DE19758744C2 - Laser Scanning Microscope - Google Patents
Laser Scanning MicroscopeInfo
- Publication number
- DE19758744C2 DE19758744C2 DE19758744A DE19758744A DE19758744C2 DE 19758744 C2 DE19758744 C2 DE 19758744C2 DE 19758744 A DE19758744 A DE 19758744A DE 19758744 A DE19758744 A DE 19758744A DE 19758744 C2 DE19758744 C2 DE 19758744C2
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- laser
- monitor diode
- scanning microscope
- optics
- beam splitter
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
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Abstract
Laserscanmikroskop mit einer Laseranordnung zur Beleuchtung einer zu untersuchenden Probe und einer die Laserleistung überwachenden Monitordiode sowie einer das Probenlicht detektierenden Detektorvorrichtung, wobei der Laseranordnung (13.1, 13.2) ein Strahlteiler (18) nachgeordnet ist, der einen Teil des Laserlichts zu der Monitordiode (19) auskoppelt und zwischen dem Strahlteiler (18) und der Monitordiode (19) eine DOLLAR A wellenlängenselektiv ansteuerbare Filtereinheit (21) vorgesehen ist, die auf einzelne Wellenlängen der Laseranordnung (13.1, 13.2) einstellbar ist, wobei vermittels der Monitordiode (19) die von der Filtereinheit (21) durchgelassenen Intensitäten einzelner Wellenlängen der Laseranordnung (13.1, 13.2) meßbar sind.Laser scanning microscope with a laser arrangement for illuminating a sample to be examined and a monitor diode monitoring the laser power as well as a detector device which detects the sample light, the laser arrangement (13.1, 13.2) being followed by a beam splitter (18) which forms part of the laser light to the monitor diode (19) decouples and between the beam splitter (18) and the monitor diode (19) a DOLLAR A wavelength selectively controllable filter unit (21) is provided, which can be adjusted to individual wavelengths of the laser arrangement (13.1, 13.2), the monitor diode (19) being used by the Filter unit (21) transmitted intensities of individual wavelengths of the laser arrangement (13.1, 13.2) can be measured.
Description
Im Handbook of Biological Confocal Microscopy, Second Edition, Plenum Press New York and London 1995 ist auf S. 519, Fig. 6 eine Fasereinkopplungsoptik beschrieben.In the Handbook of Biological Confocal Microscopy, Second Edition, Plenum Press New York and London 1995 on page 519, Fig. 6 a fiber coupling optics is described.
Auf Seite 595, Fig. 14 wird ein telezentrisches System für mehrere Detektionsstrahlengänge beschrieben.On page 595, Fig. 14, a telecentric system for multiple detection beam paths is described.
US 5283433 zeigt eine Einkoppeloptik für Detektionsstrahlengänge.US 5283433 shows a coupling optics for Detection beam paths.
DE 43 23 129 A1 beschreibt in Spalte 6 zentrierbare und bezüglich ihres Durchmessers variierbare Konfokalblenden. US 5444528, US 5377003, US 5317379, US 5216484 beschreiben die Wirkungsweise eines AOTF.DE 43 23 129 A1 describes in column 6 centerable confocal diaphragms which can be varied in terms of their diameter. US 5444528, US 5377003, US 5317379, US 5216484 describe the mode of action of an AOTF.
US 5081350, EP 283256 A1, WO 90/00754 beschreiben eine Faserverbindung zwischen Laser und Scaneinheit.US 5081350, EP 283256 A1, WO 90/00754 describe one Fiber connection between laser and scanning unit.
In EP 283256 A2 wird ein Mikroskop mit scannender Faser beschrieben, bei der an der Faser ausgangsseitig eine Optik befestigt ist, um das Licht in einem Lichtpunkt zu konvergieren. Zur Überwachung der Laserleistung ist eine Monitordiode vorgesehen.EP 283256 A2 describes a microscope with scanning fiber described in which an optic on the output side of the fiber is attached to the light in a point of light converge. To monitor the laser power is a Monitor diode provided.
In einem Laser- Scanning-Mikroskop werden beleuchtungsseitig jedoch mehrere Wellenlängen eingestrahlt und auch mehrere Wellenlängenbänder detektiert.In a laser scanning microscope, the illumination side however, several wavelengths irradiated and also several Wavelength bands detected.
Aufgabe der vorliegenden Erfindung ist es, bei einer Beleuchtung mit mehreren Wellenlängen die Zuverlässigkeit des Meßergebnisses auf einfache Weise zu erhöhen.The object of the present invention is in a Lighting with multiple wavelengths the reliability of the To increase the measurement result in a simple manner.
Die Aufgabe wird bei einem Laserscanmikroskop nach dem Oberbegriff des Anspruchs 1 durch die kennzeichnenden Merkmale gelöst.The task is performed using a laser scanning microscope Preamble of claim 1 by the characterizing Features resolved.
Bevorzugte Weiterbildungen sind Gegenstand der abhängigen Ansprüche. Preferred developments are the subject of the dependent Claims.
Es zeigen:Show it:
Fig. 1 eine modulare Anordnung aus Mikroskop M, Scankopf S und Lasereinheit Fig. 1 shows a modular arrangement of microscope M, scan head S and laser unit
Fig. 2 eine Darstellung des Strahlverlaufs im Scankopf S Fig. 2 is an illustration of the beam path in the scan head S
Fig. 3 die optische Wirkung der verschieblichen Kollimationsoptik 16 Fig. 3, the optical effect of the displaceable collimating optics 16
Fig. 4 die optische Wirkung der in Richtung der optischen Achse verschieblichen Pinholes Fig. 4 shows the optical effect of the pinholes displaceable in the direction of the optical axis
Fig. 5 die optische Wirkung der senkrecht t zur optischen Achse verschieblichen Pinholes bei verschiedenen reflektierenden Strahlteilern Fig. 5 shows the optical effect of the perpendicular to the optical axis t displaceable pinholes in various reflective beamsplitters
Fig. 6 Scankopf S, Mikroskop M sowie eine Faser hinter dem
Pinhole im Detektionsstrahlengang
Fig. 6 scan head S, microscope M and a fiber behind the pinhole in the detection beam path
-
1. In Fig. 1 sind schematisch eine Mikroskopeinheit M und ein
Scankopf S dargestellt, die eine gemeinsame optische
Schnittstelle über eine Zwischenabbildung Z gemäß Fig. 2
ausweisen.
Der Scankopf S kann sowohl an den Phototubus eines aufrechten Mikroskopes sowie auch vorteilhaft an einen seitlichen Ausgang eines inversen Mikroskopes.
In Fig. 1 ist ein zwischen Auflichtscan und Durchlichtscan mitttels eines schwenkbaren Spiegels 14 umschaltbarer mikroskopischer Strahlengang dargestellt, mit Lichtquelle 1, Beleuchtungsoptik 2, Strahlteiler 3, Objektiv 4, Probe 5, Kondensor 5, Lichtquelle 7, Empfängeranordnung 8, einer ersten Tubuslinse 9, einem Beobachtungsttrahlengang mit einer zweiten Tubuslinse 10 und einem Okular 11 sowie einem Strahlteiler zur Einkopplung des Scanstrahls dargestellt.
Ein Lasermodul 13.1, 13.2 nimmt die Laser auf und ist über Lichtleitfasern 14.1, 14.2 mit der Lasereinkoppeleinheit des Scankopfes S verbunden.
Die Einkopplung der Lichtleitfasern 14.1,14.2 erfolgt mittels einer verschieblichen Kollimationsoptik 16, auf die noch näher eingegangen wird, sowie Strahlumlenkelementen 17.1, 17.2.
Mittels eines teildurchlässigen Spiegels 18 wird ein Überwachungsstrahlengang in Richtung einer Monitordiode 19, der, vorteilhaft auf einem nicht dargestellten drehbaren Filterrad Linienfilter 21 sowie Neutralfilter 20 vorgeordnet sind, ausgeblendet.
Die eigentliche Scaneinheit besteht aus Scanningobjektiv 22, Scanner 23, Hauptstrahlteiler 24 und einer gemeinsamen Abbildungsoptik 25 für Detektionskanäle 26.1-26.4.
Ein Umlenkprisma 27 hinter der Abbildungsoptik 25 spiegelt die vom Objekt 5 kommende Strahlung in Richtung dichroitischer Strahleiler 28 im konvergenten Strahlengang der Abbildungsoptik 25, denen in Richtung und senkrecht zur optischen Achse verstellbare und in ihrem Durchmesser veränderbare Pinholes 29, individuell für jeden Detektionskanal sowie Emissionsfilter 30 und geeignete Empfängerelemente 31 (PMT) nachgeordnet sind.
Die Strahlteiler 27, 28 können vorteilhaft, wie in Fig. 5 schematisch dargestellt, als Teilerrad mit mehreren Positionen, motorisch durch Schrittmotoren umschaltbar, ausgebildet sein.1. A microscope unit M and a scan head S are shown schematically in FIG. 1, which have a common optical interface via an intermediate image Z according to FIG. 2.
The scan head S can be connected to the phototube of an upright microscope as well as advantageously to a lateral exit of an inverted microscope.
In Fig. 1 a switchable between Auflichtscan and transmitted light scanning mitttels a pivotable mirror 14 microscopic beam path is shown, with the light source 1, the illumination optics 2, beam splitter 3, lens 4, sample 5, the condenser 5, the light source 7, receiver arrangement 8, a first tube lens 9, an observation beam path with a second tube lens 10 and an eyepiece 11 and a beam splitter for coupling the scan beam.
A laser module 13.1 , 13.2 receives the lasers and is connected to the laser coupling unit of the scan head S via optical fibers 14.1 , 14.2 .
The optical fibers 14.1 , 14.2 are coupled in by means of displaceable collimation optics 16 , which will be discussed in more detail below, and beam deflection elements 17.1 , 17.2 .
By means of a partially transparent mirror 18 , a monitoring beam path in the direction of a monitor diode 19 , which is advantageously arranged upstream of a line filter 21 and a neutral filter 20 , which is advantageously arranged on a rotatable filter wheel, not shown.
The actual scanning unit consists of scanning objective 22 , scanner 23 , main beam splitter 24 and a common imaging optics 25 for detection channels 26.1-26.4 .
A deflecting prism 27 behind the imaging optics 25 reflects the radiation coming from the object 5 in the direction of the dichroic beam guide 28 in the convergent beam path of the imaging optics 25 , the pinholes 29 which can be adjusted in the direction and perpendicular to the optical axis and whose diameter can be changed, individually for each detection channel and emission filter 30 and suitable receiver elements 31 (PMT) are arranged downstream.
The beam splitters 27 , 28 can advantageously, as shown schematically in FIG. 5, be designed as a dividing wheel with a plurality of positions, which can be switched over by stepper motors. -
2. Vorteilhaft erfolgt eine Einkopplung von UV-Strahlung in
Glasfaser 14.1, vorzugsweise einer Single-Mode-Glasfaser
mittels eines AOTF, als Strahlablenker, d. h. wenn Strahl
nicht auf Fasereingang fallen soll, wird er mittels des AOTF
vom Fasereingang, beispielsweise in Richtung einer nicht
dargestellten Lichtfalle, abgelenkt.
Die Einkoppeloptik 33 zur Einkopplung der Laserstrahlung weist zur Einkopplung nicht dargestellte Linsensysteme auf, deren Brennweite durch den Strahlquerschnitt der Laser und die für die optimale Einkopplung erforderliche numerische Apertur festgelegt ist
Im Lasermodul 13.2, sind Einzel- und Multiwellenlängenlaser vorgesehen, die einzeln oder gemeinsam über einen AOTF in eine oder mehrere Fasern eingekoppelt werden.
Weiterhin kann die Einkoplung auch über mehrere Fasern gleichzeitig erfolgen, deren Strahlung mikroskopseitig nach Durchlaufen einer Anpaßoptik durch Farbvereiniger gemischt wird.
Auch die Mischung der Strahlung verschiedener Laser am Fasereingang ist möglich
und kann anhand der schematisch dargestellten, auswechselbar und schaltbar ausgebildeten Teilerspiegel 39 erfolgen.2. Advantageously, UV radiation is coupled into glass fiber 14.1 , preferably a single-mode glass fiber by means of an AOTF, as a beam deflector, ie if the beam is not supposed to fall on the fiber input, it is by means of the AOTF from the fiber input, for example in the direction of one light trap shown, deflected.
The coupling optics 33 for coupling the laser radiation have lens systems, not shown, for coupling, the focal length of which is determined by the beam cross section of the laser and the numerical aperture required for the optimal coupling
In the laser module 13.2 , single and multi-wavelength lasers are provided, which are coupled individually or together via an AOTF into one or more fibers.
Furthermore, the coupling can also take place simultaneously via several fibers, the radiation of which is mixed on the microscope side after passing through a matching lens by color combiners.
It is also possible to mix the radiation from different lasers at the fiber entrance
and can take place on the basis of the schematically illustrated, replaceable and switchable divider mirror 39 . -
3. Die in Fig. 2 und 3 divergent aus dem Faserende der Fasern
14.1, 2 an der Scaneinheit S austretende Laserstrahlung
wird mittels der Kollimationsoptik 16 auf einen
Unendlichstrahl kollimiert.
Des erfolgt vorteilhaft mit einer einzelnen Linse, die durch Verschiebung entlang der optischen Achse mittels einer über eine zentrale Ansteuereinheit 34 ansteuerbare Steuereinheit 37 eine Fokussierungsfunktion hat, indem ihr Abstand zum Ende der Lichtleitfaser 14.1, 2 an der Scaneinheit erfindungsgemäß veränderbar ist.
Die Wirkung Verschiebung der Kollimationsoptik 16 ist schematisch in Fig. 3a und 3b dargestellt.
In Fig. 3a ist der Strahlverlauf für zwei unterschiedlixche Wellenlängen λ1, λ2
dargestellt. Da für eine polychromatische Lichtquelle mittels einer feststehenden Abbildungsoptik in eine Bildebene nur für eine mittlere Wellenlänge des Spektralbereiches abgebildet wird, wird mittels der Ansteuereinheit 37 der Abstand von Faserende und Kollimationsoptik verändert. Für die beiden dargestellten Wellenlängen ergeben sich die Linsenstellungen S1, S2, um für beide Wellenlängen die gleiche Fokuslage zu gewährleisten.
Dadurch wird vorteilhaft bewirkt, daß im Falle der Fluoreszenzmikroskopie die Fluoreszenzstrahlung im Fokus des auf unendlich eingestellten Objektives 4 entsteht und die Anregungsstrahlung in dieselbe Ebene fokussiert wird.
Es können auch mehrere Fasern und Faserkollimatoren zur Einstellung unterschiedlicher chromatischer Kompensationen für unterschiedliche Anregungswellenklängen Verwendung finden.
Weiterhin kann eine hierdurch eine chromatische Korrektion der eingesetzten Optik, insbesondere der Mikroskopobjektive erfolgen.
Durch mehrere Einkoppelfasern und Kollimationsoptiken für unterschiedliche Wellenlängen können unabhängig verschiedene chromatische Kompensationen eingestellt werden.
Die variable Kollimation durch Verschiebung der Linse 16 kann auch zur Realisierung eines z-scans verwendet werden, indem mittels der verschieblichen Kollimatorlinse 16 der Fokus im Präparat in z-Richtung verschoben wird und ein optischer Schnitt nach dem anderen detektiert wird. Dies ist in Fig. 3b für eine Wellenlänge λ dargestellt, wobei den Stellungen S1, S2 die Fokuslagen F1, F2 entsprechen.3. The laser radiation emerging from the fiber end of the fibers 14.1 , 2 at the scanning unit S in FIGS . 2 and 3 is collimated to an infinity beam by means of the collimation optics 16 .
This is advantageously done with a single lens, which has a focusing function by displacement along the optical axis by means of a control unit 37 which can be controlled via a central control unit 34 , in that its distance from the end of the optical fiber 14.1 , 2 on the scanning unit can be changed according to the invention.
The effect of shifting the collimation optics 16 is shown schematically in FIGS . 3a and 3b.
In FIG. 3a the beam path is for two different wavelengths λ1, λ2
shown. Since for a polychromatic light source by means of a fixed imaging optics in an image plane is only imaged for a medium wavelength of the spectral range, the distance between the fiber end and the collimation optics is changed by means of the control unit 37 . The lens positions S1, S2 result for the two illustrated wavelengths in order to ensure the same focus position for both wavelengths.
This advantageously has the effect that, in the case of fluorescence microscopy, the fluorescence radiation arises in the focus of the objective 4 set to infinity and the excitation radiation is focused in the same plane.
Several fibers and fiber collimators can also be used to set different chromatic compensations for different excitation wave sounds.
Furthermore, the optics used, in particular the microscope objectives, can be corrected chromatically as a result.
Different chromatic compensations can be set independently using several coupling fibers and collimation optics for different wavelengths.
The variable collimation by displacement of the lens 16 can also be used for realizing a z-scans by the z-direction is displaced by means of the displaceable collimator lens 16, the focus in the specimen in an optical section and after the other is detected. This is shown in FIG. 3b for a wavelength λ, the positions S1, S2 corresponding to the focus positions F1, F2. -
4. In Fig. 2 dient eine Monitordiode 19, die auch, hier nicht
dargestellt, eine vorgesetzte Fokussierlinse aufweisen kann
wirkt in Verbindung mit einem linien- oder
bereichsselektiven Filterrad oder Filterschieber 21,
angesteuert von einer Steuereinheit 36, zur permanenten
Überwachung der in das Scanmodul eingekoppelten
Laserstrahlung, insbesondere um die Leistung in einer
bestimmten Laserlinie isoliert zu kontrollieren und
gegebenenfalls mittels eines Regelsignales der
Ansteuereinheit 34 zu stabilisieren.
Die Detektion mittels der Monitordiode 19 erfaßt das Laserrauschen und Variationen aufgrund des mechanisch- optischen Übertragungssystems.
Aus der detektierten momentanan Laserleistung kann dabei ein Fehlersignal abgeleitet werden, das on-line direkt auf den Laser oder einen dem Laser nachgeschalteten Intensitätsmodulator (ASOM, AOTF, EOM, Shutter) zwecks der Stabilisierung der in das Scanmodul eingestrahlten Laserleistung zurückwirkt.
Durch die Ansteuerung der Filtereinheit 21 kann somit eine wellenlängenweise Stabilisierung der Intensität und Laserleistungskontrolle erfolgen.
Durch eine Verbindung zur Detektion 31 (PMT) und jeweils zur zentralen Ansteuereinheit kann durch Bildung von Signalquotienen/oder Signalsubtraktion des Detektionssignales und des Monitiorsignales der Diode 19 eine Rauschverminderung bewirkt werden, indem das entsprechende Sensorsignal eines Detektionskanels pixelweise als Pixel-Bildinformation auf das Signal der Monitordiode normiert wird (z. B. Division), um auf diese Weise Intensitätsfluktuationen im Bild zu verringern.4. In FIG. 2, a monitor diode 19 is used , which may also have a front focusing lens, not shown here, and works in conjunction with a line- or area-selective filter wheel or filter slide 21 , controlled by a control unit 36 , for the permanent monitoring of the scan module coupled laser radiation, in particular to control the power in a certain laser line in an isolated manner and, if necessary, to stabilize it by means of a control signal from the control unit 34 .
The detection by means of the monitor diode 19 detects the laser noise and variations due to the mechanical-optical transmission system.
An error signal can be derived from the currently detected laser power, which has an on-line effect directly on the laser or an intensity modulator (ASOM, AOTF, EOM, shutter) connected downstream of the laser for the purpose of stabilizing the laser power radiated into the scan module.
By activating the filter unit 21 , wavelength stabilization of the intensity and laser power control can thus take place.
A connection to the detection 31 (PMT) and in each case to the central control unit can be used to reduce the noise by forming signal quotients / or signal subtraction of the detection signal and the monitor signal of the diode 19 , in that the corresponding sensor signal of a detection channel pixel by pixel as pixel image information on the signal of the Monitor diode is normalized (e.g. division), in order to reduce intensity fluctuations in the image. -
5. In Fig. 1 sind schematisch in verschiedener Weise
verstellbare Pinholes 29
in den Detektionskanälen 26.1-26.4 dargestellt. Sie können
insbesondere senkrecht zur optischen Achse oder in Richtung
der optischen Achse verschiebbar angeordnet sowie in
bekannter Weise in ihrem Durchmesser, beispielsweise mittels
Scherenmechanismus oder Katzenauge veränderbar sein.
Die Verstellung der Pinholedurchmesser gestattet ihre Anpassung an die Durchmesser der Airyscheibchen bei unterschiedlichen Beobachtungswellenlängen.
In Fig. 4 und 5 sind schematisch Ansteuermittel 38 für die Verstellung oder Verschiebung der einzelnen Pinholes dargestellt, die Datenleitungen zur zentralen Ansteuereinheit 34 aufweisen.
Die ansteuerbare Verschiebbarkeit der Pinholes in Richtung der optischen Achse ist in Fig. 4 schematisch dargestellt. Sie ist für den Ausgleich von optischen Fehlern, insbesondere chromatischen Längsabberationen, vorteilhaft. Diese Fehler können beim Scanobjektiv 22, aber auch beispielsweise bei der für die Detektionskanäle gemeinsamen Abbildungsoptik 25 auftreten.
Für unterschiedliche Wellenlängen λ1, λ2 ergeben sich durch chromatische Längsabweichungen unterschiedliche Fokuslagen, die unterschiedlichen Pinholelagen P1, P2 entsprechen.
Bei Auswechslung abbildender Optik, beispielsweise des Mikroskopobjektives,
kann bei bekannten chromatischen Längsfehler der eingesetzten Optik über die Ansteuereinheit 34 und Steuer- und Verschiebemittel 38 eine automatische Verschiebung der Pinholes entlang der optischen Achse erfolgen.
Es kann eine genaue Einstellung auf die verwendete Anregungswellenlänge erfolgen.
Durch eine gemeinsame Abbildungsoptik 25 für alle Detektionskanäle, die vorteilhaft nur aus einem optischen Glied besteht, wird das vom Scannobjektiv 22 erzeugte, im Unendlichen liegende Bild in die Pinholeebene abgebildet. Die gemeinsame Abbildungsoptik 25 bewirkt eine verbesserte Transmissionseffizienz gegenüber bekannten Lösungen.
Im Zusammenwirken der Abbildungsoptik mit individuell verstellbaren Pinholes in den einzelnen Detektionskanälen kann dennoch eine genaue Justierung erfolgen.5. In FIG. 1, pinholes 29 in the detection channels 26.1-26.4 are shown schematically in various ways. In particular, they can be arranged to be displaceable perpendicular to the optical axis or in the direction of the optical axis, and their diameter can be changed in a known manner, for example by means of a scissor mechanism or a cat's eye.
The adjustment of the pinhole diameter allows them to be adapted to the diameter of the Airy discs at different observation wavelengths.
In Figs. 4 and 5 drive means 38 are shown schematically for the adjustment or shifting of the individual pinholes, the data lines have to the central control unit 34th
The controllable displaceability of the pinholes in the direction of the optical axis is shown schematically in FIG. 4. It is advantageous for the compensation of optical errors, in particular chromatic longitudinal aberrations. These errors can occur with the scan lens 22 , but also, for example, with the imaging optics 25 common to the detection channels.
For different wavelengths λ1, λ2, chromatic longitudinal deviations result in different focus positions, which correspond to different pinhole positions P1, P2.
When replacing imaging optics, for example the microscope objective,
With known chromatic longitudinal errors of the optics used, the pinholes can be automatically shifted along the optical axis via the control unit 34 and control and displacement means 38 .
An exact setting can be made to the excitation wavelength used.
By means of a common imaging optics 25 for all detection channels, which advantageously consists of only one optical element, the image generated by the scanning objective 22 and lying in infinity is imaged in the pinhole plane. The common imaging optics 25 bring about an improved transmission efficiency compared to known solutions.
In cooperation with the imaging optics with individually adjustable pinholes in the individual detection channels, an exact adjustment can nevertheless be carried out. -
6. Im Strahlengang können unterschiedliche dichroitische
Strahlteiler 28 eingesetzt werden, je nach verwendeter
Wellenlänge, um nur diese zu sperren und einem
Detektionsstrahlengang zuzuführen.
Es sind daher (nicht dargestellte) Teilerrevolver oder Teierräder in verschiedenen Strahlengängen zur Einschwenkung unterschiedlicher möglichst kleiner Teiler vorgesehen, insbesondere Teilerräder, derene Radachse in 45 Grad gegen die optische Achse geneigt ist, so daß die Teiler immer nur in der Reflexionsebene verschoben werden.
Da die auf den Teilerrädern angebrachten Teiler 28 nicht genau gleich justiert sein können oder Schwankungen innerhalb ihrer Justierung oder Standard - Keiltoleranzen unterschiedliche Strahlablenkwinkel verursachen können, erfolgt gemäß der Darstellung in Fig. 5 eine Verschiebung des jeweiligen Pinholes über Steuereinheit 38 senkrecht zur optischen Achse entsprechend der Strahlablenkung.
Hier sind schematisch zwei durch unterschiedliche Stellungen von Teilern 28.1, 28.2 auf einem nicht dargestellten durch eine Steuereinheit 36 angetriebenen Teilerrad dargestellt, die senkrecht zur optischen Achse verschobene Fokuslagen in der Ebene der Pinholes 29 bewirken.
Hierbei kann mittels der Ansteuereinheit 34 über die Steuereinheiten 36,38 eine Kopplung der Stellung des Pinhole 29 mit der Teilerradstellung für die Teiler 28 erfolgen, d. h. für alle Teilerkonfigurationen verschiedener Teilerrevolver ist eine optimale Pinholeposiition abgespeichert und abrufbar.
Dies betrifft nicht nur die Stellung eines bestimmten Teilerrades, sonden auch die Stellung mehrerer Teilerräder, so daß immer die jeweils optimale Pinholepositon automatisch eingestellt wird.6. Different dichroic beam splitters 28 can be used in the beam path, depending on the wavelength used, in order to block only these and feed them to a detection beam path.
There are therefore divider revolvers (not shown) or Teier wheels in different beam paths for swiveling in as small as possible dividers, in particular divider wheels, the wheel axis of which is inclined at 45 degrees to the optical axis, so that the dividers are only ever shifted in the reflection plane.
Since the dividers 28 attached to the dividing wheels cannot be adjusted exactly the same or fluctuations within their adjustment or standard wedge tolerances can cause different beam deflection angles, the respective pinhole is shifted via the control unit 38 perpendicular to the optical axis in accordance with FIG beam deflection.
Here, two different positions of dividers 28.1 , 28.2 are shown schematically on a divider wheel, not shown, driven by a control unit 36 , which cause focus positions in the plane of the pinholes 29 that are displaced perpendicular to the optical axis.
Here, by means of the control unit 34 via the control units 36, 38 coupling the position of the pinhole 29 be made with the Teilerradstellung for the divider 28, that is for all different configurations divider divider turret is stored optimum Pinholeposiition and retrievable.
This affects not only the position of a certain divider wheel, but also the position of several divider wheels, so that the optimal pinhole position is always set automatically. -
7. In Fig. 6 ist schematisch dargestellt, wie am Pinhole 29, am
Ausgang zum PMT hinter dem Pinhole, eine Lichtleitfaser 40
angesetzt werden kann, um durch das Pinhole des
Detektionskanals die Strahlung zu einem externen Sensor 31 zu
leiten.
Dies erfolgt vorteilhaft ohne zusätzliche Koppeloptik dicht hinter dem Pinhole mit Hilfe der Lichtleitfaser 38.
Da die Pinholeöffnung verstellbar ist, wird das Austauschen von Fasern mit unterschiedlichen Kerndurchmessern stark vereinfacht, indem die Pinholegröße an den Kerndurchmesser angepaßt wird.7. FIG. 6 schematically shows how an optical fiber 40 can be attached to the pinhole 29 , at the exit to the PMT behind the pinhole, in order to guide the radiation through the pinhole of the detection channel to an external sensor 31 .
This is advantageously done without additional coupling optics close behind the pinhole with the aid of the optical fiber 38 .
Since the pinhole opening is adjustable, the exchange of fibers with different core diameters is greatly simplified by adapting the pinhole size to the core diameter.
M Mikroskop
S Scankopf
M microscope
S scan head
11
Lichtquelle
light source
22
Beleuchtungsoptik
illumination optics
33
Strahlteiler
beamsplitter
44
Objektiv
lens
55
Probe
sample
66
Kondensor
condenser
77
Lichtquelle
light source
88th
Empfänger
receiver
99
Tubuslinse
tube lens
1010
Tubuslinse
tube lens
1111
Okular
eyepiece
1212
Strahlteiler
beamsplitter
13.113.1
, .
13.213.2
Laser
laser
1414
Lichtleitfasern
optical fibers
1515
schwenkbarar Spiegel
swiveling mirror
1616
Kollimationsoptik
collimating optics
1717
Strahlumlenkelement
beam deflection
1818
teildurchlässiger Spiegel
semi-transparent mirror
1919
Monitordiode
monitor diode
2020
Neutralfilter
neutral density filters
2121
Linienfilter
line filter
2222
Scanobjektiv
scanning objective
2323
Scanner
scanner
2424
Hauptstrahlteiler
Main beam splitter
2525
Abbildungsoptik
imaging optics
26.1-26.426.1-26.4
Detektionskanäle
detection channels
2727
Umlenkprisma
deflecting prism
2828
, .
28.128.1
, .
28.228.2
dichroitische Strahlteiler
dichroic beam splitter
2929
verstellbare Pinholes (Lochblenden)
adjustable pinholes
3030
Emissionsfilter
emission filter
3131
PMT
PMT
3232
AOTF
AOTF
3333
Einkoppeloptik
coupling optics
3434
zentrale Ansteuereinheit
central control unit
3535
, .
3636
, .
3737
, .
3838
lokale Ansteuereinheiten für Diode local control units for diode
1919
, Filterwechsler . filter changer
2121
, Kollimatoroptik . collimator optics
1616
, verstellbare Pinholes , adjustable pinholes
2929
3939
Srahlteiler
Srahlteiler
4040
Lichtleitfaser
S1, S2, F1, F2 Fokusstellungen
P1, P2 Pinholestellungen
optical fiber
S1, S2, F1, F2 focus positions
P1, P2 pinhole positions
Claims (3)
mit einer Laseranordnung zur Beleuchtung einer zu untersuchenden Probe
und einer die Laserleistung überwachenden Monitordiode
sowie einer das Probenlicht detektierenden Detektorvorrichtung,
dadurch gekennzeichnet,
daß der Laseranordnung (13.1, 13.2) ein Strahlteiler (18) nachgeordnet ist, der einen Teil des Laserlichts zu der Monitordiode (19) auskoppelt
daß zwischen dem Strahlteiler (18) und der Monitordiode (19) eine wellenlängenselektiv ansteuerbare Filtereinheit (21) vorgesehen ist, die auf einzelne Wellenlängen der Laseranordnung (13.1, 13.2) einstellbar ist
und daß vermittels der Monitordiode (19) die von der Filtereinheit (21) durchgelassenen Intensitäten einzelner Wellenlängen der Laseranordnung (13.1, 13.2) meßbar sind.1. laser scanning microscope,
with a laser arrangement for illuminating a sample to be examined
and a monitor diode monitoring the laser power
and a detector device that detects the sample light,
characterized by
that the laser arrangement ( 13.1 , 13.2 ) is followed by a beam splitter ( 18 ) which couples out part of the laser light to the monitor diode ( 19 )
that between the beam splitter ( 18 ) and the monitor diode ( 19 ) a wavelength-selectively controllable filter unit ( 21 ) is provided, which is adjustable to individual wavelengths of the laser arrangement ( 13.1 , 13.2 )
and that the intensities of individual wavelengths of the laser arrangement ( 13.1 , 13.2 ) let through by the filter unit ( 21 ) can be measured by means of the monitor diode ( 19 ).
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1997102753 DE19702753C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE19758744C2 true DE19758744C2 (en) | 2003-08-07 |
Family
ID=7818405
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19758744A Expired - Fee Related DE19758744C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
| DE19758748A Revoked DE19758748C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
| DE19758745A Expired - Fee Related DE19758745C5 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
| DE19758746A Expired - Fee Related DE19758746C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
| DE1997102753 Expired - Fee Related DE19702753C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19758748A Revoked DE19758748C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
| DE19758745A Expired - Fee Related DE19758745C5 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
| DE19758746A Expired - Fee Related DE19758746C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
| DE1997102753 Expired - Fee Related DE19702753C2 (en) | 1997-01-27 | 1997-01-27 | Laser Scanning Microscope |
Country Status (1)
| Country | Link |
|---|---|
| DE (5) | DE19758744C2 (en) |
Cited By (1)
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0283256A2 (en) * | 1987-03-18 | 1988-09-21 | Tektronix Inc. | Scanning optical microscope |
| WO1990000754A1 (en) * | 1988-07-13 | 1990-01-25 | Martin Russell Harris | Scanning confocal microscope |
| US5081350A (en) * | 1989-09-22 | 1992-01-14 | Fuji Photo Film Co., Ltd. | Scanning microscope and scanning mechanism for the same |
| DE4128506A1 (en) * | 1991-08-28 | 1993-03-04 | Zeiss Carl Fa | Operating spectrometer beyond optics correction range - by adjusting optics spacings to maintain optimal sensitivity |
| US5216484A (en) * | 1991-12-09 | 1993-06-01 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Real-time imaging spectrometer |
| US5283433A (en) * | 1992-10-05 | 1994-02-01 | The Regents Of The University Of California | Scanning confocal microscope providing a continuous display |
| DE4323129A1 (en) * | 1992-07-24 | 1994-02-03 | Zeiss Carl Fa | Microscope with laser illumination - has laser beam input via conventional light inlet and slider with mirror for deflecting light to objective |
| US5317379A (en) * | 1992-02-11 | 1994-05-31 | Rosemount Analytical Inc. | Chemical species optical analyzer with multiple fiber channels |
| US5377003A (en) * | 1992-03-06 | 1994-12-27 | The United States Of America As Represented By The Department Of Health And Human Services | Spectroscopic imaging device employing imaging quality spectral filters |
| US5444528A (en) * | 1994-07-27 | 1995-08-22 | The Titan Corporation | Tunable spectrometer with acousto-optical tunable filter |
| DE19517670A1 (en) * | 1994-06-15 | 1995-12-21 | Zeiss Carl Fa | Surgical microscope mounted laser adaptor appts. |
| DE4446185A1 (en) * | 1994-08-25 | 1996-02-29 | Leica Lasertechnik | Device for coupling the light beam from a UV laser into a laser scanning microscope |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8700612A (en) * | 1987-03-13 | 1988-10-03 | Tno | CONFOCAL LASER SCANNING MICROSCOPE. |
| JP2625330B2 (en) * | 1992-09-30 | 1997-07-02 | 浜松ホトニクス株式会社 | Pinhole position control method for confocal optical system and its control device |
| DE19533092A1 (en) * | 1995-09-07 | 1997-03-13 | Basf Ag | Device for parallelized two-photon fluorescence correlation spectroscopy (TPA-FCS) and its use for drug screening |
-
1997
- 1997-01-27 DE DE19758744A patent/DE19758744C2/en not_active Expired - Fee Related
- 1997-01-27 DE DE19758748A patent/DE19758748C2/en not_active Revoked
- 1997-01-27 DE DE19758745A patent/DE19758745C5/en not_active Expired - Fee Related
- 1997-01-27 DE DE19758746A patent/DE19758746C2/en not_active Expired - Fee Related
- 1997-01-27 DE DE1997102753 patent/DE19702753C2/en not_active Expired - Fee Related
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0283256A2 (en) * | 1987-03-18 | 1988-09-21 | Tektronix Inc. | Scanning optical microscope |
| WO1990000754A1 (en) * | 1988-07-13 | 1990-01-25 | Martin Russell Harris | Scanning confocal microscope |
| US5081350A (en) * | 1989-09-22 | 1992-01-14 | Fuji Photo Film Co., Ltd. | Scanning microscope and scanning mechanism for the same |
| DE4128506A1 (en) * | 1991-08-28 | 1993-03-04 | Zeiss Carl Fa | Operating spectrometer beyond optics correction range - by adjusting optics spacings to maintain optimal sensitivity |
| US5216484A (en) * | 1991-12-09 | 1993-06-01 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Real-time imaging spectrometer |
| US5317379A (en) * | 1992-02-11 | 1994-05-31 | Rosemount Analytical Inc. | Chemical species optical analyzer with multiple fiber channels |
| US5377003A (en) * | 1992-03-06 | 1994-12-27 | The United States Of America As Represented By The Department Of Health And Human Services | Spectroscopic imaging device employing imaging quality spectral filters |
| DE4323129A1 (en) * | 1992-07-24 | 1994-02-03 | Zeiss Carl Fa | Microscope with laser illumination - has laser beam input via conventional light inlet and slider with mirror for deflecting light to objective |
| US5283433A (en) * | 1992-10-05 | 1994-02-01 | The Regents Of The University Of California | Scanning confocal microscope providing a continuous display |
| DE19517670A1 (en) * | 1994-06-15 | 1995-12-21 | Zeiss Carl Fa | Surgical microscope mounted laser adaptor appts. |
| US5444528A (en) * | 1994-07-27 | 1995-08-22 | The Titan Corporation | Tunable spectrometer with acousto-optical tunable filter |
| DE4446185A1 (en) * | 1994-08-25 | 1996-02-29 | Leica Lasertechnik | Device for coupling the light beam from a UV laser into a laser scanning microscope |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007047187A1 (en) | 2007-10-02 | 2009-04-09 | Carl Zeiss Sms Gmbh | Imaging and mask-inspection system for e.g. determining amount of energy delivered by illumination source, has control unit generating signals to control illumination source and/or correction value for image evaluation of imaging beam |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19702753C2 (en) | 2003-04-10 |
| DE19702753A1 (en) | 1998-07-30 |
| DE19758745C5 (en) | 2008-09-25 |
| DE19758748C2 (en) | 2003-07-31 |
| DE19758746C2 (en) | 2003-07-31 |
| DE19758745C2 (en) | 2003-08-14 |
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