DE19758452A1 - Verfahren zum Herstellen eines Metall-Keramik-Substrates sowie Metall Keramik-Substrat - Google Patents
Verfahren zum Herstellen eines Metall-Keramik-Substrates sowie Metall Keramik-SubstratInfo
- Publication number
- DE19758452A1 DE19758452A1 DE19758452A DE19758452A DE19758452A1 DE 19758452 A1 DE19758452 A1 DE 19758452A1 DE 19758452 A DE19758452 A DE 19758452A DE 19758452 A DE19758452 A DE 19758452A DE 19758452 A1 DE19758452 A1 DE 19758452A1
- Authority
- DE
- Germany
- Prior art keywords
- metallization
- paste
- ceramic layer
- substrate
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 44
- 239000000758 substrate Substances 0.000 title claims abstract description 41
- 238000001465 metallisation Methods 0.000 claims abstract description 76
- 238000000034 method Methods 0.000 claims abstract description 60
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052802 copper Inorganic materials 0.000 claims abstract description 15
- 239000010949 copper Substances 0.000 claims abstract description 15
- 239000011889 copper foil Substances 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 239000010408 film Substances 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 6
- 239000011572 manganese Substances 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 238000007747 plating Methods 0.000 claims description 2
- 238000005476 soldering Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract description 38
- 239000011229 interlayer Substances 0.000 abstract 1
- 239000004020 conductor Substances 0.000 description 4
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0058—Laminating printed circuit boards onto other substrates, e.g. metallic substrates
- H05K3/0061—Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a metallic substrate, e.g. a heat sink
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
- H01L21/4839—Assembly of a flat lead with an insulating support, e.g. for TAB
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4867—Applying pastes or inks, e.g. screen printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4061—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in inorganic insulating substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4076—Through-connections; Vertical interconnect access [VIA] connections by thin-film techniques
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0352—Differences between the conductors of different layers of a multilayer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0388—Other aspects of conductors
- H05K2201/0394—Conductor crossing over a hole in the substrate or a gap between two separate substrate parts
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/0969—Apertured conductors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09981—Metallised walls
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
- H05K3/0052—Depaneling, i.e. dividing a panel into circuit boards; Working of the edges of circuit boards
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Insulated Metal Substrates For Printed Circuits (AREA)
Description
- - Oxidieren eines Kupferbleches derart, daß sich eine gleichmäßige Kupferoxidschicht ergibt;
- - auflegen des Kupferbleches auf die Keramikschicht;
- - erhitzen des Verbundes auf beispielsweise ca. 1071°C;
- - abkühlen auf Raumtemperatur.
Auf eine oben liegende Seite der Keramikschicht 2, die beispielsweise eine Dicke von 0,2 bis 2 mm aufweist, wird eine Paste, die Molybdän (Mo), Mangan (Mn) oder Wolfram enthält als dünne Schicht oder als Dünnfilm mit einer Dicke von 0,005 bis 0,01 mm aufgebracht. Die Schicht wird dann getrocknet und in einer reduzierenden, d. h. wasserstoffhaltigen Atmosphäre bei einer Temperatur zwischen etwa 1200 bis 1300°C eingebrannt.
Claims (14)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19758452A DE19758452C2 (de) | 1997-03-01 | 1997-03-01 | Verfahren zum Herstellen eines Metall-Keramik-Substrates und Metall-Keramik-Substrat |
DE1997108363 DE19708363C1 (de) | 1997-03-01 | 1997-03-01 | Verfahren zum Herstellen eines Metall-Keramik-Substrats und Metall-Keramik-Substrat |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19758452A DE19758452C2 (de) | 1997-03-01 | 1997-03-01 | Verfahren zum Herstellen eines Metall-Keramik-Substrates und Metall-Keramik-Substrat |
DE1997108363 DE19708363C1 (de) | 1997-03-01 | 1997-03-01 | Verfahren zum Herstellen eines Metall-Keramik-Substrats und Metall-Keramik-Substrat |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19758452A1 true DE19758452A1 (de) | 1998-09-10 |
DE19758452C2 DE19758452C2 (de) | 2001-07-26 |
Family
ID=7821944
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19758452A Expired - Fee Related DE19758452C2 (de) | 1997-03-01 | 1997-03-01 | Verfahren zum Herstellen eines Metall-Keramik-Substrates und Metall-Keramik-Substrat |
DE19753148A Expired - Fee Related DE19753148C2 (de) | 1997-03-01 | 1997-11-29 | Verfahren zum Herstellen eines Metall-Keramik-Substrates und Metall-Keramik-Substrat |
DE59814422T Expired - Lifetime DE59814422D1 (de) | 1997-03-01 | 1998-02-19 | Verfahren zum Herstellen eines Metall-Keramik-Substrates |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19753148A Expired - Fee Related DE19753148C2 (de) | 1997-03-01 | 1997-11-29 | Verfahren zum Herstellen eines Metall-Keramik-Substrates und Metall-Keramik-Substrat |
DE59814422T Expired - Lifetime DE59814422D1 (de) | 1997-03-01 | 1998-02-19 | Verfahren zum Herstellen eines Metall-Keramik-Substrates |
Country Status (2)
Country | Link |
---|---|
AT (1) | ATE452424T1 (de) |
DE (3) | DE19758452C2 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1478216A1 (de) * | 2003-05-14 | 2004-11-17 | A.B. Mikroelektronik Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung einer Trägerplatte für elektrische Schaltungen |
EP1511165A2 (de) * | 2003-08-29 | 2005-03-02 | Rockwell Automation Technologies, Inc. | Mehrphasige Startvorrichtung zum Starten mit verminderter Spannung mit einem Bypass-Relais, einer elektrischen Isolierung zwischen den Phasen und einer gemeinsamen thermischen Masse |
DE102012212131A1 (de) * | 2012-07-11 | 2014-06-26 | Semikron Elektronik Gmbh & Co. Kg | Substrat und Verfahren zur Bruchvorbereitung eines Substrats für mindestens ein Leistungshalbleiterbauelement |
CN115028473A (zh) * | 2022-05-06 | 2022-09-09 | 深圳市吉迩技术有限公司 | 覆有金属涂层的多孔陶瓷的制备方法及气溶胶生成装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6583505B2 (en) | 2001-05-04 | 2003-06-24 | Ixys Corporation | Electrically isolated power device package |
DE10147890B4 (de) * | 2001-09-28 | 2006-09-28 | Infineon Technologies Ag | Verfahren zur Herstellung eines Substrats aus Keramikmaterial mit einer strukturierten Metallschicht und derartiges Substrat |
DE102010012457B4 (de) * | 2010-03-24 | 2015-07-30 | Semikron Elektronik Gmbh & Co. Kg | Schaltungsanordnung mit einer elektrischen Komponente und einer Verbundfolie |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3941814A1 (de) * | 1988-11-05 | 1991-06-20 | Semikron Elektronik Gmbh | Traegerkoerper zur elektrisch isolierten anordnung von bauteilen |
JPH045844A (ja) * | 1990-04-23 | 1992-01-09 | Nippon Mektron Ltd | Ic搭載用多層回路基板及びその製造法 |
DE4103294C2 (de) * | 1991-02-04 | 2000-12-28 | Altan Akyuerek | Verfahren zum Herstellen von keramischen Leiterplatten mit Durchkontaktierungen |
DE4318061C2 (de) * | 1993-06-01 | 1998-06-10 | Schulz Harder Juergen | Verfahren zum Herstellen eines Metall-Keramik-Substrates |
-
1997
- 1997-03-01 DE DE19758452A patent/DE19758452C2/de not_active Expired - Fee Related
- 1997-11-29 DE DE19753148A patent/DE19753148C2/de not_active Expired - Fee Related
-
1998
- 1998-02-19 AT AT98102845T patent/ATE452424T1/de active
- 1998-02-19 DE DE59814422T patent/DE59814422D1/de not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1478216A1 (de) * | 2003-05-14 | 2004-11-17 | A.B. Mikroelektronik Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung einer Trägerplatte für elektrische Schaltungen |
EP1511165A2 (de) * | 2003-08-29 | 2005-03-02 | Rockwell Automation Technologies, Inc. | Mehrphasige Startvorrichtung zum Starten mit verminderter Spannung mit einem Bypass-Relais, einer elektrischen Isolierung zwischen den Phasen und einer gemeinsamen thermischen Masse |
EP1511165A3 (de) * | 2003-08-29 | 2007-10-10 | Rockwell Automation Technologies, Inc. | Mehrphasige Startvorrichtung zum Starten mit verminderter Spannung mit einem Bypass-Relais, einer elektrischen Isolierung zwischen den Phasen und einer gemeinsamen thermischen Masse |
DE102012212131A1 (de) * | 2012-07-11 | 2014-06-26 | Semikron Elektronik Gmbh & Co. Kg | Substrat und Verfahren zur Bruchvorbereitung eines Substrats für mindestens ein Leistungshalbleiterbauelement |
CN115028473A (zh) * | 2022-05-06 | 2022-09-09 | 深圳市吉迩技术有限公司 | 覆有金属涂层的多孔陶瓷的制备方法及气溶胶生成装置 |
CN115028473B (zh) * | 2022-05-06 | 2024-02-09 | 深圳市吉迩技术有限公司 | 覆有金属涂层的多孔陶瓷的制备方法及气溶胶生成装置 |
Also Published As
Publication number | Publication date |
---|---|
ATE452424T1 (de) | 2010-01-15 |
DE19758452C2 (de) | 2001-07-26 |
DE19753148A1 (de) | 1999-07-15 |
DE19753148C2 (de) | 2002-10-24 |
DE59814422D1 (de) | 2010-01-28 |
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