FR2016478A1 - - Google Patents

Info

Publication number
FR2016478A1
FR2016478A1 FR6923625A FR6923625A FR2016478A1 FR 2016478 A1 FR2016478 A1 FR 2016478A1 FR 6923625 A FR6923625 A FR 6923625A FR 6923625 A FR6923625 A FR 6923625A FR 2016478 A1 FR2016478 A1 FR 2016478A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6923625A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2016478A1 publication Critical patent/FR2016478A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/32—Self-aligning contacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
FR6923625A 1968-09-28 1969-07-08 Withdrawn FR2016478A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US755868A US3609539A (en) 1968-09-28 1968-09-28 Self-aligning kelvin probe

Publications (1)

Publication Number Publication Date
FR2016478A1 true FR2016478A1 (fr) 1970-05-08

Family

ID=25041004

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6923625A Withdrawn FR2016478A1 (fr) 1968-09-28 1969-07-08

Country Status (5)

Country Link
US (1) US3609539A (fr)
JP (1) JPS477418B1 (fr)
DE (1) DE1939676B2 (fr)
FR (1) FR2016478A1 (fr)
GB (1) GB1275948A (fr)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3992073A (en) * 1975-11-24 1976-11-16 Technical Wire Products, Inc. Multi-conductor probe
US4214201A (en) * 1978-02-24 1980-07-22 Teradyne, Inc. Integrated circuit testing probe
DE3628104A1 (de) * 1986-08-19 1988-02-25 Feinmetall Gmbh Kontaktelement fuer pruefkarten
DE58903408D1 (de) * 1989-02-16 1993-03-11 Mania Gmbh Schaltung zum messen von widerstaenden von prueflingen.
WO1993005402A1 (fr) * 1991-09-03 1993-03-18 International Business Machines Corporation Sonde d'essai electrique
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5530375A (en) * 1992-12-24 1996-06-25 International Business Machines Corporation Method of testing circuits and/or burning-in chips
JPH0677467B2 (ja) * 1992-12-25 1994-09-28 山一電機株式会社 Ｉｃソケット
TW273635B (fr) * 1994-09-01 1996-04-01 Aesop
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
KR0176627B1 (ko) * 1995-12-30 1999-05-15 김광호 인쇄회로기판의 통전검사용 프로브 장치
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6297653B1 (en) 1999-06-28 2001-10-02 Micron Technology, Inc. Interconnect and carrier with resistivity measuring contacts for testing semiconductor components
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6384614B1 (en) 2000-02-05 2002-05-07 Fluke Corporation Single tip Kelvin probe
US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6538424B1 (en) * 2000-07-31 2003-03-25 Le Croy Corporation Notched electrical test probe tip
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
DE10108743B4 (de) * 2001-02-23 2004-09-09 Infineon Technologies Ag Nadelkarte zum Testen einer integrierten Schaltung und Verwendung der Nadelkarte
WO2003052435A1 (fr) 2001-08-21 2003-06-26 Cascade Microtech, Inc. Systeme de detection a membrane
WO2003020467A1 (fr) 2001-08-31 2003-03-13 Cascade Microtech, Inc. Appareil de test optique
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
AU2003233659A1 (en) 2002-05-23 2003-12-12 Cascade Microtech, Inc. Probe for testing a device under test
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
DE202004021093U1 (de) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Aktiver Halbleiterscheibenmessfühler
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
EP1754072A2 (fr) 2004-06-07 2007-02-21 CASCADE MICROTECH, INC. (an Oregon corporation) Support individuel optique thermique
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
EP1766426B1 (fr) 2004-07-07 2013-09-11 Cascade Microtech, Inc. Tete de sondes comportant une sonde a membrane a suspension
DE202005021435U1 (de) 2004-09-13 2008-02-28 Cascade Microtech, Inc., Beaverton Doppelseitige Prüfaufbauten
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
WO2006137979A2 (fr) 2005-06-13 2006-12-28 Cascade Microtech, Inc. Sonde de signal differentiel active-passive a large bande
JP4574588B2 (ja) * 2006-04-19 2010-11-04 ルネサスエレクトロニクス株式会社 ケルビンコンタクト測定装置および測定方法
DE112007001399T5 (de) 2006-06-09 2009-05-07 Cascade Microtech, Inc., Beaverton Messfühler für differentielle Signale mit integrierter Symmetrieschaltung
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (fr) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Coupon amovible pour appareil de sondage
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
TWI586967B (zh) * 2015-10-27 2017-06-11 Mpi Corp Probe module

Also Published As

Publication number Publication date
DE1939676B2 (de) 1971-03-04
GB1275948A (en) 1972-06-01
DE1939676A1 (de) 1970-08-13
JPS477418B1 (en) 1972-03-02
US3609539A (en) 1971-09-28

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Legal Events

Date Code Title Description
ST Notification of lapse