DE1265338B - Gasentladungseinrichtung mit Penning-Entladung zur Erzeugung und Messung von Hochvakuum - Google Patents

Gasentladungseinrichtung mit Penning-Entladung zur Erzeugung und Messung von Hochvakuum

Info

Publication number
DE1265338B
DE1265338B DEG40302A DEG0040302A DE1265338B DE 1265338 B DE1265338 B DE 1265338B DE G40302 A DEG40302 A DE G40302A DE G0040302 A DEG0040302 A DE G0040302A DE 1265338 B DE1265338 B DE 1265338B
Authority
DE
Germany
Prior art keywords
discharge
cathode
opening
cold
penning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEG40302A
Other languages
German (de)
English (en)
Inventor
James Roger Young
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE1265338B publication Critical patent/DE1265338B/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Measuring Fluid Pressure (AREA)
DEG40302A 1963-04-15 1964-04-08 Gasentladungseinrichtung mit Penning-Entladung zur Erzeugung und Messung von Hochvakuum Pending DE1265338B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US272984A US3280365A (en) 1963-04-15 1963-04-15 Penning-type discharge ionization gauge with discharge initiation electron source

Publications (1)

Publication Number Publication Date
DE1265338B true DE1265338B (de) 1968-04-04

Family

ID=23042070

Family Applications (1)

Application Number Title Priority Date Filing Date
DEG40302A Pending DE1265338B (de) 1963-04-15 1964-04-08 Gasentladungseinrichtung mit Penning-Entladung zur Erzeugung und Messung von Hochvakuum

Country Status (3)

Country Link
US (1) US3280365A (enrdf_load_stackoverflow)
DE (1) DE1265338B (enrdf_load_stackoverflow)
GB (1) GB1053215A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3378712A (en) * 1966-11-18 1968-04-16 Gen Electric Field emission ionization gauge with restricted line of sight between field emissionanode and ion collector
US4270091A (en) * 1978-01-25 1981-05-26 Varian Associates, Inc. Apparatus and method for measuring pressures and indicating leaks with optical analysis
US4380720A (en) * 1979-11-20 1983-04-19 Fleck Carl M Apparatus for producing a directed flow of a gaseous medium utilizing the electric wind principle
US5198772A (en) * 1991-03-12 1993-03-30 Mks Instruments, Inc. Removable discharge initiating means for cold cathode discharge ionization gauge
US5157333A (en) * 1991-03-12 1992-10-20 Mks Instruments, Inc. Discharge initiating means for cold cathode discharge ionization gauge
US9484176B2 (en) * 2012-09-10 2016-11-01 Thomas Schenkel Advanced penning ion source

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1000960B (de) * 1953-04-24 1957-01-17 Gen Electric Vakuumpumpe
DE1089112B (de) * 1958-02-13 1960-09-15 Thomson Houston Comp Francaise Vakuumpumpe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2081429A (en) * 1933-06-03 1937-05-25 Gaede Wolfgang Electron tube and method of operating the same
NL50072C (enrdf_load_stackoverflow) * 1935-12-28
US2757306A (en) * 1955-02-23 1956-07-31 Nat Res Dev Ionisation gauge
US3204860A (en) * 1958-04-16 1965-09-07 Csf High-vacuum pump
DE1089505B (de) * 1958-08-02 1960-09-22 Philips Nv Ionenpumpe mit von einem Magnetfeld verlaengerter Entladungsbahn sowie Verfahren zur Verwendung einer derartigen Ionenpumpe
NL243654A (enrdf_load_stackoverflow) * 1958-09-25
GB945005A (en) * 1960-06-07 1963-12-18 Ici Ltd Improvements in and relating to omegatrons
DE1156581B (de) * 1961-04-17 1963-10-31 Philips Nv Ionisationsmanometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1000960B (de) * 1953-04-24 1957-01-17 Gen Electric Vakuumpumpe
DE1089112B (de) * 1958-02-13 1960-09-15 Thomson Houston Comp Francaise Vakuumpumpe

Also Published As

Publication number Publication date
US3280365A (en) 1966-10-18
GB1053215A (enrdf_load_stackoverflow)

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