DE19926025A1 - Verfahren zum Herstellen von Mikrobauteilen - Google Patents

Verfahren zum Herstellen von Mikrobauteilen

Info

Publication number
DE19926025A1
DE19926025A1 DE19926025A DE19926025A DE19926025A1 DE 19926025 A1 DE19926025 A1 DE 19926025A1 DE 19926025 A DE19926025 A DE 19926025A DE 19926025 A DE19926025 A DE 19926025A DE 19926025 A1 DE19926025 A1 DE 19926025A1
Authority
DE
Germany
Prior art keywords
layer
metal
metal foil
layers
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19926025A
Other languages
German (de)
English (en)
Inventor
Andreas Thies
Konrad Craemer
Heinrich Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Priority to DE19926025A priority Critical patent/DE19926025A1/de
Priority to AT00943638T priority patent/ATE243618T1/de
Priority to CZ20014234A priority patent/CZ296812B6/cs
Priority to PCT/DE2000/001676 priority patent/WO2000073056A1/fr
Priority to PL352031A priority patent/PL202574B1/pl
Priority to EP00943638A priority patent/EP1198344B1/fr
Priority to DE50002664T priority patent/DE50002664D1/de
Priority to CA002372938A priority patent/CA2372938A1/fr
Priority to AU58042/00A priority patent/AU5804200A/en
Priority to BR0011545-2A priority patent/BR0011545A/pt
Priority to MXPA01012096A priority patent/MXPA01012096A/es
Priority to KR1020017014686A priority patent/KR100649374B1/ko
Priority to ES00943638T priority patent/ES2202146T3/es
Priority to US09/979,318 priority patent/US6736983B1/en
Priority to JP2000621151A priority patent/JP2003500540A/ja
Priority to TW089110202A priority patent/TW562871B/zh
Publication of DE19926025A1 publication Critical patent/DE19926025A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
    • F28F3/048—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of ribs integral with the element or local variations in thickness of the element, e.g. grooves, microchannels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/06—Combination of fuel cells with means for production of reactants or for treatment of residues
    • H01M8/0606—Combination of fuel cells with means for production of reactants or for treatment of residues with means for production of gaseous reactants
    • H01M8/0612—Combination of fuel cells with means for production of reactants or for treatment of residues with means for production of gaseous reactants from carbon-containing material
    • H01M8/0625—Combination of fuel cells with means for production of reactants or for treatment of residues with means for production of gaseous reactants from carbon-containing material in a modular combined reactor/fuel cell structure
    • H01M8/0631—Reactor construction specially adapted for combination reactor/fuel cell
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00279—Features relating to reactor vessels
    • B01J2219/00306—Reactor vessels in a multiple arrangement
    • B01J2219/00313—Reactor vessels in a multiple arrangement the reactor vessels being formed by arrays of wells in blocks
    • B01J2219/00315—Microtiter plates
    • B01J2219/00317—Microwell devices, i.e. having large numbers of wells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00835—Comprising catalytically active material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00873—Heat exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/051—Micromixers, microreactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/033—Trenches
    • C—CHEMISTRY; METALLURGY
    • C40—COMBINATORIAL TECHNOLOGY
    • C40B—COMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES
    • C40B60/00—Apparatus specially adapted for use in combinatorial chemistry or with libraries
    • C40B60/14—Apparatus specially adapted for use in combinatorial chemistry or with libraries for creating libraries
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2260/00—Heat exchangers or heat exchange elements having special size, e.g. microstructures
    • F28F2260/02—Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Sustainable Development (AREA)
  • General Chemical & Material Sciences (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Organic Chemistry (AREA)
  • Sustainable Energy (AREA)
  • Electrochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Compounds Of Unknown Constitution (AREA)
  • Laminated Bodies (AREA)
  • ing And Chemical Polishing (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Glass Compositions (AREA)
DE19926025A 1999-05-28 1999-05-28 Verfahren zum Herstellen von Mikrobauteilen Withdrawn DE19926025A1 (de)

Priority Applications (16)

Application Number Priority Date Filing Date Title
DE19926025A DE19926025A1 (de) 1999-05-28 1999-05-28 Verfahren zum Herstellen von Mikrobauteilen
AT00943638T ATE243618T1 (de) 1999-05-28 2000-05-23 Verfahren zum herstellen von mikrobauteilen
CZ20014234A CZ296812B6 (cs) 1999-05-28 2000-05-23 Zpusob výroby mikrosoucástí
PCT/DE2000/001676 WO2000073056A1 (fr) 1999-05-28 2000-05-23 Procede de production de microelements
PL352031A PL202574B1 (pl) 1999-05-28 2000-05-23 Sposób wytwarzania mikrokomponentów
EP00943638A EP1198344B1 (fr) 1999-05-28 2000-05-23 Procede de production de microelements
DE50002664T DE50002664D1 (de) 1999-05-28 2000-05-23 Verfahren zum herstellen von mikrobauteilen
CA002372938A CA2372938A1 (fr) 1999-05-28 2000-05-23 Procede de production de microelements
AU58042/00A AU5804200A (en) 1999-05-28 2000-05-23 Method for producing microcomponents
BR0011545-2A BR0011545A (pt) 1999-05-28 2000-05-23 Processo para produção de microcomponentes
MXPA01012096A MXPA01012096A (es) 1999-05-28 2000-05-23 Metodo para fabricar micro-componentes.
KR1020017014686A KR100649374B1 (ko) 1999-05-28 2000-05-23 미소 구성품의 제조방법
ES00943638T ES2202146T3 (es) 1999-05-28 2000-05-23 Procedimiento para la obtencion de microcomponentes.
US09/979,318 US6736983B1 (en) 1999-05-28 2000-05-23 Method for producing microcomponents
JP2000621151A JP2003500540A (ja) 1999-05-28 2000-05-23 マイクロ部品の製造方法
TW089110202A TW562871B (en) 1999-05-28 2000-05-26 Method for producing microcomponents

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19926025A DE19926025A1 (de) 1999-05-28 1999-05-28 Verfahren zum Herstellen von Mikrobauteilen

Publications (1)

Publication Number Publication Date
DE19926025A1 true DE19926025A1 (de) 2000-11-30

Family

ID=7910509

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19926025A Withdrawn DE19926025A1 (de) 1999-05-28 1999-05-28 Verfahren zum Herstellen von Mikrobauteilen
DE50002664T Expired - Lifetime DE50002664D1 (de) 1999-05-28 2000-05-23 Verfahren zum herstellen von mikrobauteilen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE50002664T Expired - Lifetime DE50002664D1 (de) 1999-05-28 2000-05-23 Verfahren zum herstellen von mikrobauteilen

Country Status (15)

Country Link
US (1) US6736983B1 (fr)
EP (1) EP1198344B1 (fr)
JP (1) JP2003500540A (fr)
KR (1) KR100649374B1 (fr)
AT (1) ATE243618T1 (fr)
AU (1) AU5804200A (fr)
BR (1) BR0011545A (fr)
CA (1) CA2372938A1 (fr)
CZ (1) CZ296812B6 (fr)
DE (2) DE19926025A1 (fr)
ES (1) ES2202146T3 (fr)
MX (1) MXPA01012096A (fr)
PL (1) PL202574B1 (fr)
TW (1) TW562871B (fr)
WO (1) WO2000073056A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10217034A1 (de) * 2002-04-11 2003-10-30 Fraunhofer Ges Forschung Brennstoffzellen-System in Leiterplattenbauweise
DE10220705A1 (de) * 2002-05-10 2003-11-27 Abb Patent Gmbh Einrichtung zur chemischen oder biochemischen Analyse von Proben oder Reagenzien unter Verwendung von Wasser als Lösungsmittel
WO2007054220A1 (fr) * 2005-11-09 2007-05-18 Christian Schmidt Procedes et dispositifs pour la modification de surface de substrats microstructures
DE102021129838A1 (de) 2021-11-16 2023-05-17 Amixon Gmbh Mischvorrichtung

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US6395227B1 (en) 1989-08-28 2002-05-28 Lifescan, Inc. Test strip for measuring analyte concentration over a broad range of sample volume
US7297324B2 (en) 2002-03-11 2007-11-20 Battelle Memorial Institute Microchannel reactors with temperature control
US7404936B2 (en) 2002-10-22 2008-07-29 Velocys Catalysts, in microchannel apparatus, and reactions using same
KR100783168B1 (ko) * 2003-02-06 2007-12-07 다이니폰 인사츠 가부시키가이샤 마이크로 리액터 및 그 제조방법
WO2004091760A1 (fr) * 2003-04-17 2004-10-28 Sulzer Markets And Technology Ag Melangeur statique
WO2006102675A1 (fr) * 2005-03-23 2006-09-28 Velocys, Inc. Elements de surface dans la technologie microfluidique
KR100691453B1 (ko) * 2005-12-21 2007-03-12 삼성전기주식회사 플렉시블 연료전지
EP1829608B1 (fr) * 2006-02-23 2007-10-03 Atotech Deutschland Gmbh Procédé de production d'un microréacteur et son utilisation comme réformeur
US20080099537A1 (en) * 2006-10-31 2008-05-01 Raytheon Company Method for sealing vias in a substrate
EP2098285B1 (fr) * 2008-02-29 2010-09-22 Corning Incorporated Procédés et dispositifs pour réacteurs à couches minces dotés d'échange thermique intégré
DE102007063040A1 (de) 2007-12-28 2009-07-23 Atotech Deutschland Gmbh Herstellung von Mikroreaktoren
CN106323071B (zh) * 2016-10-31 2018-11-06 航天海鹰(哈尔滨)钛业有限公司 一种用于换热器芯部的板片组
KR102469788B1 (ko) * 2021-02-22 2022-11-23 (주)포인트엔지니어링 복합 몰드, 금속 성형물 및 그 제조방법
US20240218547A1 (en) * 2021-05-07 2024-07-04 Point Engineering Co., Ltd. Metal structure and method for manufacturing same
CN113828260B (zh) * 2021-11-02 2023-05-30 贵州煌缔科技股份有限公司 一种陶瓷微反应器的制作方法及应用

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US5534328A (en) * 1993-12-02 1996-07-09 E. I. Du Pont De Nemours And Company Integrated chemical processing apparatus and processes for the preparation thereof
DE19708472A1 (de) * 1997-02-20 1998-09-24 Atotech Deutschland Gmbh Herstellverfahren für chemische Mikroreaktoren

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US5534328A (en) * 1993-12-02 1996-07-09 E. I. Du Pont De Nemours And Company Integrated chemical processing apparatus and processes for the preparation thereof
DE19708472A1 (de) * 1997-02-20 1998-09-24 Atotech Deutschland Gmbh Herstellverfahren für chemische Mikroreaktoren

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10217034A1 (de) * 2002-04-11 2003-10-30 Fraunhofer Ges Forschung Brennstoffzellen-System in Leiterplattenbauweise
DE10217034B4 (de) * 2002-04-11 2005-02-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Brennstoffzellen-System in Leiterplattenbauweise und Verfahren zu dessen Herstellung
US7582329B2 (en) 2002-04-11 2009-09-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Fuel cell system in the form of a printed circuit board
DE10220705A1 (de) * 2002-05-10 2003-11-27 Abb Patent Gmbh Einrichtung zur chemischen oder biochemischen Analyse von Proben oder Reagenzien unter Verwendung von Wasser als Lösungsmittel
WO2007054220A1 (fr) * 2005-11-09 2007-05-18 Christian Schmidt Procedes et dispositifs pour la modification de surface de substrats microstructures
DE102021129838A1 (de) 2021-11-16 2023-05-17 Amixon Gmbh Mischvorrichtung

Also Published As

Publication number Publication date
BR0011545A (pt) 2002-04-02
KR20020010662A (ko) 2002-02-04
CZ296812B6 (cs) 2006-06-14
MXPA01012096A (es) 2002-11-07
ES2202146T3 (es) 2004-04-01
EP1198344A1 (fr) 2002-04-24
JP2003500540A (ja) 2003-01-07
US6736983B1 (en) 2004-05-18
PL352031A1 (en) 2003-07-28
WO2000073056A1 (fr) 2000-12-07
AU5804200A (en) 2000-12-18
CA2372938A1 (fr) 2000-12-07
EP1198344B1 (fr) 2003-06-25
KR100649374B1 (ko) 2006-11-24
DE50002664D1 (de) 2003-07-31
PL202574B1 (pl) 2009-07-31
TW562871B (en) 2003-11-21
ATE243618T1 (de) 2003-07-15
CZ20014234A3 (cs) 2002-10-16

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