DE1261608B - Hochfrequenz-Plasmagenerator - Google Patents
Hochfrequenz-PlasmageneratorInfo
- Publication number
- DE1261608B DE1261608B DEJ29683A DEJ0029683A DE1261608B DE 1261608 B DE1261608 B DE 1261608B DE J29683 A DEJ29683 A DE J29683A DE J0029683 A DEJ0029683 A DE J0029683A DE 1261608 B DE1261608 B DE 1261608B
- Authority
- DE
- Germany
- Prior art keywords
- hollow body
- frequency
- plasma generator
- generator according
- slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 claims description 23
- 230000010355 oscillation Effects 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 description 47
- 230000005684 electric field Effects 0.000 description 10
- 239000004020 conductor Substances 0.000 description 7
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 101150101918 TSC22D3 gene Proteins 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101000596277 Homo sapiens TSC22 domain family protein 3 Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 102100035260 TSC22 domain family protein 3 Human genes 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000013598 vector Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEJ29683A DE1261608B (de) | 1965-12-22 | 1965-12-22 | Hochfrequenz-Plasmagenerator |
| LU52055A LU52055A1 (enrdf_load_stackoverflow) | 1965-12-22 | 1966-09-28 | |
| BE688340D BE688340A (enrdf_load_stackoverflow) | 1965-12-22 | 1966-10-17 | |
| FR81761A FR1499554A (fr) | 1965-12-22 | 1966-10-27 | Source de plasma alimentée en haute fréquence |
| NL6615531A NL6615531A (enrdf_load_stackoverflow) | 1965-12-22 | 1966-11-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEJ29683A DE1261608B (de) | 1965-12-22 | 1965-12-22 | Hochfrequenz-Plasmagenerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1261608B true DE1261608B (de) | 1968-02-22 |
Family
ID=7203674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEJ29683A Pending DE1261608B (de) | 1965-12-22 | 1965-12-22 | Hochfrequenz-Plasmagenerator |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE688340A (enrdf_load_stackoverflow) |
| DE (1) | DE1261608B (enrdf_load_stackoverflow) |
| FR (1) | FR1499554A (enrdf_load_stackoverflow) |
| LU (1) | LU52055A1 (enrdf_load_stackoverflow) |
| NL (1) | NL6615531A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3663858A (en) * | 1969-11-06 | 1972-05-16 | Giuseppe Lisitano | Radio-frequency plasma generator |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1256686A (enrdf_load_stackoverflow) * | 1969-08-22 | 1971-12-15 | ||
| CA1159012A (en) * | 1980-05-02 | 1983-12-20 | Seitaro Matsuo | Plasma deposition apparatus |
| FR2715019B1 (fr) * | 1994-01-13 | 1996-04-05 | Plasmion | Dispositif pour former un plasma par application de micro-ondes afin de produire un faisceau d'ions. |
-
1965
- 1965-12-22 DE DEJ29683A patent/DE1261608B/de active Pending
-
1966
- 1966-09-28 LU LU52055A patent/LU52055A1/xx unknown
- 1966-10-17 BE BE688340D patent/BE688340A/xx unknown
- 1966-10-27 FR FR81761A patent/FR1499554A/fr not_active Expired
- 1966-11-03 NL NL6615531A patent/NL6615531A/xx unknown
Non-Patent Citations (1)
| Title |
|---|
| None * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3663858A (en) * | 1969-11-06 | 1972-05-16 | Giuseppe Lisitano | Radio-frequency plasma generator |
Also Published As
| Publication number | Publication date |
|---|---|
| LU52055A1 (enrdf_load_stackoverflow) | 1966-11-28 |
| FR1499554A (fr) | 1967-10-27 |
| NL6615531A (enrdf_load_stackoverflow) | 1967-06-23 |
| BE688340A (enrdf_load_stackoverflow) | 1967-03-31 |
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