12 |
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