DE112022002718T5 - Sensorelement - Google Patents
Sensorelement Download PDFInfo
- Publication number
- DE112022002718T5 DE112022002718T5 DE112022002718.5T DE112022002718T DE112022002718T5 DE 112022002718 T5 DE112022002718 T5 DE 112022002718T5 DE 112022002718 T DE112022002718 T DE 112022002718T DE 112022002718 T5 DE112022002718 T5 DE 112022002718T5
- Authority
- DE
- Germany
- Prior art keywords
- temperature
- pattern
- sensor element
- width
- sensitive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 abstract description 28
- 238000009826 distribution Methods 0.000 abstract description 26
- 230000035945 sensitivity Effects 0.000 abstract description 13
- 230000000052 comparative effect Effects 0.000 description 15
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000009966 trimming Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- ZINJLDJMHCUBIP-UHFFFAOYSA-N ethametsulfuron-methyl Chemical compound CCOC1=NC(NC)=NC(NC(=O)NS(=O)(=O)C=2C(=CC=CC=2)C(=O)OC)=N1 ZINJLDJMHCUBIP-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Measuring Volume Flow (AREA)
- Thermistors And Varistors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021085160A JP2022178388A (ja) | 2021-05-20 | 2021-05-20 | センサ素子 |
| JP2021-085160 | 2021-05-20 | ||
| PCT/JP2022/019823 WO2022244653A1 (ja) | 2021-05-20 | 2022-05-10 | センサ素子 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112022002718T5 true DE112022002718T5 (de) | 2024-03-14 |
Family
ID=84140615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112022002718.5T Pending DE112022002718T5 (de) | 2021-05-20 | 2022-05-10 | Sensorelement |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2022178388A (zh) |
| CN (1) | CN117321425A (zh) |
| DE (1) | DE112022002718T5 (zh) |
| TW (1) | TWI825722B (zh) |
| WO (1) | WO2022244653A1 (zh) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020003354A (ja) | 2018-06-28 | 2020-01-09 | 株式会社Ｓｏｋｅｎ | 感温構造体および風状態計測装置 |
| JP2020008370A (ja) | 2018-07-05 | 2020-01-16 | 株式会社Ｓｏｋｅｎ | 風状態検出装置 |
| JP2021085160A (ja) | 2019-11-25 | 2021-06-03 | 松岡 実 | 外気取り入れ器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61133866A (ja) * | 1984-12-03 | 1986-06-21 | Toyota Central Res & Dev Lab Inc | 流動状態検出センサ |
| JP2000275078A (ja) * | 1999-03-26 | 2000-10-06 | Omron Corp | 薄膜ヒータ |
| JP3461469B2 (ja) * | 1999-07-27 | 2003-10-27 | 株式会社日立製作所 | 熱式空気流量センサ及び内燃機関制御装置 |
| CN104482971B (zh) * | 2014-12-05 | 2019-05-24 | 北京控制工程研究所 | 一种基于mems技术的热式流量传感器 |
| JP2018066592A (ja) * | 2016-10-17 | 2018-04-26 | Koa株式会社 | 白金温度センサ素子 |
| JP6821384B2 (ja) * | 2016-10-17 | 2021-01-27 | Koa株式会社 | 白金温度センサ素子 |
| JP2018146403A (ja) * | 2017-03-06 | 2018-09-20 | Koa株式会社 | 温度センサ素子 |
| JP2018146404A (ja) * | 2017-03-06 | 2018-09-20 | Koa株式会社 | 温度センサ素子 |
| CN112513599A (zh) * | 2018-08-10 | 2021-03-16 | 世美特株式会社 | 温度传感器及包括温度传感器的装置 |
-
2021
- 2021-05-20 JP JP2021085160A patent/JP2022178388A/ja active Pending
-
2022
- 2022-05-10 CN CN202280035988.8A patent/CN117321425A/zh active Pending
- 2022-05-10 WO PCT/JP2022/019823 patent/WO2022244653A1/ja active Application Filing
- 2022-05-10 DE DE112022002718.5T patent/DE112022002718T5/de active Pending
- 2022-05-17 TW TW111118416A patent/TWI825722B/zh active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020003354A (ja) | 2018-06-28 | 2020-01-09 | 株式会社Ｓｏｋｅｎ | 感温構造体および風状態計測装置 |
| JP2020008370A (ja) | 2018-07-05 | 2020-01-16 | 株式会社Ｓｏｋｅｎ | 風状態検出装置 |
| JP2021085160A (ja) | 2019-11-25 | 2021-06-03 | 松岡 実 | 外気取り入れ器 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022244653A1 (ja) | 2022-11-24 |
| TW202303152A (zh) | 2023-01-16 |
| JP2022178388A (ja) | 2022-12-02 |
| TWI825722B (zh) | 2023-12-11 |
| CN117321425A (zh) | 2023-12-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed |