DE1516745B2 - Piezoelektrischer Resonator - Google Patents

Piezoelektrischer Resonator

Info

Publication number
DE1516745B2
DE1516745B2 DE1516745A DE1516745A DE1516745B2 DE 1516745 B2 DE1516745 B2 DE 1516745B2 DE 1516745 A DE1516745 A DE 1516745A DE 1516745 A DE1516745 A DE 1516745A DE 1516745 B2 DE1516745 B2 DE 1516745B2
Authority
DE
Germany
Prior art keywords
area
electrodes
plate
resonator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE1516745A
Other languages
German (de)
English (en)
Other versions
DE1516745A1 (de
Inventor
Daniel R. Cleveland Heights Curran
Donald J. Warrensville Heights Koneval
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Clevite Corp
Original Assignee
Clevite Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clevite Corp filed Critical Clevite Corp
Publication of DE1516745A1 publication Critical patent/DE1516745A1/de
Publication of DE1516745B2 publication Critical patent/DE1516745B2/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE1516745A 1965-04-19 1966-04-18 Piezoelektrischer Resonator Pending DE1516745B2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US449063A US3401276A (en) 1965-04-19 1965-04-19 Piezoelectric resonators
US73636868A 1968-06-12 1968-06-12

Publications (2)

Publication Number Publication Date
DE1516745A1 DE1516745A1 (de) 1969-06-26
DE1516745B2 true DE1516745B2 (de) 1974-07-25

Family

ID=27035584

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1516745A Pending DE1516745B2 (de) 1965-04-19 1966-04-18 Piezoelektrischer Resonator
DE1791285A Withdrawn DE1791285B2 (de) 1965-04-19 1966-04-18 Verfahren zum Nachstimmen piezoelektrischer Resonatoren und nach dem Verfahren nachgestimmte piezoelektrische Resonatoren

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1791285A Withdrawn DE1791285B2 (de) 1965-04-19 1966-04-18 Verfahren zum Nachstimmen piezoelektrischer Resonatoren und nach dem Verfahren nachgestimmte piezoelektrische Resonatoren

Country Status (4)

Country Link
US (2) US3401276A (enExample)
DE (2) DE1516745B2 (enExample)
GB (1) GB1150878A (enExample)
NL (1) NL6605215A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2823540A1 (de) * 1977-06-08 1978-12-14 Kinsekisha Lab Ltd Piezoelektrischer schwinger

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3487318A (en) * 1967-11-08 1969-12-30 Motorola Inc Mode coupled discriminator
US3624431A (en) * 1968-07-12 1971-11-30 Taiyo Yuden Kk Composite circuit member including an electrostrictive element and condenser
US3585418A (en) * 1969-07-22 1971-06-15 Clevite Corp Piezoelectric resonators and method of tuning the same
BE758421A (fr) * 1969-11-06 1971-05-04 Automatic Elect Lab Filtre passe-bande a cristal polylithique, presentant des frequences polaires d'attenuation dans la bande d'arret inferieure
US3697788A (en) * 1970-09-30 1972-10-10 Motorola Inc Piezoelectric resonating device
JPS5124350B2 (enExample) * 1971-11-12 1976-07-23
JPS5229908B2 (enExample) * 1971-11-17 1977-08-04
US3961210A (en) * 1973-04-19 1976-06-01 Matsushita Electric Industrial Co., Ltd. Piezoelectric dot resonator driven at a harmonic overtone
CA1106960A (en) * 1976-02-17 1981-08-11 Virgil E. Bottom Method of adjusting the frequency of a crystal resonator
US4112134A (en) * 1976-03-22 1978-09-05 Transat Corp. Vacuum deposition method for frequency adjustment of piezoelectric resonators
US4117074A (en) * 1976-08-30 1978-09-26 Tiersten Harry F Monolithic mosaic piezoelectric transducer utilizing trapped energy modes
DE2641571B1 (de) * 1976-09-15 1977-06-08 Siemens Ag Als obertonquarz verwendeter dickenscherungsschwinger
US4112147A (en) * 1977-05-13 1978-09-05 Western Electric Company, Inc. Method of manufacturing a monolithic crystal filter
US4107349A (en) * 1977-08-12 1978-08-15 The United States Of America As Represented By The Secretary Of The Army Method of adjusting the frequency of piezoelectric resonators
DE2812786A1 (de) * 1978-03-23 1979-09-27 Draloric Electronic Verfahren zum abgleich eines piezoelektrischen resonators
US4243960A (en) * 1978-08-14 1981-01-06 The United States Of America As Represented By The Secretary Of The Navy Method and materials for tuning the center frequency of narrow-band surface-acoustic-wave (SAW) devices by means of dielectric overlays
DE2845807A1 (de) * 1978-10-20 1980-04-24 Siemens Ag Piezoelektrischer resonator
US4343827A (en) * 1981-01-08 1982-08-10 Western Electric Company, Inc. Method of fine-tuning a monolithic crystal filter
AU544464B2 (en) * 1982-12-27 1985-05-30 Tokyo Shibaura Denki Kabushiki Kaisha Ultrasonic transducer
US4565942A (en) * 1983-07-01 1986-01-21 Murata Manufacturing Co., Ltd. Energy trapped piezoelectric resonator liquid sensor
US4676993A (en) * 1984-11-29 1987-06-30 General Electric Company Method and apparatus for selectively fine-tuning a coupled-dual resonator crystal and crystal manufactured thereby
US4627379A (en) * 1984-11-29 1986-12-09 General Electric Company Shutter apparatus for fine-tuning a coupled-dual resonator crystal
US4833430A (en) * 1984-11-29 1989-05-23 General Electric Company Coupled-dual resonator crystal
US4628735A (en) * 1984-12-14 1986-12-16 Sundstrand Data Control, Inc. Vibrating beam accelerometer
US4839618A (en) * 1987-05-26 1989-06-13 General Electric Company Monolithic crystal filter with wide bandwidth and method of making same
US4906917A (en) * 1989-06-01 1990-03-06 The United States Of America As Represented By The United States Department Of Energy Elastomer degradation sensor using a piezoelectric material
US5231327A (en) * 1990-12-14 1993-07-27 Tfr Technologies, Inc. Optimized piezoelectric resonator-based networks
US5519279A (en) * 1994-09-29 1996-05-21 Motorola, Inc. Piezoelectric resonator with grid-like electrodes
EP0818882A3 (en) * 1996-07-10 1999-12-15 Matsushita Electric Industrial Co., Ltd. Energy trapping piezoelectric device and producing method thereof
JP2001196883A (ja) * 1999-11-01 2001-07-19 Murata Mfg Co Ltd 圧電共振素子の周波数調整方法
US6307447B1 (en) * 1999-11-01 2001-10-23 Agere Systems Guardian Corp. Tuning mechanical resonators for electrical filter
US6437667B1 (en) * 2000-02-04 2002-08-20 Agere Systems Guardian Corp. Method of tuning thin film resonator filters by removing or adding piezoelectric material
GB0012439D0 (en) * 2000-05-24 2000-07-12 Univ Cranfield Improvements to filters
US6407649B1 (en) * 2001-01-05 2002-06-18 Nokia Corporation Monolithic FBAR duplexer and method of making the same
US6566979B2 (en) * 2001-03-05 2003-05-20 Agilent Technologies, Inc. Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
US20060006965A1 (en) * 2004-07-06 2006-01-12 Matsushita Electric Industrial Co., Ltd. RF filter and method for fabricating the same
US7694734B2 (en) * 2005-10-31 2010-04-13 Baker Hughes Incorporated Method and apparatus for insulating a resonator downhole
US7647965B2 (en) * 2005-10-31 2010-01-19 Baker Hughes Incorporated Method and apparatus for insulating a resonator downhole
US8035277B2 (en) * 2007-08-14 2011-10-11 Avago Technologies Wireless Ip (Singapore) Pte.Ltd. Method for forming a multi-layer electrode underlying a piezoelectric layer and related structure
WO2009023098A2 (en) * 2007-08-14 2009-02-19 Skyworks Solutions, Inc. Bulk acoustic wave structure with aluminum copper nitride piezoelectric layer and related method
US7602102B1 (en) * 2008-04-24 2009-10-13 Skyworks Solutions, Inc. Bulk acoustic wave resonator with controlled thickness region having controlled electromechanical coupling
US7795781B2 (en) * 2008-04-24 2010-09-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator with reduced energy loss
US8291559B2 (en) * 2009-02-24 2012-10-23 Epcos Ag Process for adapting resonance frequency of a BAW resonator
US9608589B2 (en) 2010-10-26 2017-03-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of forming acoustic resonator using intervening seed layer
US11356071B2 (en) 2016-03-11 2022-06-07 Akoustis, Inc. Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process
US11316496B2 (en) 2016-03-11 2022-04-26 Akoustis, Inc. Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1848630A (en) * 1925-12-23 1932-03-08 Edward O Hulburt Piezo electric crystal
US2445310A (en) * 1944-01-29 1948-07-20 Chilowsky Constantin Manufacture of piezoelectric elements
DE872966C (de) * 1951-01-26 1953-04-09 Quarzkeramik G M B H Frequenzabgleich von Schwingkristallen
US2886787A (en) * 1953-07-30 1959-05-12 Donald E Johnson Piezoelectric device
US2859346A (en) * 1954-07-28 1958-11-04 Motorola Inc Crystal oscillator
DE1027735B (de) * 1954-12-18 1958-04-10 Steeg & Reuter G M B H Dr Verfahren zur Erhoehung der Frequenzkonstanz von Schwingkristallen
US2901644A (en) * 1955-12-05 1959-08-25 Tibbetts Lab Inc Electromechanical device and method of making same
US3253219A (en) * 1961-06-01 1966-05-24 Union Oil Co Method using change of piezoelectric crystal frequency to determine corrosion rate and apparatus therefor
US3222622A (en) * 1962-08-14 1965-12-07 Clevite Corp Wave filter comprising piezoelectric wafer electroded to define a plurality of resonant regions independently operable without significant electro-mechanical interaction
DE1441633A1 (de) * 1963-05-20 1968-11-14 Clevite Corp Piezoelektrischer Resonator
US3401283A (en) * 1965-04-19 1968-09-10 Clevite Corp Piezoelectric resonator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2823540A1 (de) * 1977-06-08 1978-12-14 Kinsekisha Lab Ltd Piezoelektrischer schwinger

Also Published As

Publication number Publication date
DE1791285B2 (de) 1975-08-14
DE1516745A1 (de) 1969-06-26
US3401276A (en) 1968-09-10
US3549414A (en) 1970-12-22
NL6605215A (enExample) 1966-10-20
GB1150878A (en) 1969-05-07

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