DE19758748C2 - Laser Scanning Microscope - Google Patents

Laser Scanning Microscope

Info

Publication number
DE19758748C2
DE19758748C2 DE19758748A DE19758748A DE19758748C2 DE 19758748 C2 DE19758748 C2 DE 19758748C2 DE 19758748 A DE19758748 A DE 19758748A DE 19758748 A DE19758748 A DE 19758748A DE 19758748 C2 DE19758748 C2 DE 19758748C2
Authority
DE
Germany
Prior art keywords
laser
light
light guide
optics
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE19758748A
Other languages
German (de)
Inventor
Guenter Schoeppe
Stefan Wilhelm
Ulrich Simon
Hartmut Heinz
Bernhard Groebler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to DE1997102753 priority Critical patent/DE19702753C2/en
Application granted granted Critical
Publication of DE19758748C2 publication Critical patent/DE19758748C2/en
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7818405&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE19758748(C2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes

Abstract

Laser scanning microscope, DOLLAR A with a UV laser and a light guide connected downstream of the UV laser for transmitting the UV laser light to a sample to be examined, the UV light to be kept away from the light guide (14.1) being steerable into a light trap and used as a modulation means AOTF (AcoustoOpticalTunableFilter) (32) is provided, which deflects the UV light to be kept away from the light guide (14.1) into the light trap and controls the UV light to be fed into the light guide (14.1) to a constant intensity.

Description

State of the art

In the Handbook of Biological Confocal Microscopy, Second Edition (James B. Pawley), Plenum Press New York and London 1995 on page 519, Fig. 6 a fiber coupling optics is described.

On page 595, Fig. 14, a telecentric system for multiple detection beam paths is described.

US 5283433 shows a coupling optics for Detection beam paths.

DE 43 23 129 A1 describes in column 6 centerable confocal diaphragms which can be varied in terms of their diameter. US 5444528, US 5377003, US 5317379, US 5216484 describe the mode of action of an AOTF.

US 5081350, EP 283256 A2, WO 90/00754 A1 describe one Fiber connection between laser and scanning unit.

EP 283256 A2 describes a microscope with scanning fiber described in which an optic on the output side of the fiber is attached to the light in a point of light converge. To monitor the laser power is a Monitor diode provided.

In a laser scanning microscope, the illumination side irradiated several wavelengths and also several Wavelength bands detected.

DE 44 46 185 A1 describes the coupling of a UV Using laser beam into an optical fiber magneto-optical, mechanical or electro-optical Closure means.

The object of the invention is to couple a UV Simplify laser beam in a laser scanning microscope and at the same time to ensure the stability of the excitation.  

The task is performed using a laser scanning microscope Preamble of claim 1 by the characterizing Features resolved.

Representation of the mode of operation and advantages of the solution according to the invention on the basis of the exemplary embodiments according to the schematic representations FIGS. 1-6:

Show it:

Fig. 1 shows a modular arrangement of microscope M, scan head S and laser unit

Fig. 2 is an illustration of the beam path in the scan head S

Fig. 3, the optical effect of the displaceable collimating optics 16

Fig. 4 shows the optical effect of the pinholes displaceable in the direction of the optical axis

Figure 5 shows the optical effect of the vertically displaceable to the optical axis pinholes at different reflecting beam splitters.

Fig. 6 scan head S. microscope M and a fiber behind the pinhole in the detection beam path

  • 1. A microscope unit M and a scan head S are shown schematically in FIG. 1, which have a common optical interface via an intermediate image Z according to FIG. 2.
    The scan head S can be connected both to the phototube of an upright microscope and advantageously also to a side outlet of an inverted microscope. In Fig. 1 a switchable between Auflichtscan and transmitted light scanning mitttels a pivotable mirror 14 microscopic beam path is shown, with the light source 1, the illumination optics 2, beam splitter 3, lens 4, sample 5, the condenser 5, the light source 7, receiver arrangement 8, a first tube lens 9, an observation beam path with a second tube lens 10 and an eyepiece 11 and a beam splitter for coupling the scanning beam.
    A laser module 13.1 , 13.2 receives the lasers and is connected to the laser coupling unit of the scan head S via optical fibers 14.1 , 14.2 .
    The optical fibers 14.1 , 14.2 are coupled in by means of displaceable collimation optics 16 , which will be discussed in more detail below, and beam deflection elements 17.1 , 17.2 .
    By means of a partially transparent mirror 18 , a monitoring beam path in the direction of a monitor diode 19 , which is advantageously arranged upstream of a line filter 21 and a neutral filter 20 , which is advantageously arranged on a rotatable filter wheel, not shown.
    The actual scanning unit consists of scanning objective 22 , scanner 23 , main beam splitter 24 and a common imaging optics 25 for detection channels 26.1-26.4 .
    A deflecting prism 27 behind the imaging optics 25 reflects the radiation coming from the object 5 in the direction of the dichroic beam guide 28 in the convergent beam path of the imaging optics 25 , the pinholes 29 which can be adjusted in the direction and perpendicular to the optical axis and whose diameter can be changed, individually for each detection channel and emission filter 30 and suitable receiver elements 31 (PMT, photomultiplier) are arranged downstream.
    The beam splitters 27 , 28 can advantageously, as shown schematically in FIG. 5, be designed as a dividing wheel with a plurality of positions, which can be switched over by stepper motors.
  • 2. Advantageously, UV radiation is coupled into glass fiber 14.1 , preferably a single-mode glass fiber using an AOTF Acousto Optical Tunable Filter, as a beam deflector, ie if the radiation is not supposed to fall on the fiber input, it is transmitted from the fiber input by means of the AOTF , for example in the direction of a light trap, not shown.
    The coupling optics 33 for coupling the laser radiation have lens systems, not shown, for coupling, the focal length of which is determined by the beam cross section of the laser and the numerical aperture required for the optimum coupling.
    In the laser module 13.2 , single and multi-wavelength lasers are provided, which are coupled individually or together via an AOTF into one or more fibers.
    Furthermore, the coupling can also take place simultaneously via a plurality of fibers, the radiation of which is mixed on the microscope side after passing through a matching lens by color combiners.
    Mixing of the radiation from different lasers at the fiber input is also possible and can be carried out using the schematically illustrated, replaceable and switchable splitter mirror 39 .
  • 3. The laser radiation emerging from the fiber end of the fibers 14.1 , 2 at the scanning unit S in FIGS . 2 and 3 is collimated to an infinity beam by means of the collimation optics 16 .
    This is advantageously done with a single lens, which has a focusing function by displacement along the optical axis by means of a control unit 37 which can be controlled via a central control unit 34 , in that its distance from the end of the optical fiber 14.1 , 2 on the scanning unit can be changed according to the invention.
    The effect of the displacement of the collimation optics 16 is shown schematically in FIGS . 3a and 3b.
    In Fig. 3a, the beam path for two different wavelengths, λ1, λ2 shown. Since for a polychromatic light source by means of a fixed imaging optics in an image plane is only imaged for a medium wavelength of the spectral range, the distance between the fiber end and the collimation optics is changed by means of the control unit 37 . The lens positions S1, S2 result for the two illustrated wavelengths in order to ensure the same focus position for both wavelengths.
    This advantageously has the effect that, in the case of fluorescence microscopy, the fluorescence radiation arises in the focus of the objective 4 set to infinity and the excitation radiation is focused in the same plane. Several fibers and fiber collimators can also be used to set different chromatic compensations for different excitation wavelengths.
    Furthermore, a chromatic correction of the optics used, in particular of the microscope objectives, can take place in this way. Different chromatic compensations can be set independently using several coupling fibers and collimation optics for different wavelengths.
    The variable collimation by displacement of the lens 16 can also be used for realizing a z-scans by the z-direction is displaced by means of the displaceable collimator lens 16, the focus in the specimen in an optical section and after the other is detected. This is shown in FIG. 3b for a wavelength λ, the positions S1, S2 corresponding to the focus positions F1, F2.
  • 4. In FIG. 2, a monitor diode 19 (which may also have a front focusing lens, not shown here) is used in conjunction with a line- or area-selective filter wheel or filter slide 21 , controlled by a control unit 36 , for permanent monitoring of the scan module Coupled laser radiation, in particular to control the power in a certain laser line in isolation and, if necessary, to stabilize it by means of a control signal from the control unit 34. The detection by means of the monitor diode 19 detects the laser noise and variations due to the mechanical-optical transmission system.
    An error signal can be derived from the detected instantaneous laser power, which has an on-line effect directly on the laser or an intensity modulator (ASOM, AOTF, EOM, shutter) connected downstream of the laser for the purpose of stabilizing the laser power radiated into the scan module.
    By activating the filter unit 21 , wavelength stabilization of the intensity and laser power control can thus take place.
    A connection to the detection 31 (PMT) and in each case to the central control unit can be used to reduce the noise by forming signal quotients / or signal subtraction of the detection signal and the monitor signal of the diode 19 , in that the corresponding sensor signal of a detection channel is pixel-by-pixel as pixel image information on the signal of the Monitor diode is normalized (e.g. division) in order to reduce fluctuations in intensity in the image.
  • 5. In FIG. 1, pinholes 29 in the detection channels 26.1-26.4 are shown schematically in various ways. In particular, they can be arranged to be displaceable perpendicular to the optical axis or in the direction of the optical axis, and their diameter can be changed in a known manner, for example by means of a scissor mechanism or a cat's eye. The adjustment of the pinhole diameter allows them to be adapted to the diameter of the Airy discs at different observation wavelengths.
    In Figs. 4 and 5 drive means 38 are shown schematically for the adjustment or shifting of the individual pinholes, the data lines have to the central control unit 34th
    The controllable displaceability of the pinholes in the direction of the optical axis is shown schematically in FIG. 4. It is advantageous for the compensation of optical errors, in particular chromatic longitudinal aberrations. These errors can occur with the scan lens 22 , but also, for example, with the imaging optics 25 common to the detection channels.
    For different wavelengths λ1, λ2, chromatic longitudinal deviations result in different focus positions, which correspond to different pinhole positions P1, P2. When imaging optics are replaced, for example the microscope objective, if the chromatic longitudinal error of the optics used is known, the pinholes can be automatically displaced along the optical axis via the control unit 34 and control and displacement means 38 . An exact setting can be made to the excitation wavelength used.
    By means of a common imaging optics 25 for all detection channels, which advantageously consists of only one optical element, the image generated by the scanning objective 22 and lying in infinity is imaged in the pinhole plane. The common imaging optics 25 bring about an improved transmission efficiency compared to known solutions. In cooperation with the imaging optics with individually adjustable pinholes in the individual detection channels, an exact adjustment can nevertheless be carried out.
  • 6. Different dichroic beam splitters 28 can be used in the beam path, depending on the wavelength used, in order to block only these and feed them to a detection beam path. Partial revolvers or part wheels (not shown) are therefore provided in different beam paths for pivoting in different, as small as possible dividers, in particular parting wheels, whose wheel axis is inclined at 45 degrees to the optical axis, so that the dividers are only ever shifted in the reflection plane. Since the dividers 28 attached to the divider wheels cannot be adjusted exactly the same or fluctuations within their adjustment or standard wedge tolerances can cause different beam deflection angles, as shown in FIG. 5, the respective pinhole is shifted via control unit 38 perpendicular to the optical axis in accordance with FIG beam deflection. Here, two different positions of dividers 28.1 , 28.2 are shown schematically on a divider wheel, not shown, driven by a control unit 36 , which cause focus positions in the plane of the pinholes 29 that are displaced perpendicular to the optical axis.
    Here, by means of the control unit 34 via the control units 36, 38 coupling the position of the pinhole 29 be made with the Teilerradstellung for the divider 28, that is for all different configurations divider divider turret is stored optimum Pinholeposiition and retrievable.
    This affects not only the position of a certain divider wheel, but also the position of several divider wheels, so that the optimal pinhole position is always set automatically.
  • 7. FIG. 6 schematically shows how an optical fiber 40 can be attached to the pinhole 29 , at the exit to the PMT behind the pinhole, in order to guide the radiation through the pinhole of the detection channel to an external sensor 31 .
    This is advantageously done without additional coupling optics close behind the pinhole with the aid of the optical fiber 38 .
    Since the pinhole opening is adjustable, the exchange of fibers with different core diameters is greatly simplified by adapting the pinhole size to the core diameter.
List of the reference numerals used

M microscope
S scan head

1

light source

2

illumination optics

3

beamsplitter

4

lens

5

sample

6

condenser

7

light source

8th

receiver

9

tube lens

10

tube lens

11

eyepiece

12

beamsplitter

13.1

.

13.2

laser

14

optical fibers

15

swiveling mirror

16

collimating optics

17

beam deflection

18

semi-transparent mirror

19

monitor diode

20

neutral density filters

21

line filter

22

scanning objective

23

scanner

24

Main beam splitter

25

imaging optics

26.1-26.4

detection channels

27

deflecting prism

28

.

28.1

.

28.2

dichroic beam splitter

29

adjustable pinholes

30

emission filter

31

PMT (photomultiplier)

32

AOTF (Acousto Optical Tunable Filter)

33

coupling optics

34

central control unit

35

.

36

.

37

.

38

local control units for diode

19

. filter changer

21

. collimator optics

16

, adjustable pinholes

29

39

beamsplitter

40

optical fiber
S1, S2, F1, F2 focus positions
P1, P2 pinhole positions

Claims (1)

  1. Laser scanning microscope,
    with a UV laser and a light guide downstream of the UV laser for transmitting the UW laser light to a sample to be examined
    and with modulation means in front of the light guide, which couple the UW laser light into the light guide only for a desired period of time and keep it away from the light guide outside this period,
    characterized by
    that the UV laser light to be kept away from the light guide (14: 1) can be steered into a light trap
    and that the modulation means are designed as AOTF (Acousto Optical Tunable Filters) ( 32 ) which deflects the UW laser light to be kept away from the light guide ( 14.1 ) into the light trap
    and controls the UV laser light to be fed into the light guide ( 14.1 ) to a constant intensity.
DE19758748A 1997-01-27 1997-01-27 Laser Scanning Microscope Revoked DE19758748C2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE1997102753 DE19702753C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope

Publications (1)

Publication Number Publication Date
DE19758748C2 true DE19758748C2 (en) 2003-07-31

Family

ID=7818405

Family Applications (5)

Application Number Title Priority Date Filing Date
DE19758745A Expired - Fee Related DE19758745C5 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope
DE19758748A Revoked DE19758748C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope
DE19758744A Expired - Fee Related DE19758744C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope
DE1997102753 Expired - Fee Related DE19702753C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope
DE19758746A Expired - Fee Related DE19758746C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19758745A Expired - Fee Related DE19758745C5 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope

Family Applications After (3)

Application Number Title Priority Date Filing Date
DE19758744A Expired - Fee Related DE19758744C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope
DE1997102753 Expired - Fee Related DE19702753C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope
DE19758746A Expired - Fee Related DE19758746C2 (en) 1997-01-27 1997-01-27 Laser Scanning Microscope

Country Status (1)

Country Link
DE (5) DE19758745C5 (en)

Families Citing this family (107)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19835070B4 (en) * 1998-08-04 2006-03-16 Carl Zeiss Jena Gmbh Arrangement for adjustable wavelength-dependent detection in a fluorescence microscope
DE19936573A1 (en) 1998-12-22 2001-02-08 Zeiss Carl Jena Gmbh Arrangement for the separation of excitation and emission light in a microscope
DE19919091C2 (en) * 1999-04-27 2002-01-17 Zeiss Carl Jena Gmbh Arrangement for setting the laser power and / or the pulse length of a short-pulse laser in a microscope
DE19949272C2 (en) * 1999-10-12 2003-09-11 Leica Microsystems Scanning microscope
DE19951480A1 (en) * 1999-10-26 2001-05-03 Zeiss Carl Jena Gmbh Divider changer in a laser scanning microscope and method for correcting tolerance errors
DE19951482C2 (en) 1999-10-26 2003-01-09 Zeiss Carl Jena Gmbh Fluorescence microscope
US6423960B1 (en) * 1999-12-31 2002-07-23 Leica Microsystems Heidelberg Gmbh Method and system for processing scan-data from a confocal microscope
DE50108370D1 (en) * 2000-06-17 2006-01-19 Leica Microsystems Arrangement for examining microscopic specimens with a scanning microscope
US6898367B2 (en) 2000-06-17 2005-05-24 Leica Microsystems Heidelberg Gmbh Method and instrument for microscopy
DE20122783U1 (en) * 2000-06-17 2007-11-15 Leica Microsystems Cms Gmbh Arrangement for examining microscopic specimens with a scanning microscope and illumination device for a scanning microscope
DE20122791U1 (en) * 2000-06-17 2007-11-29 Leica Microsystems Cms Gmbh Scanning microscope
DE20122782U1 (en) * 2000-06-17 2007-11-15 Leica Microsystems Cms Gmbh Lighting device
DE10115488A1 (en) * 2000-06-17 2001-12-20 Leica Microsystems Arrangement for investigating microscopic preparations, has optical component between scanning laser and imaging optical arrangement to spectrally expand laser light during single pass
EP1164402B1 (en) * 2000-06-17 2010-04-28 Leica Microsystems CMS GmbH Scanning microscope with multiband illumination and optical element for a scanning microsscope with multiband illumination
DE10029680B4 (en) * 2000-06-23 2016-06-16 Leica Microsystems Cms Gmbh The microscope assemblage
DE10033269B4 (en) * 2000-07-10 2010-07-01 Leica Microsystems Cms Gmbh Device for coupling light of at least one wavelength of a laser light source into a confocal scanning microscope
DE10038526B4 (en) * 2000-08-08 2004-09-02 Carl Zeiss Jena Gmbh Method and arrangement for recording the wavelength-dependent behavior of an illuminated sample
DE10125469B4 (en) 2001-05-25 2008-01-10 Leica Microsystems Cms Gmbh Device for determining a light output, microscope and method for microscopy
DE10142945B4 (en) * 2001-09-01 2004-07-29 Leica Microsystems Heidelberg Gmbh Device for determining a light output and microscope
DE10151217B4 (en) * 2001-10-16 2012-05-16 Carl Zeiss Microlmaging Gmbh Method for operating a laser scanning microscope
DE10156506C1 (en) * 2001-11-16 2003-05-22 Leica Microsystems Multi-color image forming method and microscope
US6888148B2 (en) * 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
US6947127B2 (en) 2001-12-10 2005-09-20 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and/or back scattered light beam in a sample
DE10217545A1 (en) 2002-04-17 2003-11-06 Zeiss Carl Jena Gmbh Microscope with position detection of changers of optical elements
DE10217544A1 (en) * 2002-04-17 2003-11-06 Zeiss Carl Jena Gmbh Laser scanning microscope with collimator and / or pinhole optics
DE10222779A1 (en) 2002-05-16 2004-03-04 Carl Zeiss Jena Gmbh Method and arrangement for examining samples
DE10231667A1 (en) * 2002-07-12 2004-01-22 Olympus Biosystems Gmbh Lighting device and optical object inspection device
DE10241472B4 (en) 2002-09-04 2019-04-11 Carl Zeiss Microscopy Gmbh Method and arrangement for the adjustable change of illumination light and / or sample light with respect to its spectral composition and / or intensity
DE10302259B3 (en) 2003-01-22 2004-06-03 Leica Microsystems Heidelberg Gmbh Confocal scanning microscope has acousto-optical component for directing partial beam obtained from illumination beam onto monitoring detector for illumination intensity regulation
DE10323921A1 (en) * 2003-05-22 2004-12-16 Carl Zeiss Jena Gmbh Adjustable pinhole, especially for a laser scanning microscope
DE10324478B3 (en) 2003-05-30 2004-12-09 Leica Microsystems Heidelberg Gmbh Device for determining the light output of a light beam and scanning microscope
DE10332062A1 (en) 2003-07-11 2005-01-27 Carl Zeiss Jena Gmbh Arrangement in the illumination beam path of a laser scanning microscope
DE10332073A1 (en) 2003-07-11 2005-02-10 Carl Zeiss Jena Gmbh Arrangement for the optical detection of light radiation with double objective arrangement excited and / or backscattered in a sample
DE10332064A1 (en) 2003-07-11 2005-01-27 Carl Zeiss Jena Gmbh Arrangement for detecting the illumination radiation in a laser scanning microscope
DE10332063A1 (en) * 2003-07-11 2005-01-27 Carl Zeiss Jena Gmbh Laser Scanning Microscope
DE10331906B4 (en) * 2003-07-15 2005-06-16 Leica Microsystems Heidelberg Gmbh Light source with a microstructured optical element and microscope with light source
DE10357584B4 (en) * 2003-12-08 2006-06-14 Leica Microsystems Cms Gmbh Method for separating different emission wavelengths in a scanning microscope
DE10359734A1 (en) 2003-12-19 2005-08-11 Carl Zeiss Jena Gmbh Method for scanner control in at least one scan axis in a laser scanning microscope
DE102004034975A1 (en) 2004-07-16 2006-02-16 Carl Zeiss Jena Gmbh Method for acquiring images of a sample with a microscope
DE102004034951A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Method for the image capture of objects by means of a light scanning microscope with line-shaped scanning
DE102004034987A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Scanning microscope and use
DE102004034959A1 (en) 2004-07-16 2006-02-16 Carl Zeiss Jena Gmbh Scanning microscope with point-shaped light source distribution and use
DE102004034977A1 (en) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Scanning microscope and use
DE102004034990A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Zoom optics for a light scanning microscope with linear scanning and use
DE102004034976A1 (en) 2004-07-16 2006-02-16 Carl Zeiss Jena Gmbh Scanning microscope and use
DE102004034970A1 (en) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Scanning microscope and use
DE102004034991A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Zoom optics for a light scanning microscope
DE102004034971A1 (en) * 2004-07-16 2006-02-09 Carl Zeiss Jena Gmbh Scanning microscope with linear scanning and use
DE102004034979A1 (en) 2004-07-16 2006-02-16 Carl Zeiss Jena Gmbh Method for detecting at least one sample area using a light-scanning microscope with punctiform light source distribution
DE102004034962A1 (en) 2004-07-16 2006-02-16 Carl Zeiss Jena Gmbh Microscope with increased resolution
DE102004034956A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Method for detecting at least one sample area with a light scanning microscope with linear scanning
DE102004034954A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Method for detecting at least one sample area with a light scanning microscope
DE102004034988A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Scanning microscope and use
DE102004034996A1 (en) 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Scanning microscope with linear scan
JP4800655B2 (en) 2005-04-01 2011-10-26 オリンパス株式会社 Light measuring device
DE102005020541A1 (en) * 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Laser Scanning Microscope
DE102005020543A1 (en) 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Method and device for adjustable change of light
US7485875B2 (en) 2005-07-22 2009-02-03 Carl Zeiss Microimaging Gmbh Resolution-enhanced luminescence microscopy
WO2007009812A1 (en) 2005-07-22 2007-01-25 Carl Zeiss Microimaging Gmbh Luminescence microscopy with enhanced resolution
DE102005046510A1 (en) 2005-09-29 2007-04-05 Leica Microsystems Cms Gmbh Microscope system for carrying out FCS measurements, comprises first light source whereby target light source is provided for marking FCS volume and light is directed over several optical elements in sample volume
DE102005047261A1 (en) 2005-10-01 2007-04-05 Carl Zeiss Jena Gmbh Display image production method, involves producing display image of display image sequence from subsequence of two recorded exposure images of exposure image sequence, where number of display images is less than number of exposure images
DE102006017705B4 (en) 2006-04-15 2010-01-07 Carl Zeiss Ag Spectral analysis unit with a diffraction grating and laser scanning microscope
DE102006027836B4 (en) 2006-06-16 2020-02-20 Carl Zeiss Microscopy Gmbh Microscope with auto focus device
DE102006034906A1 (en) 2006-07-28 2008-01-31 Carl Zeiss Microimaging Gmbh Laser scanning microscope operating method, involves bringing scanning field produced by light distributions on sample into cover, where sample is detected by using one of light distributions, and detecting reference sample
DE102006034907A1 (en) * 2006-07-28 2008-01-31 Carl Zeiss Microimaging Gmbh Laser Scanning Microscope
DE102006034908A1 (en) 2006-07-28 2008-01-31 Carl Zeiss Microimaging Gmbh Laser Scanning Microscope
DE102006034912A1 (en) * 2006-07-28 2008-01-31 Carl Zeiss Microimaging Gmbh Laser scanning microscope for fluorescence examination
DE102006040169A1 (en) * 2006-08-25 2008-02-28 Carl Zeiss Microimaging Gmbh Confocal scanning microscope with optical output and pinhole assembly for spatial filtering of a light beam
DE102006047911A1 (en) * 2006-10-06 2008-04-10 Carl Zeiss Microimaging Gmbh Arrangement for splitting detection light
EP1935498A1 (en) 2006-12-22 2008-06-25 Universität Leipzig Device and method for contactless manipulation and alignment of sample particles in a measurement volume with the aid of an inhomogeneous electrical alternating field
DE102007003134A1 (en) * 2007-01-18 2008-07-24 Carl Zeiss Microimaging Gmbh Laser scanning microscope and beam-blending optical assembly
DE102007009660A1 (en) 2007-02-21 2008-08-28 Carl Zeiss Microimaging Gmbh Confocal laser microscope
DE102007009659A1 (en) 2007-02-21 2008-08-28 Carl Zeiss Microimaging Gmbh Laser scanning microscope for use in biomedical application, has diode pumped solid state laser with frequency multiplication in continuous wave drive, and coupled into scan head of laser scanning microscope by monomode optical fiber
DE102007025821A1 (en) 2007-06-02 2008-12-04 Carl Zeiss Microimaging Gmbh Arrangement and method for timing the pulses of a short pulse laser
DE102007040238A1 (en) 2007-08-25 2009-03-05 Carl Zeiss Microimaging Gmbh Method for laser scanning microscopy and beam distributor
DE102007047467A1 (en) 2007-09-28 2009-04-02 Carl Zeiss Microimaging Gmbh Arrangement for the optical detection of light radiation excited and / or backscattered in a sample
DE102007047187A1 (en) 2007-10-02 2009-04-09 Carl Zeiss Sms Gmbh Imaging and mask-inspection system for e.g. determining amount of energy delivered by illumination source, has control unit generating signals to control illumination source and/or correction value for image evaluation of imaging beam
DE102007047183A1 (en) 2007-10-02 2009-04-09 Carl Zeiss Microimaging Gmbh Mirror staircase to unite multiple light sources and laser scanning microscope
KR20100087141A (en) 2007-10-31 2010-08-03 가부시키가이샤 니콘 Laser-exciting fluorescence microscope
DE102008007452A1 (en) 2008-01-31 2009-08-06 Carl Zeiss Microimaging Gmbh Laser scanning microscope and assembly for non-descanned detection
DE102008028707A1 (en) 2008-06-17 2009-12-24 Carl Zeiss Microimaging Gmbh Laser scanning microscope with a laser diode
DE102008038467A1 (en) 2008-08-21 2010-02-25 Carl Zeiss Microlmaging Gmbh Image evaluation and/or sample i.e. cells, manipulation method for use in e.g. laser scanning microscope, involves changing image object planes as supreme image object planes till minimum or maximum or fixed value is obtained
DE102008055655A1 (en) 2008-10-29 2010-05-06 Carl Zeiss Microimaging Gmbh Laser source's dark signal adjusting method for laser scanning microscope, involves determining binary combination by intensity measurement of laser beam, where binary combination corresponds to minimum intensity at laser output
DE102009006729A1 (en) 2009-01-29 2010-08-05 Carl Zeiss Microimaging Gmbh Laser Scanning Microscope
DE202009007789U1 (en) 2009-06-03 2009-08-20 Carl Zeiss Microimaging Gmbh Broadband light source and microscope
DE102009034347A1 (en) 2009-07-23 2011-01-27 Carl Zeiss Microlmaging Gmbh Laser scanning microscope, has mirror supported in lens frame that is brought into lens revolver of microscope, and lens superordinate to mirror for focusing illumination light on to mirror in illumination direction
DE102009043747A1 (en) 2009-09-30 2011-03-31 Carl Zeiss Microlmaging Gmbh Method for generating a microscope image and microscope
DE102009048710B4 (en) * 2009-10-08 2020-04-02 Leica Microsystems Cms Gmbh Laser system for a microscope and method for operating a laser system for a microscope
DE102009049050B4 (en) * 2009-10-12 2011-07-21 Leica Microsystems CMS GmbH, 35578 Method and device for stabilizing a light output of an illumination light beam and microscope
DE102009050021B4 (en) 2009-10-16 2019-05-02 Carl Zeiss Microscopy Gmbh Microscope, in particular laser scanning microscope and operating method
EP3667391A1 (en) 2009-10-28 2020-06-17 Carl Zeiss Microscopy GmbH Microscopic method and microscope with improved resolution
DE102010018967A1 (en) 2010-04-29 2011-11-03 Carl Zeiss Microlmaging Gmbh Microscope, particularly laser scanning microscope, has laser for emission of light beam consisting of light pulses, where beam splitter is provided for division of light beam into two optical paths
DE102010033722A1 (en) 2010-08-07 2012-02-09 Carl Zeiss Microimaging Gmbh Method for eliminating unwanted radiation portions from light detected from illuminated sample by laser scanning microscope, involves passing acousto optical tunable filter through two pole components
DE102010055882A1 (en) 2010-12-22 2012-06-28 Carl Zeiss Microlmaging Gmbh Pinhole for a confocal laser scanning microscope
DE102011013614A1 (en) 2011-03-08 2012-09-13 Carl Zeiss Microimaging Gmbh Laser scanning microscope and method of its operation
JP5616824B2 (en) 2011-03-10 2014-10-29 オリンパス株式会社 Microscope equipment
DE102011104379A1 (en) 2011-06-18 2012-12-20 Carl Zeiss Microimaging Gmbh Confocal scanning microscope and method of operation thereof and method for manipulating a sample
DE102011109653A1 (en) 2011-08-06 2013-02-07 Carl Zeiss Microlmaging Gmbh Laser scanning microscope with a lighting array
DE102012010208A1 (en) 2012-05-15 2013-11-21 Carl Zeiss Microscopy Gmbh Microscope e.g. laser scanning microscope for modern cell biological research field, has main color divider and deflecting mirror that are arranged on common optical carrier or substrate for mechanical rigid connection
DE102012016346A1 (en) 2012-08-16 2014-05-28 Carl Zeiss Microscopy Gmbh laser scanning microscope
DE102014000473A1 (en) 2014-01-16 2015-07-16 Carl Zeiss Microscopy Gmbh Laser scanning microscope and amplifier module
DE102014002328A1 (en) 2014-02-12 2015-08-13 Carl Zeiss Microscopy Gmbh Multifocal fluorescence scanning microscope
DE102014009142A1 (en) 2014-06-20 2015-12-24 Carl Zeiss Microscopy Gmbh Method and device for controlling an acousto-optic component
DE102014010185A1 (en) 2014-07-09 2016-01-14 Carl Zeiss Microscopy Gmbh Method for operating a laser scanning microscope
DE102015107367A1 (en) 2015-05-11 2016-11-17 Carl Zeiss Ag Evaluation of Fluorescence Scanning Microscopy Signals Using a Confocal Laser Scanning Microscope
JP2017075947A (en) 2015-10-14 2017-04-20 アッベリオー インストラメンツ ゲーエムベーハーAbberior Instruments GmbH Scanner head and device with scanner head
DE102016116311A1 (en) * 2016-05-02 2017-11-02 Carl Zeiss Microscopy Gmbh Angle selective lighting

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0283256A2 (en) * 1987-03-18 1988-09-21 Tektronix Inc. Scanning optical microscope
WO1990000754A1 (en) * 1988-07-13 1990-01-25 Martin Russell Harris Scanning confocal microscope
US5081350A (en) * 1989-09-22 1992-01-14 Fuji Photo Film Co., Ltd. Scanning microscope and scanning mechanism for the same
DE4128506A1 (en) * 1991-08-28 1993-03-04 Zeiss Carl Fa Operating spectrometer beyond optics correction range - by adjusting optics spacings to maintain optimal sensitivity
US5216484A (en) * 1991-12-09 1993-06-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Real-time imaging spectrometer
US5283433A (en) * 1992-10-05 1994-02-01 The Regents Of The University Of California Scanning confocal microscope providing a continuous display
DE4323129A1 (en) * 1992-07-24 1994-02-03 Zeiss Carl Fa Microscope with laser illumination - has laser beam input via conventional light inlet and slider with mirror for deflecting light to objective
US5317379A (en) * 1992-02-11 1994-05-31 Rosemount Analytical Inc. Chemical species optical analyzer with multiple fiber channels
US5377003A (en) * 1992-03-06 1994-12-27 The United States Of America As Represented By The Department Of Health And Human Services Spectroscopic imaging device employing imaging quality spectral filters
US5444528A (en) * 1994-07-27 1995-08-22 The Titan Corporation Tunable spectrometer with acousto-optical tunable filter
DE19517670A1 (en) * 1994-06-15 1995-12-21 Zeiss Carl Fa Surgical microscope mounted laser adaptor appts.
DE4446185A1 (en) * 1994-08-25 1996-02-29 Leica Lasertechnik Device for coupling the light beam from a UV laser into a laser scanning microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8700612A (en) * 1987-03-13 1988-10-03 Tno Confocal laser scanning microscope.
JP2625330B2 (en) * 1992-09-30 1997-07-02 浜松ホトニクス株式会社 Pinhole position control method for confocal optical system and its control device
DE19533092A1 (en) * 1995-09-07 1997-03-13 Basf Ag Device for parallelized two-photon fluorescence correlation spectroscopy (TPA-FCS) and its use for drug screening

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0283256A2 (en) * 1987-03-18 1988-09-21 Tektronix Inc. Scanning optical microscope
WO1990000754A1 (en) * 1988-07-13 1990-01-25 Martin Russell Harris Scanning confocal microscope
US5081350A (en) * 1989-09-22 1992-01-14 Fuji Photo Film Co., Ltd. Scanning microscope and scanning mechanism for the same
DE4128506A1 (en) * 1991-08-28 1993-03-04 Zeiss Carl Fa Operating spectrometer beyond optics correction range - by adjusting optics spacings to maintain optimal sensitivity
US5216484A (en) * 1991-12-09 1993-06-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Real-time imaging spectrometer
US5317379A (en) * 1992-02-11 1994-05-31 Rosemount Analytical Inc. Chemical species optical analyzer with multiple fiber channels
US5377003A (en) * 1992-03-06 1994-12-27 The United States Of America As Represented By The Department Of Health And Human Services Spectroscopic imaging device employing imaging quality spectral filters
DE4323129A1 (en) * 1992-07-24 1994-02-03 Zeiss Carl Fa Microscope with laser illumination - has laser beam input via conventional light inlet and slider with mirror for deflecting light to objective
US5283433A (en) * 1992-10-05 1994-02-01 The Regents Of The University Of California Scanning confocal microscope providing a continuous display
DE19517670A1 (en) * 1994-06-15 1995-12-21 Zeiss Carl Fa Surgical microscope mounted laser adaptor appts.
US5444528A (en) * 1994-07-27 1995-08-22 The Titan Corporation Tunable spectrometer with acousto-optical tunable filter
DE4446185A1 (en) * 1994-08-25 1996-02-29 Leica Lasertechnik Device for coupling the light beam from a UV laser into a laser scanning microscope

Also Published As

Publication number Publication date
DE19702753C2 (en) 2003-04-10
DE19758744C2 (en) 2003-08-07
DE19702753A1 (en) 1998-07-30
DE19758745C2 (en) 2003-08-14
DE19758746C2 (en) 2003-07-31
DE19758745C5 (en) 2008-09-25

Similar Documents

Publication Publication Date Title
US9500849B2 (en) Microscope with a light sheet
US9134519B2 (en) Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope
US5535052A (en) Laser microscope
EP0746865B1 (en) Fluorescence imaging system employing a macro scanning objective
US6459484B1 (en) Scanning optical apparatus
US7330305B2 (en) Laser scanning confocal microscope with fibre bundle return
US6178041B1 (en) Device for coupling the radiation of short-pulse lasers in an optical beam path of a microscope
CA2829545C (en) Total internal reflection flourescence (tirf) microscopy across multiple wavelengths simultaneously
US5260578A (en) Confocal imaging system for visible and ultraviolet light
US6909542B2 (en) Laser microscope
US6396053B1 (en) Scanning optical microscope apparatus capable of detecting a plurality of flourescent light beams
US7009171B2 (en) Laser scanning microscope system and scanning unit applied to the system
EP0961945B1 (en) Light sensing device
US7223986B2 (en) Laser scanning microscope
US6654166B2 (en) Scanning microscope with multiband illumination and optical component for a scanning microscope with multiband illumination
EP1421427B1 (en) Optical arrangement and scan microscope
US7009161B2 (en) Scanning microscope
US8792162B2 (en) Microscope with illumination switching for capturing sample images during detector integration time
US7953308B2 (en) System and method for fiber optic bundle-based illumination for imaging system
US7480046B2 (en) Scanning microscope with evanescent wave illumination
US5646411A (en) Fluorescence imaging system compatible with macro and micro scanning objectives
JP4729269B2 (en) Laser scanning microscope
JP5307629B2 (en) Scanning microscope equipment
DE19835070B4 (en) Arrangement for adjustable wavelength-dependent detection in a fluorescence microscope
US8848268B2 (en) Microscope with light sheet illumination

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8170 Reinstatement of the former position
AC Divided out of

Ref document number: 19702753

Country of ref document: DE

Kind code of ref document: P

8304 Grant after examination procedure
8363 Opposition against the patent
8331 Complete revocation