DE19781645T1 - Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung - Google Patents
Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. RegeleinrichtungInfo
- Publication number
- DE19781645T1 DE19781645T1 DE19781645T DE19781645T DE19781645T1 DE 19781645 T1 DE19781645 T1 DE 19781645T1 DE 19781645 T DE19781645 T DE 19781645T DE 19781645 T DE19781645 T DE 19781645T DE 19781645 T1 DE19781645 T1 DE 19781645T1
- Authority
- DE
- Germany
- Prior art keywords
- cryopump
- fore
- rough
- cleaning
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- F04B37/085—Regeneration of cryo-pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61913196A | 1996-03-20 | 1996-03-20 | |
PCT/US1997/002194 WO1997035111A1 (en) | 1996-03-20 | 1997-02-12 | Purge and rough cryopump regeneration process, cryopump and controller |
Publications (1)
Publication Number | Publication Date |
---|---|
DE19781645T1 true DE19781645T1 (de) | 1999-03-25 |
Family
ID=24480598
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19781645A Expired - Lifetime DE19781645B4 (de) | 1996-03-20 | 1997-02-12 | Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung |
DE19781645T Pending DE19781645T1 (de) | 1996-03-20 | 1997-02-12 | Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19781645A Expired - Lifetime DE19781645B4 (de) | 1996-03-20 | 1997-02-12 | Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5862671A (de) |
JP (1) | JP4297975B2 (de) |
DE (2) | DE19781645B4 (de) |
FR (1) | FR2746453B1 (de) |
GB (2) | GB2325707B (de) |
WO (1) | WO1997035111A1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6327863B1 (en) | 2000-05-05 | 2001-12-11 | Helix Technology Corporation | Cryopump with gate valve control |
US7091882B2 (en) | 2001-05-29 | 2006-08-15 | Terion, Incorporated | Automated exchange for determining availability of assets shareable among entities |
US6510697B2 (en) | 2001-06-07 | 2003-01-28 | Helix Technology Corporation | System and method for recovering from a power failure in a cryopump |
US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
WO2005005833A2 (en) | 2003-06-27 | 2005-01-20 | Helix Technology Corporation | Integration of automated cryopump safety purge |
JP4669787B2 (ja) * | 2003-11-28 | 2011-04-13 | 住友重機械工業株式会社 | 水の再生方法及び装置 |
US7297055B2 (en) * | 2004-03-16 | 2007-11-20 | Raytheon Company | Vacuum-insulating system and method for generating a high-level vacuum |
US7194867B2 (en) * | 2004-03-19 | 2007-03-27 | Brooks Automation, Inc. | Integrated rough/purge/vent (RPV) valve |
US7228687B2 (en) * | 2004-08-12 | 2007-06-12 | Vat Holding Ag | Valve device |
KR100706818B1 (ko) * | 2005-11-07 | 2007-04-12 | 박병직 | 크라이오 펌프 |
US20090038319A1 (en) * | 2007-08-08 | 2009-02-12 | Sumitomo Heavy Industries, Ltd. | Cryopanel and Cryopump Using the Cryopanel |
EP2310681A4 (de) * | 2008-07-01 | 2017-04-12 | Brooks Automation, Inc. | Verfahren und vorrichtung zur bereitstellung von temperaturregelung für eine kryopumpe |
WO2011075110A1 (en) * | 2008-11-19 | 2011-06-23 | Brooks Automation, Inc. | Process chamber with intergrated pumping |
TWI646264B (zh) | 2011-03-04 | 2019-01-01 | 美商布魯克機械公司 | 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法 |
JP5634323B2 (ja) * | 2011-05-13 | 2014-12-03 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプのための再生方法 |
JP5846966B2 (ja) * | 2012-03-01 | 2016-01-20 | 住友重機械工業株式会社 | クライオポンプ及びその再生方法 |
US9186601B2 (en) * | 2012-04-20 | 2015-11-17 | Sumitomo (Shi) Cryogenics Of America Inc. | Cryopump drain and vent |
JP6124626B2 (ja) * | 2013-03-12 | 2017-05-10 | 住友重機械工業株式会社 | クライオポンプ及びその再生方法 |
JP6253464B2 (ja) * | 2014-03-18 | 2017-12-27 | 住友重機械工業株式会社 | クライオポンプ、及びクライオポンプの再生方法 |
JP6351525B2 (ja) | 2015-03-04 | 2018-07-04 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法 |
JP7455040B2 (ja) * | 2020-10-05 | 2024-03-25 | 住友重機械工業株式会社 | クライオポンプおよびクライオポンプの再生方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2949092A1 (de) * | 1979-12-06 | 1981-06-11 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
US4356810A (en) * | 1981-02-17 | 1982-11-02 | William J. Ferlin | Plural burner gas cooker |
US4514204A (en) * | 1983-03-21 | 1985-04-30 | Air Products And Chemicals, Inc. | Bakeable cryopump |
US4718240A (en) * | 1985-03-01 | 1988-01-12 | Helix Technology Corporation | Cryopump regeneration method and apparatus |
EP0214277B1 (de) * | 1985-03-01 | 1990-06-13 | Helix Technology Corporation | Verfahren und vorrichtung zum regenerieren einer kryopumpe |
EP0250613B1 (de) * | 1986-06-23 | 1991-07-17 | Leybold Aktiengesellschaft | Kryopumpe und Verfahren zum Betrieb dieser Kryopumpe |
JPS6312890A (ja) * | 1986-07-03 | 1988-01-20 | Sumitomo Precision Prod Co Ltd | クライオポンプの始動及び再生方法 |
US4918930A (en) * | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
US5157928A (en) * | 1988-09-13 | 1992-10-27 | Helix Technology Corporation | Electronically controlled cryopump |
CA2049029A1 (en) * | 1989-04-07 | 1990-10-08 | Hans T. Clarke | Pressure relief valve and cryopump utilizing the same |
JP2574586B2 (ja) * | 1990-11-19 | 1997-01-22 | ライボルト アクチエンゲゼルシヤフト | クライオポンプを再生する方法及びこの方法を実施するのに適したクライオポンプ |
JPH04326943A (ja) * | 1991-04-25 | 1992-11-16 | Hitachi Ltd | 真空排気システム及び排気方法 |
DE9111236U1 (de) * | 1991-09-10 | 1992-07-09 | Leybold AG, 6450 Hanau | Kryopumpe |
US5228299A (en) * | 1992-04-16 | 1993-07-20 | Helix Technology Corporation | Cryopump water drain |
GB2300885B (en) * | 1993-02-26 | 1997-09-24 | Helix Tech Corp | Cryogenic vacuum pump with electronically controlled regeneration |
US5375424A (en) * | 1993-02-26 | 1994-12-27 | Helix Technology Corporation | Cryopump with electronically controlled regeneration |
US5513499A (en) * | 1994-04-08 | 1996-05-07 | Ebara Technologies Incorporated | Method and apparatus for cryopump regeneration using turbomolecular pump |
US5517823A (en) * | 1995-01-18 | 1996-05-21 | Helix Technology Corporation | Pressure controlled cryopump regeneration method and system |
-
1997
- 1997-02-12 GB GB9820453A patent/GB2325707B/en not_active Expired - Fee Related
- 1997-02-12 DE DE19781645A patent/DE19781645B4/de not_active Expired - Lifetime
- 1997-02-12 JP JP53346397A patent/JP4297975B2/ja not_active Expired - Lifetime
- 1997-02-12 WO PCT/US1997/002194 patent/WO1997035111A1/en active Application Filing
- 1997-02-12 DE DE19781645T patent/DE19781645T1/de active Pending
- 1997-02-12 GB GB9922209A patent/GB2340187B/en not_active Expired - Fee Related
- 1997-03-19 FR FR9703345A patent/FR2746453B1/fr not_active Expired - Fee Related
- 1997-05-02 US US08/848,973 patent/US5862671A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1997035111A1 (en) | 1997-09-25 |
JP4297975B2 (ja) | 2009-07-15 |
GB9922209D0 (en) | 1999-11-17 |
GB2325707A (en) | 1998-12-02 |
DE19781645B4 (de) | 2005-12-01 |
GB2340187A (en) | 2000-02-16 |
GB9820453D0 (en) | 1998-11-11 |
GB2325707B (en) | 2000-06-21 |
JP2000512703A (ja) | 2000-09-26 |
US5862671A (en) | 1999-01-26 |
FR2746453B1 (fr) | 2001-01-05 |
FR2746453A1 (fr) | 1997-09-26 |
GB2340187B (en) | 2000-06-21 |
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