DE19781735T1 - Integriertes Gerät zum kapazitiven Messen von Nanometerabständen - Google Patents

Integriertes Gerät zum kapazitiven Messen von Nanometerabständen

Info

Publication number
DE19781735T1
DE19781735T1 DE19781735T DE19781735T DE19781735T1 DE 19781735 T1 DE19781735 T1 DE 19781735T1 DE 19781735 T DE19781735 T DE 19781735T DE 19781735 T DE19781735 T DE 19781735T DE 19781735 T1 DE19781735 T1 DE 19781735T1
Authority
DE
Germany
Prior art keywords
integrated device
capacitive measurement
nanometer distances
nanometer
distances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19781735T
Other languages
English (en)
Other versions
DE19781735B4 (de
Inventor
Vinko Kunc
Janez Trontelj
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram AG
Original Assignee
Austria Mikro Systeme International GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Austria Mikro Systeme International GmbH filed Critical Austria Mikro Systeme International GmbH
Publication of DE19781735T1 publication Critical patent/DE19781735T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
DE19781735T 1996-04-30 1997-04-30 Integriertes Gerät zum kapazitiven Messen von Nanometerabständen Pending DE19781735T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SI9600141A SI9600141B (sl) 1996-04-30 1996-04-30 Integriran kapacitivni merilnik nanometrijskih razdalj
PCT/SI1997/000016 WO1997041406A1 (en) 1996-04-30 1997-04-30 Integrated device for capacitive measuring of nanometer distances

Publications (1)

Publication Number Publication Date
DE19781735T1 true DE19781735T1 (de) 1999-04-08

Family

ID=20431837

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19781735T Pending DE19781735T1 (de) 1996-04-30 1997-04-30 Integriertes Gerät zum kapazitiven Messen von Nanometerabständen
DE19781735A Expired - Fee Related DE19781735B4 (de) 1996-04-30 1997-04-30 Integriertes Gerät zum kapazitiven Messen von Nanometerabständen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19781735A Expired - Fee Related DE19781735B4 (de) 1996-04-30 1997-04-30 Integriertes Gerät zum kapazitiven Messen von Nanometerabständen

Country Status (5)

Country Link
US (1) US6323660B1 (de)
AU (1) AU2420197A (de)
DE (2) DE19781735T1 (de)
SI (1) SI9600141B (de)
WO (1) WO1997041406A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10122912A1 (de) * 2001-05-11 2002-11-21 Infineon Technologies Ag Vorrichtung und Verfahren zum Erzeugen einer vorbestimmten Positionsbeziehung zweier zueinander beweglicher Elektroden

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6828800B2 (en) * 2000-12-14 2004-12-07 Yeda Research And Development Co. Ltd. Single-molecule detector
US7015715B2 (en) * 2003-03-24 2006-03-21 Indigo Systems Corporation Hybrid gap measurement circuit
US7492167B2 (en) * 2003-11-05 2009-02-17 Yeda Research And Development Co. Ltd. Method and device for monitoring and controlling fluid locomotion

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB612973A (en) 1946-06-12 1948-11-19 Whessoe Ltd Improvements in gas holders
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
FR2578323B1 (fr) * 1985-03-01 1987-11-20 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
EP0257724A3 (de) * 1986-08-27 1990-01-17 Ohmatoi Naoyuki Wandler mit drei Elektroden für Phasenvergleich und Pulsphasenabgleichungskette zum Gebrauch mit dem Wandler
GB8914910D0 (en) * 1989-06-29 1989-08-23 Vg Instr Group Charge transducer
JPH0486574A (ja) * 1990-07-30 1992-03-19 Tokyo Kasoode Kenkyusho:Kk 被搬送体の帯電電位計測装置
US5065103A (en) * 1990-03-27 1991-11-12 International Business Machines Corporation Scanning capacitance - voltage microscopy
GB9303111D0 (en) * 1993-02-17 1993-03-31 Hitachi Europ Ltd Displacement transducer
US5936237A (en) * 1995-07-05 1999-08-10 Van Der Weide; Daniel Warren Combined topography and electromagnetic field scanning probe microscope
US5886532A (en) * 1995-10-04 1999-03-23 Uva Patent Foundation Nanometer distance regulation using electromechanical power dissipation
US5710052A (en) * 1995-10-17 1998-01-20 Advanced Micro Devices, Inc. Scanning spreading resistance probe
US6002131A (en) * 1998-03-25 1999-12-14 The Board Of Trustees Of The Leland Stanford Junior University Scanning probe potentiometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10122912A1 (de) * 2001-05-11 2002-11-21 Infineon Technologies Ag Vorrichtung und Verfahren zum Erzeugen einer vorbestimmten Positionsbeziehung zweier zueinander beweglicher Elektroden

Also Published As

Publication number Publication date
SI9600141B (sl) 2002-12-31
SI9600141A (en) 1997-10-31
DE19781735B4 (de) 2006-03-23
AU2420197A (en) 1997-11-19
WO1997041406A1 (en) 1997-11-06
US6323660B1 (en) 2001-11-27

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44