DE1542589A1 - Verfahren und Vorrichtung zur Entfernung von Verunreinigungen von der Oberflaeche eines Schichttraegers od.dgl. - Google Patents
Verfahren und Vorrichtung zur Entfernung von Verunreinigungen von der Oberflaeche eines Schichttraegers od.dgl.Info
- Publication number
- DE1542589A1 DE1542589A1 DE19661542589 DE1542589A DE1542589A1 DE 1542589 A1 DE1542589 A1 DE 1542589A1 DE 19661542589 DE19661542589 DE 19661542589 DE 1542589 A DE1542589 A DE 1542589A DE 1542589 A1 DE1542589 A1 DE 1542589A1
- Authority
- DE
- Germany
- Prior art keywords
- chamber
- substrate
- gas
- electrostatic
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 23
- 239000000356 contaminant Substances 0.000 title claims description 8
- 239000007789 gas Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 41
- 150000002500 ions Chemical class 0.000 claims description 27
- 230000005686 electrostatic field Effects 0.000 claims description 24
- 239000012535 impurity Substances 0.000 claims description 19
- 238000004140 cleaning Methods 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000007795 chemical reaction product Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 claims 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 claims 1
- 239000003638 chemical reducing agent Substances 0.000 claims 1
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 230000002262 irrigation Effects 0.000 claims 1
- 238000003973 irrigation Methods 0.000 claims 1
- 230000037361 pathway Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000012876 carrier material Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 244000287680 Garcinia dulcis Species 0.000 description 1
- 241001311547 Patina Species 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical group ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical group [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000013014 purified material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48441765A | 1965-09-01 | 1965-09-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1542589A1 true DE1542589A1 (de) | 1970-06-18 |
Family
ID=23924090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661542589 Pending DE1542589A1 (de) | 1965-09-01 | 1966-08-31 | Verfahren und Vorrichtung zur Entfernung von Verunreinigungen von der Oberflaeche eines Schichttraegers od.dgl. |
Country Status (4)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19907911A1 (de) * | 1999-02-24 | 2000-09-21 | Mag Masch App | Vorrichtung und Verfahren zur Behandlung von elektrisch leitfähigem Endlosmaterial |
| DE102005025101B3 (de) * | 2005-05-27 | 2006-07-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Reinigung von Innenräumen in Vakuumkammern |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2144669B (en) * | 1982-12-07 | 1986-02-26 | Standard Telephones Cables Ltd | Cleaning electrical contacts |
| US4749589A (en) * | 1984-12-13 | 1988-06-07 | Stc Plc | Method of surface treatment |
| US4877640A (en) * | 1988-04-13 | 1989-10-31 | Electro-Plasma, Inc. | Method of oxide removal from metallic powder |
| FR2774400B1 (fr) * | 1998-02-04 | 2000-04-28 | Physiques Et Chimiques | Dispositif electrique pour degraissage, decapage ou passivation plasmachimique de metaux |
| CN118116786B (zh) * | 2024-01-17 | 2025-07-25 | 成都诺为光科科技有限公司 | 一种用于高线性光电倍增管降低暗电流的处理设备及方法 |
-
1966
- 1966-08-30 GB GB3860066A patent/GB1153787A/en not_active Expired
- 1966-08-30 SE SE1164166A patent/SE320250B/xx unknown
- 1966-08-31 DE DE19661542589 patent/DE1542589A1/de active Pending
- 1966-08-31 BE BE686205D patent/BE686205A/xx unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19907911A1 (de) * | 1999-02-24 | 2000-09-21 | Mag Masch App | Vorrichtung und Verfahren zur Behandlung von elektrisch leitfähigem Endlosmaterial |
| DE19907911C2 (de) * | 1999-02-24 | 2003-02-27 | Mag Maschinen Und Appbau Ag Gr | Vorrichtung und Verfahren zur Behandlung von elektrisch leitfähigem Endlosmaterial |
| DE102005025101B3 (de) * | 2005-05-27 | 2006-07-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Reinigung von Innenräumen in Vakuumkammern |
Also Published As
| Publication number | Publication date |
|---|---|
| SE320250B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-02-02 |
| BE686205A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1967-02-28 |
| GB1153787A (en) | 1969-05-29 |
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