DE1939676B2 - Kontaktsonde mit selbstausrichtung - Google Patents

Kontaktsonde mit selbstausrichtung

Info

Publication number
DE1939676B2
DE1939676B2 DE19691939676 DE1939676A DE1939676B2 DE 1939676 B2 DE1939676 B2 DE 1939676B2 DE 19691939676 DE19691939676 DE 19691939676 DE 1939676 A DE1939676 A DE 1939676A DE 1939676 B2 DE1939676 B2 DE 1939676B2
Authority
DE
Germany
Prior art keywords
self
contact probe
alignment contact
alignment
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19691939676
Other languages
English (en)
Other versions
DE1939676A1 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE1939676A1 publication Critical patent/DE1939676A1/de
Publication of DE1939676B2 publication Critical patent/DE1939676B2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/32—Self-aligning contacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
DE19691939676 1968-09-28 1969-08-05 Kontaktsonde mit selbstausrichtung Withdrawn DE1939676B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US755868A US3609539A (en) 1968-09-28 1968-09-28 Self-aligning kelvin probe

Publications (2)

Publication Number Publication Date
DE1939676A1 DE1939676A1 (de) 1970-08-13
DE1939676B2 true DE1939676B2 (de) 1971-03-04

Family

ID=25041004

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691939676 Withdrawn DE1939676B2 (de) 1968-09-28 1969-08-05 Kontaktsonde mit selbstausrichtung

Country Status (5)

Country Link
US (1) US3609539A (de)
JP (1) JPS477418B1 (de)
DE (1) DE1939676B2 (de)
FR (1) FR2016478A1 (de)
GB (1) GB1275948A (de)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3992073A (en) * 1975-11-24 1976-11-16 Technical Wire Products, Inc. Multi-conductor probe
US4214201A (en) * 1978-02-24 1980-07-22 Teradyne, Inc. Integrated circuit testing probe
DE3628104A1 (de) * 1986-08-19 1988-02-25 Feinmetall Gmbh Kontaktelement fuer pruefkarten
EP0382868B1 (de) * 1989-02-16 1993-01-27 MANIA GmbH & Co. Schaltung zum Messen von Widerständen von Prüflingen
WO1993005402A1 (en) * 1991-09-03 1993-03-18 International Business Machines Corporation Electrical test probe
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5530375A (en) * 1992-12-24 1996-06-25 International Business Machines Corporation Method of testing circuits and/or burning-in chips
JPH0677467B2 (ja) * 1992-12-25 1994-09-28 山一電機株式会社 Ｉｃソケット
TW273635B (de) * 1994-09-01 1996-04-01 Aesop
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
KR0176627B1 (ko) * 1995-12-30 1999-05-15 김광호 인쇄회로기판의 통전검사용 프로브 장치
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6297653B1 (en) 1999-06-28 2001-10-02 Micron Technology, Inc. Interconnect and carrier with resistivity measuring contacts for testing semiconductor components
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6384614B1 (en) 2000-02-05 2002-05-07 Fluke Corporation Single tip Kelvin probe
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6538424B1 (en) * 2000-07-31 2003-03-25 Le Croy Corporation Notched electrical test probe tip
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
DE10108743B4 (de) * 2001-02-23 2004-09-09 Infineon Technologies Ag Nadelkarte zum Testen einer integrierten Schaltung und Verwendung der Nadelkarte
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
US6836135B2 (en) 2001-08-31 2004-12-28 Cascade Microtech, Inc. Optical testing device
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US6815963B2 (en) 2002-05-23 2004-11-09 Cascade Microtech, Inc. Probe for testing a device under test
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
KR20060126700A (ko) 2003-12-24 2006-12-08 캐스케이드 마이크로테크 인코포레이티드 능동 웨이퍼 프로브
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US7176705B2 (en) 2004-06-07 2007-02-13 Cascade Microtech, Inc. Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
KR101157449B1 (ko) 2004-07-07 2012-06-22 캐스케이드 마이크로테크 인코포레이티드 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드
KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
JP5080459B2 (ja) 2005-06-13 2012-11-21 カスケード マイクロテック インコーポレイテッド 広帯域能動／受動差動信号プローブ
JP4574588B2 (ja) * 2006-04-19 2010-11-04 ルネサスエレクトロニクス株式会社 ケルビンコンタクト測定装置および測定方法
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
TWI586967B (zh) * 2015-10-27 2017-06-11 Mpi Corp Probe module

Also Published As

Publication number Publication date
US3609539A (en) 1971-09-28
FR2016478A1 (de) 1970-05-08
JPS477418B1 (en) 1972-03-02
DE1939676A1 (de) 1970-08-13
GB1275948A (en) 1972-06-01

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Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee