DE1199881B - Entladungslampe hoher Lichtstaerke und hoher Leuchtdichte - Google Patents
Entladungslampe hoher Lichtstaerke und hoher LeuchtdichteInfo
- Publication number
- DE1199881B DE1199881B DEP30085A DEP0030085A DE1199881B DE 1199881 B DE1199881 B DE 1199881B DE P30085 A DEP30085 A DE P30085A DE P0030085 A DEP0030085 A DE P0030085A DE 1199881 B DE1199881 B DE 1199881B
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- discharge lamp
- gas
- chamber
- gas flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 description 34
- 238000000034 method Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Discharge Lamp (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1179562A CH398790A (fr) | 1962-10-08 | 1962-10-08 | Procédé pour engendrer de la lumière à très haute intensité au moyen d'une décharge électrique |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1199881B true DE1199881B (de) | 1965-09-02 |
Family
ID=4376937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DEP30085A Pending DE1199881B (de) | 1962-10-08 | 1962-08-24 | Entladungslampe hoher Lichtstaerke und hoher Leuchtdichte |
Country Status (6)
Country | Link |
---|---|
BE (1) | BE623349A (enrdf_load_stackoverflow) |
CH (1) | CH398790A (enrdf_load_stackoverflow) |
DE (1) | DE1199881B (enrdf_load_stackoverflow) |
FR (1) | FR1349915A (enrdf_load_stackoverflow) |
GB (1) | GB1012341A (enrdf_load_stackoverflow) |
NL (1) | NL282609A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3364387A (en) * | 1965-06-07 | 1968-01-16 | Union Carbide Corp | Radiation torch having an electrode for supplying and exhausting gas |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1100167B (de) * | 1958-09-08 | 1961-02-23 | Union Carbide Corp | Verfahren zum Betrieb einer Entladungslampe grosser Lichtstaerke und Leuchtdichte sowie Hochdruckentladungslampe hierfuer |
-
0
- BE BE623349D patent/BE623349A/xx unknown
- NL NL282609D patent/NL282609A/xx unknown
-
1962
- 1962-08-23 FR FR907633A patent/FR1349915A/fr not_active Expired
- 1962-08-24 DE DEP30085A patent/DE1199881B/de active Pending
- 1962-09-07 GB GB34376/62A patent/GB1012341A/en not_active Expired
- 1962-10-08 CH CH1179562A patent/CH398790A/fr unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1100167B (de) * | 1958-09-08 | 1961-02-23 | Union Carbide Corp | Verfahren zum Betrieb einer Entladungslampe grosser Lichtstaerke und Leuchtdichte sowie Hochdruckentladungslampe hierfuer |
Also Published As
Publication number | Publication date |
---|---|
BE623349A (enrdf_load_stackoverflow) | |
FR1349915A (fr) | 1964-01-24 |
NL282609A (enrdf_load_stackoverflow) | |
GB1012341A (en) | 1965-12-08 |
CH398790A (fr) | 1966-03-15 |
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