DE1765091B2 - - Google Patents

Info

Publication number
DE1765091B2
DE1765091B2 DE19681765091 DE1765091A DE1765091B2 DE 1765091 B2 DE1765091 B2 DE 1765091B2 DE 19681765091 DE19681765091 DE 19681765091 DE 1765091 A DE1765091 A DE 1765091A DE 1765091 B2 DE1765091 B2 DE 1765091B2
Authority
DE
Germany
Prior art keywords
layer
resistance
nickel
chromium
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19681765091
Other languages
German (de)
English (en)
Other versions
DE1765091C3 (de
DE1765091A1 (de
Inventor
Werner Dipl.-Phys.Dr. Cirkler
Helmold Dipl.-Phys. Kausche
Alois Dipl.-Phys.Dr. 8022 Gruenwald Schauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19681765091 priority Critical patent/DE1765091C3/de
Publication of DE1765091A1 publication Critical patent/DE1765091A1/de
Publication of DE1765091B2 publication Critical patent/DE1765091B2/de
Application granted granted Critical
Publication of DE1765091C3 publication Critical patent/DE1765091C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
DE19681765091 1968-04-01 1968-04-01 Verfahren zur Herstellung eines hochkonstanten Metallschichtwiderstandselementes Expired DE1765091C3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19681765091 DE1765091C3 (de) 1968-04-01 1968-04-01 Verfahren zur Herstellung eines hochkonstanten Metallschichtwiderstandselementes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681765091 DE1765091C3 (de) 1968-04-01 1968-04-01 Verfahren zur Herstellung eines hochkonstanten Metallschichtwiderstandselementes

Publications (3)

Publication Number Publication Date
DE1765091A1 DE1765091A1 (de) 1971-12-30
DE1765091B2 true DE1765091B2 (enrdf_load_stackoverflow) 1973-10-18
DE1765091C3 DE1765091C3 (de) 1974-06-06

Family

ID=5698270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681765091 Expired DE1765091C3 (de) 1968-04-01 1968-04-01 Verfahren zur Herstellung eines hochkonstanten Metallschichtwiderstandselementes

Country Status (1)

Country Link
DE (1) DE1765091C3 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2833919A1 (de) * 1978-08-02 1980-02-14 Siemens Ag Elektrische schichtschaltung auf kunststoffolie und herstellungsverfahren

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2318941A1 (fr) * 1973-03-06 1977-02-18 Radiotechnique Compelec Procede de realisation de couches minces conductrices et transparentes
NL7707078A (nl) * 1977-06-27 1978-12-29 Philips Nv Koolstoffilmweerstand.
US4298505A (en) * 1979-11-05 1981-11-03 Corning Glass Works Resistor composition and method of manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2833919A1 (de) * 1978-08-02 1980-02-14 Siemens Ag Elektrische schichtschaltung auf kunststoffolie und herstellungsverfahren

Also Published As

Publication number Publication date
DE1765091C3 (de) 1974-06-06
DE1765091A1 (de) 1971-12-30

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)