DE1901853A1 - Kryosorptionspumpe - Google Patents
KryosorptionspumpeInfo
- Publication number
- DE1901853A1 DE1901853A1 DE19691901853 DE1901853A DE1901853A1 DE 1901853 A1 DE1901853 A1 DE 1901853A1 DE 19691901853 DE19691901853 DE 19691901853 DE 1901853 A DE1901853 A DE 1901853A DE 1901853 A1 DE1901853 A1 DE 1901853A1
- Authority
- DE
- Germany
- Prior art keywords
- pump
- cryosorption
- hollow
- elongated
- molecular sieve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 35
- 239000002808 molecular sieve Substances 0.000 claims description 24
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 24
- 239000007789 gas Substances 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 14
- 239000002826 coolant Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 22
- 238000005086 pumping Methods 0.000 description 19
- 229910052757 nitrogen Inorganic materials 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000002594 sorbent Substances 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000037237 body shape Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- IQDXNHZDRQHKEF-UHFFFAOYSA-N dialuminum;dicalcium;dioxido(oxo)silane Chemical compound [Al+3].[Al+3].[Ca+2].[Ca+2].[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O.[O-][Si]([O-])=O IQDXNHZDRQHKEF-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US70021668A | 1968-01-24 | 1968-01-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1901853A1 true DE1901853A1 (de) | 1969-10-09 |
Family
ID=24812633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691901853 Pending DE1901853A1 (de) | 1968-01-24 | 1969-01-15 | Kryosorptionspumpe |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3490247A (enExample) |
| DE (1) | DE1901853A1 (enExample) |
| FR (1) | FR2000693A1 (enExample) |
| GB (1) | GB1239192A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2048253A5 (enExample) * | 1969-12-01 | 1971-03-19 | Air Liquide | |
| CH627314A5 (enExample) * | 1978-01-24 | 1981-12-31 | Bbc Brown Boveri & Cie | |
| USRE31665E (en) * | 1980-04-01 | 1984-09-11 | Cvi Incorporated | Cryopump apparatus |
| US4275566A (en) * | 1980-04-01 | 1981-06-30 | Pennwalt Corporation | Cryopump apparatus |
| US4466252A (en) * | 1982-09-29 | 1984-08-21 | Cvi Incorporated | Cryopump |
| US4494381A (en) * | 1983-05-13 | 1985-01-22 | Helix Technology Corporation | Cryopump with improved adsorption capacity |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3309844A (en) * | 1963-11-29 | 1967-03-21 | Union Carbide Corp | Process for adsorbing gases |
| US3335550A (en) * | 1964-04-24 | 1967-08-15 | Union Carbide Corp | Cryosorption apparatus |
| US3344852A (en) * | 1964-06-15 | 1967-10-03 | Bergson Gustav | Gas drying apparatus |
| US3371499A (en) * | 1966-11-02 | 1968-03-05 | Union Carbide Corp | Cryosorption vacuum pumping system |
-
1968
- 1968-01-24 US US700216A patent/US3490247A/en not_active Expired - Lifetime
-
1969
- 1969-01-10 GB GB1239192D patent/GB1239192A/en not_active Expired
- 1969-01-15 DE DE19691901853 patent/DE1901853A1/de active Pending
- 1969-01-24 FR FR6901579A patent/FR2000693A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| FR2000693A1 (enExample) | 1969-09-12 |
| US3490247A (en) | 1970-01-20 |
| GB1239192A (enExample) | 1971-07-14 |
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