DE19958136B4 - Selbstkalibrierende interferenzspektroskopische Meßanordnung - Google Patents
Selbstkalibrierende interferenzspektroskopische Meßanordnung Download PDFInfo
- Publication number
- DE19958136B4 DE19958136B4 DE19958136A DE19958136A DE19958136B4 DE 19958136 B4 DE19958136 B4 DE 19958136B4 DE 19958136 A DE19958136 A DE 19958136A DE 19958136 A DE19958136 A DE 19958136A DE 19958136 B4 DE19958136 B4 DE 19958136B4
- Authority
- DE
- Germany
- Prior art keywords
- optical
- spectrum
- electromagnetic radiation
- modulated
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001228 spectrum Methods 0.000 claims abstract description 50
- 238000005259 measurement Methods 0.000 claims abstract description 47
- 230000003287 optical effect Effects 0.000 claims abstract description 47
- 238000000034 method Methods 0.000 claims abstract description 32
- 230000008859 change Effects 0.000 claims abstract description 21
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 13
- 238000004364 calculation method Methods 0.000 claims abstract description 9
- 230000002123 temporal effect Effects 0.000 claims abstract description 5
- 230000001678 irradiating effect Effects 0.000 claims abstract 4
- 238000002310 reflectometry Methods 0.000 claims description 9
- 230000005855 radiation Effects 0.000 claims description 6
- 230000006978 adaptation Effects 0.000 claims description 2
- 238000011161 development Methods 0.000 claims description 2
- 238000007620 mathematical function Methods 0.000 claims 2
- 229910000831 Steel Inorganic materials 0.000 claims 1
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- 239000004215 Carbon black (E152) Substances 0.000 description 1
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- 238000011065 in-situ storage Methods 0.000 description 1
- 238000011545 laboratory measurement Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/2866—Markers; Calibrating of scan
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19958136A DE19958136B4 (de) | 1999-12-02 | 1999-12-02 | Selbstkalibrierende interferenzspektroskopische Meßanordnung |
| US09/727,548 US6580510B2 (en) | 1999-12-02 | 2000-12-04 | Self-calibrating measuring setup for interference spectroscopy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19958136A DE19958136B4 (de) | 1999-12-02 | 1999-12-02 | Selbstkalibrierende interferenzspektroskopische Meßanordnung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE19958136A1 DE19958136A1 (de) | 2001-06-13 |
| DE19958136B4 true DE19958136B4 (de) | 2004-02-05 |
Family
ID=7931193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19958136A Expired - Fee Related DE19958136B4 (de) | 1999-12-02 | 1999-12-02 | Selbstkalibrierende interferenzspektroskopische Meßanordnung |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6580510B2 (US20010055118A1-20011227-M00007.png) |
| DE (1) | DE19958136B4 (US20010055118A1-20011227-M00007.png) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10148778C2 (de) * | 2001-10-02 | 2003-10-09 | Univ Braunschweig Tech | Verfahren zur Bestimmung der Beschaffenheit einer Probe |
| US6995848B2 (en) | 2001-12-10 | 2006-02-07 | Zygo Corporation | Method and apparatus for calibrating a wavelength-tuning interferometer |
| US7148488B2 (en) * | 2002-06-13 | 2006-12-12 | University Of Hawaii | Apparatus for measuring radiation and method of use |
| US7067818B2 (en) * | 2003-01-16 | 2006-06-27 | Metrosol, Inc. | Vacuum ultraviolet reflectometer system and method |
| US7394551B2 (en) | 2003-01-16 | 2008-07-01 | Metrosol, Inc. | Vacuum ultraviolet referencing reflectometer |
| US8564780B2 (en) * | 2003-01-16 | 2013-10-22 | Jordan Valley Semiconductors Ltd. | Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces |
| US7026626B2 (en) * | 2003-01-16 | 2006-04-11 | Metrosol, Inc. | Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer |
| US20080246951A1 (en) * | 2007-04-09 | 2008-10-09 | Phillip Walsh | Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces |
| US7126131B2 (en) * | 2003-01-16 | 2006-10-24 | Metrosol, Inc. | Broad band referencing reflectometer |
| CN2662247Y (zh) * | 2003-04-25 | 2004-12-08 | 谭玉山 | 基于白光反射干涉频谱变化规律的光纤阵列生物芯片 |
| CN1856702B (zh) * | 2003-09-23 | 2010-05-26 | 迈特罗索尔公司 | 真空紫外参考反射计及其应用方法 |
| US7092832B2 (en) * | 2003-12-11 | 2006-08-15 | Inlight Solutions, Inc. | Adaptive compensation for measurement distortions in spectroscopy |
| US7399975B2 (en) | 2004-08-11 | 2008-07-15 | Metrosol, Inc. | Method and apparatus for performing highly accurate thin film measurements |
| US7663097B2 (en) * | 2004-08-11 | 2010-02-16 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
| US7511265B2 (en) * | 2004-08-11 | 2009-03-31 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
| US7804059B2 (en) * | 2004-08-11 | 2010-09-28 | Jordan Valley Semiconductors Ltd. | Method and apparatus for accurate calibration of VUV reflectometer |
| US7282703B2 (en) * | 2004-08-11 | 2007-10-16 | Metrosol, Inc. | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement |
| US9292187B2 (en) | 2004-11-12 | 2016-03-22 | Cognex Corporation | System, method and graphical user interface for displaying and controlling vision system operating parameters |
| US7428055B2 (en) * | 2006-10-05 | 2008-09-23 | General Electric Company | Interferometer-based real time early fouling detection system and method |
| US20080129986A1 (en) | 2006-11-30 | 2008-06-05 | Phillip Walsh | Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations |
| US7956761B2 (en) * | 2007-05-29 | 2011-06-07 | The Aerospace Corporation | Infrared gas detection and spectral analysis method |
| US20090219537A1 (en) * | 2008-02-28 | 2009-09-03 | Phillip Walsh | Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths |
| US8153987B2 (en) * | 2009-05-22 | 2012-04-10 | Jordan Valley Semiconductors Ltd. | Automated calibration methodology for VUV metrology system |
| CN102135448B (zh) * | 2010-12-31 | 2012-08-22 | 天津大学 | 一种防止环境光干扰的表面反射率光谱测量方法 |
| US8867041B2 (en) | 2011-01-18 | 2014-10-21 | Jordan Valley Semiconductor Ltd | Optical vacuum ultra-violet wavelength nanoimprint metrology |
| US8565379B2 (en) | 2011-03-14 | 2013-10-22 | Jordan Valley Semiconductors Ltd. | Combining X-ray and VUV analysis of thin film layers |
| PL2769187T3 (pl) * | 2011-10-17 | 2019-08-30 | Foss Analytical A/S | Sposób kompensacji dryfu częstotliwości w interferometrze |
| US9520180B1 (en) | 2014-03-11 | 2016-12-13 | Hypres, Inc. | System and method for cryogenic hybrid technology computing and memory |
| CN106526840B (zh) * | 2016-12-06 | 2019-02-01 | 天津津航技术物理研究所 | 一种二元叠层光学材料定向光谱热辐射率的计算方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4200088C2 (de) * | 1992-01-04 | 1997-06-19 | Nahm Werner | Verfahren und Vorrichtung zum optischen Nachweis einer An- oder Einlagerung mindestens einer stofflichen Spezies in oder an mindestens einer dünnen Schicht |
| DE19719210A1 (de) * | 1997-05-09 | 1998-11-12 | Deutsch Zentr Luft & Raumfahrt | Verfahren zur Kalibrierung von Spektralradiometern |
| DE19928410A1 (de) * | 1999-06-22 | 2001-01-04 | Agilent Technologies Inc | Einrichtung zum Betrieb eines Labor-Mikrochips |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07260570A (ja) * | 1994-03-22 | 1995-10-13 | Hitachi Ltd | 分光器の波長校正方法及び装置 |
| US5838438A (en) * | 1997-01-17 | 1998-11-17 | University Of Central Florida | Method of time-resolving fourier-transform spectroscopy to allow interferogram sampling at unevenly spaced path-length differences. |
| US6377899B1 (en) * | 1998-08-28 | 2002-04-23 | Shimadzu Corporation | Method of calibrating spectrophotometer |
| US6236459B1 (en) * | 1998-11-05 | 2001-05-22 | University Of Miami | Thin film measuring device and method |
-
1999
- 1999-12-02 DE DE19958136A patent/DE19958136B4/de not_active Expired - Fee Related
-
2000
- 2000-12-04 US US09/727,548 patent/US6580510B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4200088C2 (de) * | 1992-01-04 | 1997-06-19 | Nahm Werner | Verfahren und Vorrichtung zum optischen Nachweis einer An- oder Einlagerung mindestens einer stofflichen Spezies in oder an mindestens einer dünnen Schicht |
| DE19719210A1 (de) * | 1997-05-09 | 1998-11-12 | Deutsch Zentr Luft & Raumfahrt | Verfahren zur Kalibrierung von Spektralradiometern |
| DE19928410A1 (de) * | 1999-06-22 | 2001-01-04 | Agilent Technologies Inc | Einrichtung zum Betrieb eines Labor-Mikrochips |
Non-Patent Citations (2)
| Title |
|---|
| BRECHT, A., KRAUS, G., GAUGLITZ, G.: Optical sensors for environmental monitoring and basic research in bioanalytics- Experimental Technique of Physics, 1996, Bd. 42(1), S. 139-160 * |
| KRAUS, G., GAUGLITZ, G.: Application and Compari- son of Algorithms for Evaluation of Interfero- grams.-In: Fresenius J. Anal. Chem., 1992, Bd. 344, S. 153 * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19958136A1 (de) | 2001-06-13 |
| US20010055118A1 (en) | 2001-12-27 |
| US6580510B2 (en) | 2003-06-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US |
|
| 8339 | Ceased/non-payment of the annual fee |