CN116428155B - Pump body cleaning system and pump body cleaning control method - Google Patents

Pump body cleaning system and pump body cleaning control method Download PDF

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Publication number
CN116428155B
CN116428155B CN202310390654.9A CN202310390654A CN116428155B CN 116428155 B CN116428155 B CN 116428155B CN 202310390654 A CN202310390654 A CN 202310390654A CN 116428155 B CN116428155 B CN 116428155B
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CN
China
Prior art keywords
valve
valve body
pump body
stage
chamber
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CN202310390654.9A
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Chinese (zh)
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CN116428155A (en
Inventor
魏民
王进福
赵瑜
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Beijing Tongjia Hongrui Technology Co ltd
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Beijing Tongjia Hongrui Technology Co ltd
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Priority to CN202310390654.9A priority Critical patent/CN116428155B/en
Publication of CN116428155A publication Critical patent/CN116428155A/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The application provides a pump body cleaning system and pump body cleaning control method, this pump body cleaning system is used for cleaning the pump body inside of vacuum pump, and the pump body includes multistage cavity, and pump body cleaning system includes: the detection assembly comprises a plurality of detection elements, wherein each detection element is configured to be arranged in the primary cavity and is used for detecting the nitrogen inlet condition of the primary cavity; a valve body assembly comprising a plurality of valve bodies, each valve body being configured to be disposed on a wall of a primary chamber for controlling nitrogen gas inlet to the primary chamber; and the controller is connected with the detection assembly and the valve body assembly and is configured to control the opening and closing of the valve body connected with each stage of chamber according to the detection result of each detection element. According to the pump body cleaning device, the detection element and the valve body are arranged in each stage of the cavity, and the controller controls the opening and closing of the valve body on each stage of the cavity based on the detection result of the detection element, so that the pump body cleaning cleanliness under different working conditions can be improved.

Description

Pump body cleaning system and pump body cleaning control method
Technical Field
The application relates to the technical field of vacuum pumps, in particular to a pump body cleaning system and a control method thereof.
Background
After the vacuum pump is used, cleaning is needed to be carried out on the inside of the vacuum pump so as to ensure the inside of the vacuum pump to be clean. Typically, the residual gases or impurities in the pump body are purged by introducing nitrogen into the vacuum pump. In the prior art, when cleaning the vacuum pump, the nitrogen gas inlet is rated in the amount and the position of the nitrogen gas inlet is fixed. However, the amount of nitrogen required to purge the vacuum pump varies for different conditions. The existing cleaning mode is easy to cause the problem of cleaning incompleteness. Residual gases or impurities may cause corrosion to the internal structure of the vacuum pump, affecting the service life of the vacuum pump.
Disclosure of Invention
An object of the embodiments of the present application is to provide a pump body cleaning system and a pump body cleaning control method, which are used for improving the problem of cleaning of a vacuum pump body in the prior art.
The application provides a pump body cleaning system for clean the pump body inside of vacuum pump, the pump body has multistage cavity, the pump body cleaning system includes: a detection assembly comprising a plurality of detection elements, each detection element being configured to be disposed within a stage of the chamber for detecting nitrogen ingress into the stage chamber; a valve body assembly comprising a plurality of valve bodies, each valve body being configured to be disposed on a wall of a chamber of a stage for controlling nitrogen gas inlet of the chamber of the stage; and the controller is connected with the detection assembly and the valve body assembly and is configured to control the opening and closing of the valve body connected with each stage of chamber according to the detection result of each detection element.
According to the pump body cleaning device, the detection element and the valve body are arranged in each stage of the cavity, and the controller controls the opening and closing of the valve body on each stage of the cavity based on the detection result of the detection element, so that the pump body cleaning cleanliness under different working conditions can be improved.
In one embodiment, the detecting element is a flow sensor or a pressure sensor.
In one embodiment, the plurality of detecting elements includes a plurality of detecting element pairs, each detecting element pair is configured to be disposed in the chamber of one stage and is used for detecting the nitrogen gas inlet condition of the chamber of the stage, each detecting element pair includes two detecting elements, one of the detecting elements is a flow sensor, and the other detecting element pair is a pressure sensor.
According to the device, the detection element pair is arranged in each stage of the cavity, one of the detection element pair is the flow sensor, the other detection element pair is the pressure sensor, and therefore the nitrogen gas inlet condition in each stage of the cavity can be detected from the two aspects of flow and pressure, more accurate basis is provided when each stage of the cavity is cleaned, and the cleaning cleanliness of each stage of the cavity is improved.
In an embodiment, the valve body has a valve body internal channel, the valve body internal channel has an air inlet end and an air outlet end which are oppositely arranged, the air inlet end is configured to be communicated with a nitrogen gas source, the air outlet end is configured to be communicated with a chamber of a stage where the valve body is located, the air inlet end is directed to the air outlet end, the valve body internal channel comprises a first main channel section, a plurality of branch channel sections and a second main channel section, the first main channel section is connected with the air inlet end, the second main channel section is connected with the air outlet end, the plurality of branch channel sections are connected in parallel between the first main channel section and the second main channel section, the valve body further comprises a plurality of electromagnetic valves, each electromagnetic valve is arranged on one branch channel section and used for controlling on-off of the branch channel section, and the controller is configured to control on-off of each electromagnetic valve in the chamber of each stage according to a detection result of each detection element.
According to the valve body, the inner channel of the valve body comprises a plurality of branch channel sections, and the solenoid valves are respectively arranged on the branch channel sections to control the on-off of the branch channel sections, so that the valve body is beneficial to controlling the introduction of nitrogen of each stage of chamber more finely, and the capability of the pump body cleaning system for adapting to different working conditions is improved.
In an embodiment, the valve body further includes a pressure regulating valve and a flow sensor sequentially disposed on the first main path section from the air inlet end to the air outlet end, the pressure regulating valve and the flow sensor are both connected to the controller, and the controller is further configured to control the opening of the pressure regulating valve based on the detection result of the flow sensor.
According to the pump body cleaning system, the pressure regulating valve and the flow sensor are arranged on the first main channel section, the controller controls the opening of the pressure regulating valve based on the detection result of the flow sensor, so that the introduction of nitrogen into each stage of chamber is controlled more finely, and the capability of the pump body cleaning system for adapting to different working conditions is further improved.
In an embodiment, the valve body further includes a first check valve and a second check valve disposed on the first main channel section, the first check valve is located between the pressure regulating valve and the air inlet end, and the second check valve is located at an end of the flow sensor facing away from the pressure regulating valve.
This application all sets up the check valve through deviating from respective one end at air-vent valve and flow sensor, helps promoting the accuracy of pressure regulating.
In an embodiment, the valve body further includes a pressure sensor and a plurality of throttle valves, the pressure sensor is disposed on the second main channel section, each throttle valve is disposed on one of the branch channels and located between the solenoid valve on the branch channel section and the second main channel section, the pressure sensor and the throttle valves are connected to the controller, and the controller is further configured to control the opening of the throttle valve based on the detection result of the pressure sensor.
According to the pump body cleaning system, the pressure sensor is arranged on the second main channel section, the throttle valve is arranged on each branch channel section, and the controller controls the opening and closing of each throttle valve based on the detection result of the pressure sensor, so that the introduction of nitrogen into each stage of chamber is controlled more finely, and the capability of the pump body cleaning system for adapting to different working conditions is further improved.
In an embodiment, each valve body has a single valve mode, a double valve mode and a multiple valve mode, wherein the single valve mode means that only one of a plurality of electromagnetic valves of the valve body is opened, the double valve mode means that two of the plurality of electromagnetic valves of the valve body are opened, and the multiple valve mode means that the plurality of electromagnetic valves of the valve body are opened.
According to the pump body cleaning system, each valve body comprises multiple working modes, the capability of the pump body cleaning system for adapting to different working conditions is improved, and the introduction of nitrogen into each stage of chamber is controlled more finely.
The present application also provides a vacuum pump comprising: the pump body cleaning system; the pump body is provided with a plurality of stages of chambers, and each stage of chamber is provided with the detection element and the valve body.
The application also provides a pump body cleaning control method, which is applied to the controller of the pump body cleaning system and comprises the following steps: obtaining detection results of all detection elements; and controlling the opening and closing of a valve body connected with each stage of chamber according to the detection result of each detection element.
The details of one or more embodiments of the application are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the present application will be apparent from the description and drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a block diagram of a pump body cleaning system according to an embodiment of the present disclosure.
Fig. 2 is a circuit diagram of a detection element according to an embodiment of the present application.
Fig. 3 is a circuit structure of a signal conversion circuit according to an embodiment of the present application.
Fig. 4 is a schematic structural diagram of a valve body according to an embodiment of the present disclosure.
Fig. 5 is a flowchart of a pump body cleaning control method according to an embodiment of the present disclosure.
Icon: pump body cleaning system-10; a detection assembly-101; a valve body assembly-103; a controller-105; a detection element-11; a valve body-13; intake port-1311; outlet end-1315; a first main channel segment-1312; bypass channel segment-1313; a second main channel segment-1314; solenoid valve-132; pressure regulating valve-1331; flow sensor-1333; a first check valve-1332; a second check valve-1334; a pressure sensor-1341; throttle valve-1343.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
Referring to fig. 1, one embodiment of the present application provides a pump body purging system 10 for purging the interior of a pump body of a vacuum pump, and in particular, for purging the interior of a pump body having multiple stages of chambers. It should be noted that the multiple stages of chambers inside the pump body may be mutually communicated.
In this embodiment, pump body purge system 10 may include a detection assembly 101, a valve body assembly 103, and a controller 105.
The detection assembly 101 comprises a plurality of detection elements 11. Each detection element 11 is configured to be disposed in any one of the multiple stage chambers of the pump body. Each detection element 11 is used for detecting the nitrogen inlet of the chamber of the stage.
The detection element 11 may be a flow sensor, a pressure sensor or other device capable of detecting the nitrogen gas inlet in the chamber. For example, the circuit structure of the detecting element 11 may be as shown in fig. 2, in which FLOW is a current analog signal representing the detection result.
In one embodiment, the plurality of sensing elements 11 may comprise a plurality of sensing element pairs. Each detection element pair is configured to be arranged in any one stage chamber of the multistage chamber of the pump body, and each detection element pair is used for detecting the nitrogen gas inlet condition of the stage chamber.
Further, each sensing element pair may include two sensing elements, one of which is a flow sensor and the other of which is a pressure sensor. Therefore, the nitrogen inlet condition in each stage of cavity can be detected from the two aspects of flow and pressure, so that more accurate basis is provided when each stage of cavity is cleaned, and the cleaning cleanliness of each stage of cavity is improved.
The valve body assembly 103 includes a plurality of valve bodies 13. Each valve body 13 is configured to be provided on a cavity wall of any one of the multi-stage chambers of the pump body for controlling the nitrogen gas introduction amount of the stage chamber.
The controller 105 is connected to the detection unit 101 and the valve body unit 103, and is configured to control the opening and closing of the valve body 13 connected to each stage of the chambers according to the detection result of each detection element 11.
In one embodiment, the output signal FLOW of the detecting element 11 is converted into a voltage signal FLOW-ADC by a signal conversion circuit. The controller 105 controls the opening and closing of the valve body 13 connected to each stage of the chambers based on the voltage signal FLOW-ADC. The specific structure of the signal conversion circuit may be exemplified as shown in fig. 3.
In one embodiment, the controller 105 may employ an STM32F103 series single-chip microcomputer.
It will be appreciated that in other embodiments, the pump body purge system 10 may also include an alarm. The controller 105 is connected to the alarm, and the controller 105 is further configured to compare the detection result of the detection element 11 with a preset criterion, and to control the alarm to sound an alarm when the comparison result characterizes the detection result exceeding the preset criterion. Illustratively, the alarm may be a buzzer, a display, or the like.
According to the pump body cleaning system 10 provided by the embodiment of the application, the detection element 11 and the valve body 13 are arranged in each stage of chamber, and the controller 105 controls the opening and closing of the valve body 13 on each stage of chamber based on the detection result of the detection element 11, compared with the prior art, the nitrogen inlet is rated, the position of the nitrogen inlet is fixed, and the single valve is used for controlling the scheme that the nitrogen cleans the pump body chamber, so that the cleaning of the chamber is more sufficient, and the cleaning of the pump body under different working conditions is facilitated.
It is understood that each valve body 13 of the plurality of valve bodies 13 included in the valve body assembly 103 may have the same structure; alternatively, part of the valve body 13 may have the same structure; alternatively, each valve body 13 has a different structure.
Referring to fig. 4, in some embodiments, each valve body 13 has the same structure. Specifically, each valve body 13 has a valve body internal passage. The valve body interior passage has an oppositely disposed inlet end 1311 and an outlet end 1315.
The inlet port 1311 is for communication with a nitrogen source. Illustratively, the inlet port 1311 may be in communication with a nitrogen source through a gas conduit.
The outlet port 1315 is adapted to communicate with the chamber of the stage in which the valve body 13 is located. Illustratively, the outlet port 1315 may be in communication with the chamber of the stage in which the valve body 13 is located via an air conduit.
The valve body interior passage further includes a first main passage section 1312, a plurality of bypass passage sections 1313, and a second main passage section 1314 from the inlet end 1311 to the outlet end 1315. First main channel section 1312 is connected to intake port 1311. The second main channel segment 1314 is connected to an outlet port 1315. A plurality of bypass channel segments 1313 are connected in parallel between the first main channel segment 1312 and the second main channel segment 1314.
The valve body 13 may also include a plurality of solenoid valves 132. Each solenoid valve 132 is disposed on a bypass channel segment 1313 and is used to control the on/off of the bypass channel segment 1313.
The controller 105 is configured to control the opening and closing of the respective solenoid valves 132 in the valve body 13 of each stage chamber based on the detection result of each detection element 11.
Taking the number of solenoid valves 132 as 4 as an example, the lack of nitrogen gas inlet to each stage chamber is divided into: the higher the level is indicative of a lack of nitrogen gas inlet, the more the level is indicative of a lack of nitrogen gas inlet, the level 0, level 1, level 2, level 3, level 4, and when the detection result of the detection element 11 is indicative of a lack of nitrogen gas inlet of the level chamber where the detection element 11 is located being level 0 (i.e., the nitrogen gas inlet is sufficient), the controller 105 may control all the solenoid valves of the level chamber where the detection element 11 is located to be closed; when the detection result of the detection element 11 indicates that the lack of the nitrogen gas inlet amount of the stage chamber where the detection element 11 is located is 1 stage, the controller 105 can control any one of the electromagnetic valves 132 of the stage chamber where the detection element 11 is located to be opened; when the detection result of the detection element 11 indicates that the lack of the nitrogen gas inlet amount of the stage chamber where the detection element 11 is located is 2 stages, the controller 105 can control any two solenoid valves 132 of the stage chamber where the detection element 11 is located to be opened; when the detection result of the detection element 11 indicates that the lack of the nitrogen gas inlet amount of the stage chamber where the detection element 11 is located is 3 stages, the controller 105 may control any three solenoid valves 132 of the stage chamber where the detection element 11 is located to be opened; when the detection result of the detection element 11 indicates that the lack of the nitrogen gas inlet amount of the stage chamber where the detection element 11 is located is 4 stages, the controller 105 may control all four solenoid valves of the stage chamber where the detection element 11 is located to be opened.
The nitrogen deficiency of the stage chamber in which each detecting element 11 is located may be determined by the controller 105 based on the amount of exhaust gas/impurities to be cleaned in each stage chamber and the amount of nitrogen currently introduced into each stage chamber. The amount of exhaust gas/impurities to be cleaned in each stage of the chamber may be obtained by providing other measuring elements in signal connection with the controller 105, which is not limited in this application.
In one embodiment, a corresponding valve body switch control circuit may be provided for each solenoid valve 132 within each valve body 13. The controller 105 can control the opening/closing of each solenoid valve 132 in the valve body 13 of each stage chamber by a valve body switch control circuit. The valve body switching control circuit can control the opening/closing of the solenoid valves 132 by controlling the opening/power supply of each solenoid valve 132 in the valve body 13.
It should be noted that, the specific arrangement of the valve switch control circuit may refer to the prior art, and the application is not limited thereto.
Because the amount of waste gas or impurities to be cleaned in each stage of the pump body may be different, in the embodiment of the present application, the valve body internal channel includes a plurality of branch channel sections 1313, and each branch channel section 1313 is provided with a solenoid valve 132, and the controller 105 controls the opening and closing of each solenoid valve 132 in the valve body 13 of each stage of the chamber according to the detection result of each detection element 11, so that differential cleaning of each stage of the chamber can be realized, and because the multistage chambers are mutually communicated, local and integral combined purging of the pump body can be realized, so that the interior of the pump body is cleaned more thoroughly. In addition, the pump body cleaning system is beneficial to controlling the introduction of the nitrogen of each stage of chamber more finely and improving the capability of the pump body cleaning system to adapt to different working conditions.
In one embodiment, each valve body 13 has a single valve mode, a double valve mode, and a multiple valve mode. The single valve mode refers to a valve body in which only one solenoid valve 132 of the plurality of solenoid valves 132 is opened. The dual valve mode means that two solenoid valves 132 among the plurality of solenoid valves 132 of the valve body are opened. The multiple valve mode means that the plurality of solenoid valves 132 of the valve body are all opened.
According to the embodiment of the application, each valve body comprises multiple working modes, so that the capability of the pump body cleaning system for adapting to different working conditions is improved, and the introduction of nitrogen into each stage of chamber is controlled more finely.
With continued reference to fig. 4, in an embodiment, the valve body 13 may further include a pressure regulating valve 1331 and a flow sensor 1333 disposed on the first main channel section 1312 in sequence from the air inlet end 1311 to the air outlet end 1315. The pressure regulating valve 1331 and the flow sensor 1333 may both be connected to the controller 105. The controller may also be configured to control the opening degree of the pressure regulating valve 1331 based on the detection result of the flow sensor 1333.
According to the embodiment of the application, the pressure regulating valve 1331 and the flow sensor 1333 are arranged on the first main channel section 1312, and the controller controls the opening of the pressure regulating valve 1331 based on the detection result of the flow sensor 1333, so that the nitrogen inlet of each stage of chamber is controlled more finely, and the capability of the pump body cleaning system for adapting to different working conditions is further improved.
With continued reference to fig. 4, in one embodiment, the valve body 13 may further include a first check valve 1332 and a second check valve 1334 disposed on the first main channel section 1312. A first check valve 1332 is located between the pressure regulating valve 1331 and the intake end 1311. A second check valve 1334 is located at an end of the flow sensor 1333 facing away from the pressure regulating valve 1331.
According to the embodiment of the application, the check valves are arranged at the ends, deviating from the pressure regulating valve 1331 and the flow sensor 1333, of the pressure regulating valve, so that the accuracy of pressure regulation is improved.
With continued reference to fig. 4, in one embodiment, the valve body 13 further includes a pressure sensor 1341 and a plurality of throttles 1343. Pressure sensor 1341 is disposed on second main channel segment 1314. Each throttle 1343 is disposed on one bypass channel segment 1313 and is located between the solenoid valve 132 on the bypass channel segment 1313 and the second main channel segment 1314. The pressure sensor 1341 and the throttle 1343 are both connected to the controller 105. The controller 105 is also used to control the opening degree of the throttle valve 1343 based on the detection result of the pressure sensor 1341.
According to the embodiment of the application, the pressure sensor 1341 is arranged on the second main channel section 1314, the throttle valves 1343 are arranged on the branch channel sections 1313, and the controller 105 controls the opening and closing of each throttle valve 1343 based on the detection result of the pressure sensor 1341, so that the introduction of nitrogen into each stage of chamber is controlled more finely, and the capability of the pump body cleaning system for adapting to different working conditions is further improved.
Based on the same inventive concept, the present application also provides a vacuum pump comprising: the pump body purge system 10 and the pump body are described above. The pump body has multiple stages of chambers, each of which is provided with the detection element 11 and the valve body 13 described hereinabove. Illustratively, the pump body purge system 10 may be used to purge stator chambers of the pump body.
Referring to fig. 5, based on the same inventive concept, the present application further provides a pump body cleaning control method, which is applied to the controller 105 of the pump body cleaning system. The pump body cleaning control method comprises the following steps.
Step S11, a detection result of each detection element is obtained.
And step S12, controlling the opening and closing of the valve body connected with each stage of chamber according to the detection result of each detection element.
In one embodiment, before step S11, the pump body cleaning control method further includes determining that the cleaning program is in an operation state.
In an embodiment, after step S11, the pump body cleaning control method may further include controlling the alarm to output alarm information when any one of the detection results indicates that the nitrogen gas inlet amount of the stage chamber of the detection element outputting the detection result exceeds a preset standard.
In one embodiment, step S12 includes: for each detection result, if the detection result is determined to represent that the nitrogen gas inlet amount of the stage chamber of the detection element outputting the detection result does not exceed a preset standard, controlling the opening and closing of the electromagnetic valve in the valve body of the stage chamber of the detection element outputting the detection result according to the detection result.
The foregoing is merely exemplary embodiments of the present application and is not intended to limit the scope of the present application, and various modifications and variations may be suggested to one skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims (7)

1. A pump body purging system for purging the interior of a pump body of a vacuum pump, the pump body having a multi-stage chamber, the pump body purging system comprising:
a detection assembly comprising a plurality of detection elements, each detection element being configured to be disposed within each stage of the chamber for detecting nitrogen ingress into the chamber at the stage;
a valve body assembly comprising a plurality of valve bodies, each valve body being configured to be disposed on a wall of the chamber of each stage for controlling the nitrogen gas inlet of the chamber of the stage;
a controller connected with the detection assembly and the valve body assembly and configured to control the opening and closing of the valve body connected with each stage of chambers according to the detection result of each detection element;
the valve body is provided with a valve body internal channel, the valve body internal channel is provided with an air inlet end and an air outlet end which are oppositely arranged, the air inlet end is configured to be communicated with a nitrogen gas source, the air outlet end is configured to be communicated with a chamber of a stage where the valve body is arranged, the valve body internal channel comprises a first main channel section, a plurality of branch channel sections and a second main channel section, the first main channel section is connected with the air inlet end, the second main channel section is connected with the air outlet end, the plurality of branch channel sections are connected between the first main channel section and the second main channel section in parallel, the valve body further comprises a plurality of electromagnetic valves, each electromagnetic valve is arranged on one branch channel section and used for controlling the on-off of the corresponding branch channel section, and the controller is configured to control the opening and closing of each electromagnetic valve in the valve body of each stage chamber according to the detection result of each detection element;
the valve body further comprises a pressure regulating valve and a flow sensor which are sequentially arranged on the first main channel section from the air inlet end to the air outlet end, the pressure regulating valve and the flow sensor are connected with the controller, and the controller is further configured to control the opening of the pressure regulating valve based on the detection result of the flow sensor;
the valve body further comprises a first one-way valve and a second one-way valve which are arranged on the first main channel section, the first one-way valve is positioned between the pressure regulating valve and the air inlet end, and the second one-way valve is positioned at one end of the flow sensor, which is away from the pressure regulating valve.
2. Pump body purging system as claimed in claim 1, wherein the detection element is a flow sensor or a pressure sensor.
3. The pump body purge system of claim 1, wherein said plurality of sensing elements comprises a plurality of sensing element pairs, each of said sensing element pairs being configured to be disposed within each of said chambers for sensing nitrogen ingress into the chamber at the stage, each of said sensing element pairs comprising two sensing elements, one of which is a flow sensor and the other of which is a pressure sensor.
4. The pump body purging system of claim 1, wherein the valve body further comprises a pressure sensor and a plurality of throttle valves, the pressure sensor being disposed on the second main passage section, each of the throttle valves being disposed on one of the branch passages and between a solenoid valve on the located branch passage section and the second main passage section, the pressure sensor and the throttle valves being connected to the controller, the controller being further configured to control the opening degree of the throttle valves based on a detection result of the pressure sensor.
5. The pump body purging system of claim 1, wherein each of the valve bodies has a single valve mode, a double valve mode, and a multiple valve mode, the single valve mode being that only one of the plurality of solenoid valves of the valve body is open, the double valve mode being that two of the plurality of solenoid valves of the valve body are open, the multiple valve mode being that all of the plurality of solenoid valves of the valve body are open.
6. A vacuum pump, comprising:
the pump body purging system of any one of claims 1 to 5;
the pump body is provided with a plurality of stages of chambers, and each stage of chamber is provided with the detection element and the valve body.
7. A pump body purge control method, characterized by being applied to the controller of the pump body purge system according to any one of claims 1 to 5, comprising:
obtaining detection results of all detection elements;
and controlling the opening and closing of a valve body connected with each stage of chamber according to the detection result of each detection element.
CN202310390654.9A 2023-04-13 2023-04-13 Pump body cleaning system and pump body cleaning control method Active CN116428155B (en)

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Application Number Priority Date Filing Date Title
CN202310390654.9A CN116428155B (en) 2023-04-13 2023-04-13 Pump body cleaning system and pump body cleaning control method

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Application Number Priority Date Filing Date Title
CN202310390654.9A CN116428155B (en) 2023-04-13 2023-04-13 Pump body cleaning system and pump body cleaning control method

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CN116428155A CN116428155A (en) 2023-07-14
CN116428155B true CN116428155B (en) 2024-03-22

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Citations (7)

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JP2009203945A (en) * 2008-02-29 2009-09-10 Ebara Corp Multistage vacuum pump
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