DE112015002805T5 - Winkelgeschwindigkeitssensor - Google Patents

Winkelgeschwindigkeitssensor Download PDF

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Publication number
DE112015002805T5
DE112015002805T5 DE112015002805.6T DE112015002805T DE112015002805T5 DE 112015002805 T5 DE112015002805 T5 DE 112015002805T5 DE 112015002805 T DE112015002805 T DE 112015002805T DE 112015002805 T5 DE112015002805 T5 DE 112015002805T5
Authority
DE
Germany
Prior art keywords
vibration
tongue
vibration tongue
resonance frequency
angular velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112015002805.6T
Other languages
German (de)
English (en)
Inventor
Minekazu Sakai
Tomoya Jomori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of DE112015002805T5 publication Critical patent/DE112015002805T5/de
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE112015002805.6T 2014-06-13 2015-06-11 Winkelgeschwindigkeitssensor Withdrawn DE112015002805T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014122512A JP6256215B2 (ja) 2014-06-13 2014-06-13 角速度センサ
JP2014-122512 2014-06-13
PCT/JP2015/002918 WO2015190103A1 (ja) 2014-06-13 2015-06-11 角速度センサ

Publications (1)

Publication Number Publication Date
DE112015002805T5 true DE112015002805T5 (de) 2017-03-02

Family

ID=54833214

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112015002805.6T Withdrawn DE112015002805T5 (de) 2014-06-13 2015-06-11 Winkelgeschwindigkeitssensor

Country Status (5)

Country Link
US (1) US10060744B2 (https=)
JP (1) JP6256215B2 (https=)
CN (1) CN106662444B (https=)
DE (1) DE112015002805T5 (https=)
WO (1) WO2015190103A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6639377B2 (ja) * 2016-12-08 2020-02-05 株式会社東芝 振動装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3329068B2 (ja) * 1994-04-28 2002-09-30 株式会社村田製作所 角速度センサ
JP4415383B2 (ja) 2005-01-24 2010-02-17 セイコーエプソン株式会社 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ
WO2009031285A1 (ja) * 2007-09-03 2009-03-12 Panasonic Corporation 慣性力センサ
JP4626858B2 (ja) 2008-03-31 2011-02-09 Ｔｄｋ株式会社 角速度センサ素子
JP5353610B2 (ja) * 2009-09-30 2013-11-27 Ｔｄｋ株式会社 圧電振動デバイス
FR2969278B1 (fr) * 2010-12-20 2013-07-05 Onera (Off Nat Aerospatiale) Structure planaire pour gyrometre tri-axe
JP5838695B2 (ja) * 2011-09-29 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5923970B2 (ja) 2011-12-23 2016-05-25 株式会社デンソー 振動型角速度センサ
JP2013181856A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器
JP5884603B2 (ja) * 2012-03-30 2016-03-15 株式会社デンソー ロールオーバージャイロセンサ
JP5974629B2 (ja) * 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
JP6191151B2 (ja) 2012-05-29 2017-09-06 株式会社デンソー 物理量センサ
JP2016085190A (ja) * 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、振動素子の製造方法、電子デバイス、電子機器、および移動体
JP2016085192A (ja) * 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、電子デバイス、電子機器および移動体

Also Published As

Publication number Publication date
US20170108335A1 (en) 2017-04-20
WO2015190103A1 (ja) 2015-12-17
JP2016003880A (ja) 2016-01-12
CN106662444B (zh) 2019-10-11
JP6256215B2 (ja) 2018-01-10
US10060744B2 (en) 2018-08-28
CN106662444A (zh) 2017-05-10

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee