GB2300885B - Cryogenic vacuum pump with electronically controlled regeneration - Google Patents

Cryogenic vacuum pump with electronically controlled regeneration

Info

Publication number
GB2300885B
GB2300885B GB9615938A GB9615938A GB2300885B GB 2300885 B GB2300885 B GB 2300885B GB 9615938 A GB9615938 A GB 9615938A GB 9615938 A GB9615938 A GB 9615938A GB 2300885 B GB2300885 B GB 2300885B
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
electronically controlled
cryogenic vacuum
controlled regeneration
regeneration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9615938A
Other versions
GB2300885A (en
GB9615938D0 (en
Inventor
Allen J Bartlett
Stephen J Yamartino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/023,697 external-priority patent/US5375424A/en
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Priority to GB9704594A priority Critical patent/GB2309750B/en
Publication of GB9615938D0 publication Critical patent/GB9615938D0/en
Publication of GB2300885A publication Critical patent/GB2300885A/en
Application granted granted Critical
Publication of GB2300885B publication Critical patent/GB2300885B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
GB9615938A 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration Expired - Fee Related GB2300885B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9704594A GB2309750B (en) 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/023,697 US5375424A (en) 1993-02-26 1993-02-26 Cryopump with electronically controlled regeneration
GB9514620A GB2289922B (en) 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration

Publications (3)

Publication Number Publication Date
GB9615938D0 GB9615938D0 (en) 1996-09-11
GB2300885A GB2300885A (en) 1996-11-20
GB2300885B true GB2300885B (en) 1997-09-24

Family

ID=26307420

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9615938A Expired - Fee Related GB2300885B (en) 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration

Country Status (1)

Country Link
GB (1) GB2300885B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997035111A1 (en) * 1996-03-20 1997-09-25 Helix Technology Corporation Purge and rough cryopump regeneration process, cryopump and controller
CN104747422B (en) * 2013-12-31 2016-08-17 北京北方微电子基地设备工艺研究中心有限责任公司 PVD equipment cold pump method for controlling reproduction and device
CN116428155B (en) * 2023-04-13 2024-03-22 北京通嘉宏瑞科技有限公司 Pump body cleaning system and pump body cleaning control method

Also Published As

Publication number Publication date
GB2300885A (en) 1996-11-20
GB9615938D0 (en) 1996-09-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20080223