DE1246933B - Elektrodenanordnung fuer Ionenvakuumpumpen und Vakuummanometer - Google Patents
Elektrodenanordnung fuer Ionenvakuumpumpen und VakuummanometerInfo
- Publication number
- DE1246933B DE1246933B DE1961V0021742 DEV0021742A DE1246933B DE 1246933 B DE1246933 B DE 1246933B DE 1961V0021742 DE1961V0021742 DE 1961V0021742 DE V0021742 A DEV0021742 A DE V0021742A DE 1246933 B DE1246933 B DE 1246933B
- Authority
- DE
- Germany
- Prior art keywords
- cathode
- electrode arrangement
- areas
- ribs
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 32
- 238000004544 sputter deposition Methods 0.000 claims description 24
- 238000010849 ion bombardment Methods 0.000 claims description 20
- 229910052756 noble gas Inorganic materials 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 238000005086 pumping Methods 0.000 claims description 12
- 150000002835 noble gases Chemical class 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 238000000889 atomisation Methods 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 238000009304 pastoral farming Methods 0.000 claims description 3
- 238000005476 soldering Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 239000000843 powder Substances 0.000 claims 2
- 238000005245 sintering Methods 0.000 claims 1
- 239000010406 cathode material Substances 0.000 description 21
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 229910052786 argon Inorganic materials 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 239000012212 insulator Substances 0.000 description 6
- 230000001627 detrimental effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- XBCSKPOWJATIFC-UHFFFAOYSA-N cobalt iron nickel Chemical compound [Fe][Ni][Fe][Co] XBCSKPOWJATIFC-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Electron Tubes For Measurement (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US62055A US3070719A (en) | 1960-10-11 | 1960-10-11 | Cathodes for magnentically-confined glow discharge apparatus |
| US78058A US3091717A (en) | 1960-12-23 | 1960-12-23 | Cathodes for magnetically-confined glow discharge devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1246933B true DE1246933B (de) | 1967-08-10 |
Family
ID=26741815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1961V0021742 Pending DE1246933B (de) | 1960-10-11 | 1961-12-14 | Elektrodenanordnung fuer Ionenvakuumpumpen und Vakuummanometer |
Country Status (4)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT141377B (de) * | 1932-11-02 | 1935-04-10 | Elin Ag Elek Ind Wien | Glühkathode. |
| US2663811A (en) * | 1950-12-20 | 1953-12-22 | Westinghouse Electric Corp | Vapor-electric device |
| US2937302A (en) * | 1957-05-21 | 1960-05-17 | Edgerton Germeshausen & Grier | Electric-discharge device and cathode |
| US2937304A (en) * | 1957-09-25 | 1960-05-17 | Edgerton Germeshausen & Grier | Electric-discharge device and cathode |
| US2937301A (en) * | 1956-04-25 | 1960-05-17 | Edgerton Germeshausen & Grier | Electric-discharge device and cathode |
-
0
- NL NL268755D patent/NL268755A/xx unknown
-
1961
- 1961-09-15 GB GB3324861A patent/GB949097A/en not_active Expired
- 1961-09-25 GB GB3426761A patent/GB950770A/en not_active Expired
- 1961-10-10 CH CH1169861A patent/CH400441A/de unknown
- 1961-12-14 DE DE1961V0021742 patent/DE1246933B/de active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT141377B (de) * | 1932-11-02 | 1935-04-10 | Elin Ag Elek Ind Wien | Glühkathode. |
| US2663811A (en) * | 1950-12-20 | 1953-12-22 | Westinghouse Electric Corp | Vapor-electric device |
| US2937301A (en) * | 1956-04-25 | 1960-05-17 | Edgerton Germeshausen & Grier | Electric-discharge device and cathode |
| US2937302A (en) * | 1957-05-21 | 1960-05-17 | Edgerton Germeshausen & Grier | Electric-discharge device and cathode |
| US2937304A (en) * | 1957-09-25 | 1960-05-17 | Edgerton Germeshausen & Grier | Electric-discharge device and cathode |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
Also Published As
| Publication number | Publication date |
|---|---|
| NL268755A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | |
| GB950770A (en) | 1964-02-26 |
| GB949097A (en) | 1964-02-12 |
| CH400441A (de) | 1965-10-15 |
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