DE112018004409A5 - Optisches Bauelement und Verfahren zu dessen Herstellung - Google Patents

Optisches Bauelement und Verfahren zu dessen Herstellung Download PDF

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Publication number
DE112018004409A5
DE112018004409A5 DE112018004409.2T DE112018004409T DE112018004409A5 DE 112018004409 A5 DE112018004409 A5 DE 112018004409A5 DE 112018004409 T DE112018004409 T DE 112018004409T DE 112018004409 A5 DE112018004409 A5 DE 112018004409A5
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DE
Germany
Prior art keywords
production
optical component
optical
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112018004409.2T
Other languages
English (en)
Other versions
DE112018004409B4 (de
Inventor
Roman Ostholt
Malte Schulz-Ruhtenberg
Arne Schnoor
Norbert Ambrosius
Daniel Dunker
Tobias Jaus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LPKF Laser and Electronics AG
Original Assignee
LPKF Laser and Electronics AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LPKF Laser and Electronics AG filed Critical LPKF Laser and Electronics AG
Publication of DE112018004409A5 publication Critical patent/DE112018004409A5/de
Application granted granted Critical
Publication of DE112018004409B4 publication Critical patent/DE112018004409B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/0036—2-D arrangement of prisms, protrusions, indentations or roughened surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/004—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/004—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles
    • G02B6/0043—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles provided on the surface of the light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B2006/0098—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings for scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
DE112018004409.2T 2017-10-04 2018-08-29 Optisches Bauelement und Verfahren zu dessen Herstellung Expired - Fee Related DE112018004409B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017122992 2017-10-04
DE102017122992.2 2017-10-04
PCT/EP2018/073229 WO2019068396A1 (de) 2017-10-04 2018-08-29 Optisches bauelement und verfahren zu dessen herstellung

Publications (2)

Publication Number Publication Date
DE112018004409A5 true DE112018004409A5 (de) 2020-05-14
DE112018004409B4 DE112018004409B4 (de) 2022-02-17

Family

ID=63407229

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112018004409.2T Expired - Fee Related DE112018004409B4 (de) 2017-10-04 2018-08-29 Optisches Bauelement und Verfahren zu dessen Herstellung

Country Status (4)

Country Link
US (1) US11156774B2 (de)
DE (1) DE112018004409B4 (de)
TW (1) TWI714880B (de)
WO (1) WO2019068396A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022130976B3 (de) 2022-11-23 2023-11-30 Lpkf Laser & Electronics Aktiengesellschaft Monolithische Membran aus Glas, Doppel-Vertikalmembran-Anordnung, mikromechanische Federstruktur und zugehöriges Herstellungsverfahren

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3525661A1 (de) 1985-07-18 1987-01-22 Schott Glaswerke Verfahren zum feldunterstuetzten ionenaustausch
US4849986A (en) * 1986-08-22 1989-07-18 Siemens Aktiengesellschaft Optical resonator matrix
DE4407832A1 (de) * 1994-03-09 1995-09-14 Ant Nachrichtentech Verfahren zur Herstellung eines optoelektronischen Bauelements mit einer definierten axialen Variation des Kopplungskoeffizienten und definierter axialer Verteilung der Phasenverschiebung
JP3432993B2 (ja) * 1996-03-29 2003-08-04 日本碍子株式会社 光導波路デバイスの製造方法
US6240221B1 (en) 1999-03-29 2001-05-29 Nortel Networks Limited Integrated optical mach zehnder structures
JP2003530240A (ja) 2000-04-11 2003-10-14 ブランソン・ウルトラソニックス・コーポレーション レーザ溶着用光ガイド
JP2002372641A (ja) 2001-06-13 2002-12-26 Ngk Insulators Ltd 光導波路の製造方法、光導波路および波長変換デバイス
GB0201031D0 (en) 2002-01-17 2002-03-06 Bookham Technology Plc Method of producing a rib waveguide
JP4348595B2 (ja) 2002-07-02 2009-10-21 オムロン株式会社 光導波路装置、光導波路装置の製造方法及び光通信用機器
ATE306679T1 (de) 2002-12-03 2005-10-15 Cit Alcatel Dünnschichtfilter auf der endfläche eines glasfasersegments, herstellungsverfahren und integrierte optische vorrichtung
US7609931B2 (en) * 2003-04-18 2009-10-27 Enablence, Inc. Planar waveguide structure with tightly curved waveguides
DE102008048751A1 (de) * 2008-09-25 2010-04-01 Automotive Lighting Reutlingen Gmbh Leuchte für Kraftfahrzeuge
SG181770A1 (en) * 2009-12-23 2012-07-30 Agency Science Tech & Res Optical converter and method of manufacturing the same
DE102010004442B4 (de) 2010-01-13 2015-08-20 Leoni Kabel Holding Gmbh Optisches Bauelement zur Lichtwellenleitung, optisches Steckverbindungssystem mit einem solchen Bauelement und Verfahren zur Herstellung eines solchen Bauelements
US8326100B2 (en) 2010-09-27 2012-12-04 Alcatel Lucent Low loss broadband fiber coupler to optical waveguide
CN103052362B (zh) * 2010-12-17 2015-07-15 奥林巴斯医疗株式会社 用于处理活体组织的探头及超声波探头的驱动方法
MY178429A (en) 2013-04-04 2020-10-13 Lpkf Laser & Electronics Ag Method and device for providing through-openings in a substrate and a substrate produced in said manner

Also Published As

Publication number Publication date
US11156774B2 (en) 2021-10-26
WO2019068396A1 (de) 2019-04-11
TWI714880B (zh) 2021-01-01
DE112018004409B4 (de) 2022-02-17
US20200301068A1 (en) 2020-09-24
TW201923401A (zh) 2019-06-16

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R012 Request for examination validly filed
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee