CN1856702B - 真空紫外参考反射计及其应用方法 - Google Patents
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Abstract
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Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/668,644 US7394551B2 (en) | 2003-01-16 | 2003-09-23 | Vacuum ultraviolet referencing reflectometer |
US10/668,642 | 2003-09-23 | ||
US10/669,030 | 2003-09-23 | ||
US10/669,030 US7026626B2 (en) | 2003-01-16 | 2003-09-23 | Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer |
US10/668,642 US7067818B2 (en) | 2003-01-16 | 2003-09-23 | Vacuum ultraviolet reflectometer system and method |
US10/668,644 | 2003-09-23 | ||
US10/909,126 | 2004-07-30 | ||
US10/909,126 US7126131B2 (en) | 2003-01-16 | 2004-07-30 | Broad band referencing reflectometer |
PCT/US2004/030859 WO2005031315A1 (en) | 2003-09-23 | 2004-09-21 | Vacuum ultraviolet referencing reflectometer |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201010156716 Division CN101799326A (zh) | 2003-09-23 | 2004-09-21 | 真空紫外参考反射计 |
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CN1856702A CN1856702A (zh) | 2006-11-01 |
CN1856702B true CN1856702B (zh) | 2010-05-26 |
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CN 201010156716 Pending CN101799326A (zh) | 2003-09-23 | 2004-09-21 | 真空紫外参考反射计 |
CN200480027513.6A Active CN1856702B (zh) | 2003-09-23 | 2004-09-21 | 真空紫外参考反射计及其应用方法 |
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CN 201010156716 Pending CN101799326A (zh) | 2003-09-23 | 2004-09-21 | 真空紫外参考反射计 |
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CN (2) | CN101799326A (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008062977A1 (de) * | 2008-12-23 | 2010-06-24 | Adc Automotive Distance Control Systems Gmbh | Optisches Modul mit multifokaler Optik zur Erfassung von Fern- und Nahbereich in einem Bild |
CN103162830B (zh) * | 2011-12-19 | 2015-02-04 | 北京智朗芯光科技有限公司 | 包含参考光束的垂直入射光谱仪及光学测量系统 |
CN103162832B (zh) | 2011-12-19 | 2014-12-10 | 中国科学院微电子研究所 | 包含参考光束的垂直入射宽带偏振光谱仪及光学测量系统 |
CN102636263A (zh) * | 2012-05-16 | 2012-08-15 | 吉林大学 | 光谱仪亮度自校准调节测控系统及测量方法 |
US9879977B2 (en) * | 2012-11-09 | 2018-01-30 | Kla-Tencor Corporation | Apparatus and method for optical metrology with optimized system parameters |
US9857291B2 (en) * | 2013-05-16 | 2018-01-02 | Kla-Tencor Corporation | Metrology system calibration refinement |
CN114719977A (zh) * | 2016-04-21 | 2022-07-08 | 苹果公司 | 用于参考切换的光学系统 |
US10109451B2 (en) * | 2017-02-13 | 2018-10-23 | Applied Materials, Inc. | Apparatus configured for enhanced vacuum ultraviolet (VUV) spectral radiant flux and system having the apparatus |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3825347A (en) * | 1970-08-07 | 1974-07-23 | Max Planck Gesellschaft | Apparatus for determining a substance by an optical radiation |
US5042949A (en) * | 1989-03-17 | 1991-08-27 | Greenberg Jeffrey S | Optical profiler for films and substrates |
US5781304A (en) * | 1994-09-19 | 1998-07-14 | Textron Systems Corporation | Laser ultrasonics-based material analysis system and method |
CN2430682Y (zh) * | 1999-11-18 | 2001-05-16 | 金钦汉 | 高灵敏光度计 |
US20010055118A1 (en) * | 1999-12-02 | 2001-12-27 | Bernd Nawracala | Self-calibrating measuring setup for interference spectroscopy |
-
2004
- 2004-09-21 CN CN 201010156716 patent/CN101799326A/zh active Pending
- 2004-09-21 CN CN200480027513.6A patent/CN1856702B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3825347A (en) * | 1970-08-07 | 1974-07-23 | Max Planck Gesellschaft | Apparatus for determining a substance by an optical radiation |
US5042949A (en) * | 1989-03-17 | 1991-08-27 | Greenberg Jeffrey S | Optical profiler for films and substrates |
US5781304A (en) * | 1994-09-19 | 1998-07-14 | Textron Systems Corporation | Laser ultrasonics-based material analysis system and method |
CN2430682Y (zh) * | 1999-11-18 | 2001-05-16 | 金钦汉 | 高灵敏光度计 |
US20010055118A1 (en) * | 1999-12-02 | 2001-12-27 | Bernd Nawracala | Self-calibrating measuring setup for interference spectroscopy |
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CN1856702A (zh) | 2006-11-01 |
CN101799326A (zh) | 2010-08-11 |
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