DE112022000793T5 - Aluminium-bondingdraht für leistungshalbleiter - Google Patents
Aluminium-bondingdraht für leistungshalbleiter Download PDFInfo
- Publication number
- DE112022000793T5 DE112022000793T5 DE112022000793.1T DE112022000793T DE112022000793T5 DE 112022000793 T5 DE112022000793 T5 DE 112022000793T5 DE 112022000793 T DE112022000793 T DE 112022000793T DE 112022000793 T5 DE112022000793 T5 DE 112022000793T5
- Authority
- DE
- Germany
- Prior art keywords
- wire
- aluminum
- mass
- less
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0211—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in cutting
- B23K35/0216—Rods, electrodes or wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/28—Selection of soldering or welding materials proper with the principal constituent melting at less than 950°C
- B23K35/286—Al as the principal constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/002—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working by rapid cooling or quenching; cooling agents used therefor
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
- H10W72/07532—Compression bonding, e.g. thermocompression bonding
- H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
- H10W72/07552—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting changes in structures or sizes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/521—Structures or relative sizes of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5524—Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/921—Structures or relative sizes of bond pads
- H10W72/923—Bond pads having multiple stacked layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/941—Dispositions of bond pads
- H10W72/944—Dispositions of multiple bond pads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/951—Materials of bond pads
- H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/753—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021011625 | 2021-01-28 | ||
| JP2021-011625 | 2021-01-28 | ||
| PCT/JP2022/002523 WO2022163606A1 (ja) | 2021-01-28 | 2022-01-25 | パワー半導体用アルミニウムボンディングワイヤ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112022000793T5 true DE112022000793T5 (de) | 2023-11-30 |
Family
ID=82654564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112022000793.1T Pending DE112022000793T5 (de) | 2021-01-28 | 2022-01-25 | Aluminium-bondingdraht für leistungshalbleiter |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20240105667A1 (https=) |
| JP (1) | JP7573051B2 (https=) |
| KR (1) | KR20230116044A (https=) |
| CN (1) | CN116848623A (https=) |
| DE (1) | DE112022000793T5 (https=) |
| TW (1) | TWI854187B (https=) |
| WO (1) | WO2022163606A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025028382A1 (ja) | 2023-07-31 | 2025-02-06 | 田中電子工業株式会社 | アルミニウム配線材及びその製造方法 |
| JPWO2025028381A1 (https=) | 2023-07-31 | 2025-02-06 | ||
| WO2025211239A1 (ja) * | 2024-04-03 | 2025-10-09 | 日鉄マイクロメタル株式会社 | Alボンディングワイヤ |
| CN121023316B (zh) * | 2025-10-28 | 2026-01-13 | 烟台一诺电子材料有限公司 | 一种集成电路封装用键合铝丝及其制备方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020184655A1 (ja) | 2019-03-13 | 2020-09-17 | 日鉄マイクロメタル株式会社 | Alボンディングワイヤ |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3353073A (en) * | 1964-09-10 | 1967-11-14 | Nippon Electric Co | Magnesium-aluminum alloy contacts for semiconductor devices |
| KR100723454B1 (ko) * | 2004-08-21 | 2007-05-30 | 페어차일드코리아반도체 주식회사 | 높은 열 방출 능력을 구비한 전력용 모듈 패키지 및 그제조방법 |
| TWI237334B (en) * | 2002-04-05 | 2005-08-01 | Nippon Steel Corp | A gold bonding wire for a semiconductor device and a method for producing the same |
| JP2011252185A (ja) * | 2010-05-31 | 2011-12-15 | Fujikura Ltd | Al合金導電線 |
| JP2011253950A (ja) * | 2010-06-02 | 2011-12-15 | Mitsubishi Electric Corp | 電力半導体装置 |
| CN103003456B (zh) * | 2010-07-15 | 2015-06-10 | 古河电气工业株式会社 | 铝合金导体 |
| TWI455217B (zh) * | 2011-12-27 | 2014-10-01 | 萬國半導體開曼股份有限公司 | 應用在功率半導體元器件中的鋁合金引線框架 |
| JP6090721B2 (ja) * | 2012-05-29 | 2017-03-08 | 国立大学法人茨城大学 | パワー半導体用アルミニウムワイヤ及び該アルミニウムワイヤを用いた半導体装置、並びに該アルミニウムワイヤの探索方法 |
| JP5159000B1 (ja) | 2012-06-13 | 2013-03-06 | 田中電子工業株式会社 | 半導体装置接続用アルミニウム合金細線 |
| JP5281191B1 (ja) * | 2012-12-28 | 2013-09-04 | 田中電子工業株式会社 | パワ−半導体装置用アルミニウム合金細線 |
| JP6368087B2 (ja) * | 2013-12-26 | 2018-08-01 | 住友電気工業株式会社 | アルミニウム合金線材、アルミニウム合金線材の製造方法、及びアルミニウム合金部材 |
| EP3363025B1 (en) * | 2015-10-14 | 2021-12-08 | General Cable Technologies Corporation | Cables and wires having conductive elements formed from improved aluminum-zirconium alloys |
| TWI581273B (zh) * | 2015-11-30 | 2017-05-01 | 財團法人金屬工業研究發展中心 | 鋁合金導線及其製造方法 |
| JP6927685B2 (ja) * | 2016-10-25 | 2021-09-01 | 矢崎総業株式会社 | アルミニウム素線、並びにそれを用いたアルミニウム電線及びワイヤーハーネス |
| EP3778947B1 (en) * | 2018-03-27 | 2025-08-20 | Furukawa Electric Co., Ltd. | Aluminum alloy material, and conductive member, battery member, fastening part, spring part, and structural part using aluminum alloy material |
| JP7126322B2 (ja) | 2018-10-10 | 2022-08-26 | 日鉄マイクロメタル株式会社 | Alボンディングワイヤ |
-
2022
- 2022-01-25 JP JP2022578387A patent/JP7573051B2/ja active Active
- 2022-01-25 US US18/263,000 patent/US20240105667A1/en active Pending
- 2022-01-25 CN CN202280011513.5A patent/CN116848623A/zh active Pending
- 2022-01-25 WO PCT/JP2022/002523 patent/WO2022163606A1/ja not_active Ceased
- 2022-01-25 KR KR1020237022966A patent/KR20230116044A/ko active Pending
- 2022-01-25 DE DE112022000793.1T patent/DE112022000793T5/de active Pending
- 2022-01-27 TW TW111103471A patent/TWI854187B/zh active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020184655A1 (ja) | 2019-03-13 | 2020-09-17 | 日鉄マイクロメタル株式会社 | Alボンディングワイヤ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2022163606A1 (https=) | 2022-08-04 |
| WO2022163606A1 (ja) | 2022-08-04 |
| CN116848623A (zh) | 2023-10-03 |
| TWI854187B (zh) | 2024-09-01 |
| TW202232691A (zh) | 2022-08-16 |
| KR20230116044A (ko) | 2023-08-03 |
| JP7573051B2 (ja) | 2024-10-24 |
| US20240105667A1 (en) | 2024-03-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed | ||
| R081 | Change of applicant/patentee |
Owner name: MITSUBISHI ELECTRIC CORPORATION, JP Free format text: FORMER OWNERS: MITSUBISHI ELECTRIC CORPORATION, TOKYO, JP; TANAKA DENSHI KOGYO K.K., YOSHINOGARI-CHO, SAGA, JP Owner name: TANAKA ELECTRONICS CO., LTD., YOSHINOGARI-CHO, JP Free format text: FORMER OWNERS: MITSUBISHI ELECTRIC CORPORATION, TOKYO, JP; TANAKA DENSHI KOGYO K.K., YOSHINOGARI-CHO, SAGA, JP |
|
| R082 | Change of representative |
Representative=s name: MAIWALD GMBH, DE |
|
| R081 | Change of applicant/patentee |
Owner name: MITSUBISHI ELECTRIC CORPORATION, JP Free format text: FORMER OWNERS: MITSUBISHI ELECTRIC CORPORATION, TOKYO, JP; TANAKA ELECTRONICS CO., LTD., YOSHINOGARI-CHO, SAGA, JP Owner name: TANAKA ELECTRONICS CO., LTD., YOSHINOGARI-CHO, JP Free format text: FORMER OWNERS: MITSUBISHI ELECTRIC CORPORATION, TOKYO, JP; TANAKA ELECTRONICS CO., LTD., YOSHINOGARI-CHO, SAGA, JP |