DE112015001355B4 - Lichtquelle mit nanostrukturierter antireflexions-schicht - Google Patents

Lichtquelle mit nanostrukturierter antireflexions-schicht Download PDF

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Publication number
DE112015001355B4
DE112015001355B4 DE112015001355.5T DE112015001355T DE112015001355B4 DE 112015001355 B4 DE112015001355 B4 DE 112015001355B4 DE 112015001355 T DE112015001355 T DE 112015001355T DE 112015001355 B4 DE112015001355 B4 DE 112015001355B4
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Germany
Prior art keywords
plasma
plasma cell
gas
transparent
light source
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DE112015001355.5T
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German (de)
English (en)
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DE112015001355T5 (de
Inventor
Sebaek Oh
Anant Chimmalgi
Rahul Yadav
Matthew Derstine
Ilya Bezel
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KLA Corp
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KLA Tencor Corp
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Publication of DE112015001355T5 publication Critical patent/DE112015001355T5/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/32—Special longitudinal shape, e.g. for advertising purposes

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Optics & Photonics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Discharge Lamp (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
DE112015001355.5T 2014-03-20 2015-03-19 Lichtquelle mit nanostrukturierter antireflexions-schicht Active DE112015001355B4 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461968161P 2014-03-20 2014-03-20
US61/968,161 2014-03-20
US14/660,849 US9530636B2 (en) 2014-03-20 2015-03-17 Light source with nanostructured antireflection layer
US14/660,849 2015-03-17
PCT/US2015/021460 WO2015143150A1 (en) 2014-03-20 2015-03-19 Light source with nanostructured antireflection layer

Publications (2)

Publication Number Publication Date
DE112015001355T5 DE112015001355T5 (de) 2016-12-01
DE112015001355B4 true DE112015001355B4 (de) 2024-02-01

Family

ID=54143490

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112015001355.5T Active DE112015001355B4 (de) 2014-03-20 2015-03-19 Lichtquelle mit nanostrukturierter antireflexions-schicht

Country Status (4)

Country Link
US (1) US9530636B2 (https=)
JP (2) JP2017513188A (https=)
DE (1) DE112015001355B4 (https=)
WO (1) WO2015143150A1 (https=)

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EP3356864B1 (en) 2015-09-22 2024-03-20 PureFize Technologies AB Extraction structure for a uv lamp
SE542334C2 (en) * 2016-05-23 2020-04-14 Lightlab Sweden Ab Method for manufacturing a light extraction structure for a uv lamp
US9899205B2 (en) * 2016-05-25 2018-02-20 Kla-Tencor Corporation System and method for inhibiting VUV radiative emission of a laser-sustained plasma source
US10712258B2 (en) 2017-12-06 2020-07-14 California Institute Of Technology Cuvette having high optical transmissivity and method of forming
US10109473B1 (en) 2018-01-26 2018-10-23 Excelitas Technologies Corp. Mechanically sealed tube for laser sustained plasma lamp and production method for same
US10714327B2 (en) * 2018-03-19 2020-07-14 Kla-Tencor Corporation System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination
DE102018221189A1 (de) 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und optisches Element
US12382748B2 (en) * 2021-01-04 2025-08-05 Saudi Arabian Oil Company Nanostructures to reduce optical losses
US11887835B2 (en) * 2021-08-10 2024-01-30 Kla Corporation Laser-sustained plasma lamps with graded concentration of hydroxyl radical
DE102022206465A1 (de) 2022-06-27 2023-06-29 Carl Zeiss Smt Gmbh Entspiegelung von optischen elementen für lithographiesysteme über einen grossen lichteinfallswinkelbereich mittels einer nanostrukturierung der oberfläche
US12452987B2 (en) * 2023-02-14 2025-10-21 Kla Corporation High-power compact VUV laser-sustained plasma light source
US12520413B2 (en) * 2023-09-21 2026-01-06 Kla Corporation Sapphire lamp for laser sustained plasma broadband light source

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US20070228288A1 (en) 2006-03-31 2007-10-04 Energetiq Technology Inc. Laser-driven light source
WO2012032162A1 (de) 2010-09-09 2012-03-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Verfahren zur reduzierung der grenzflächenreflexion einer glasoberfläche
US20120081793A1 (en) 2009-06-12 2012-04-05 Tokio Taguchi Antireflection film, display device and light transmissive member
US20130003384A1 (en) 2011-06-29 2013-01-03 Kla-Tencor Corporation Adaptive optics for compensating aberrations in light-sustained plasma cells
US20130106275A1 (en) 2011-10-11 2013-05-02 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US20130181595A1 (en) 2012-01-17 2013-07-18 Kla-Tencor Corporation Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
US20140291546A1 (en) 2013-03-29 2014-10-02 Kla-Tencor Corporation Method and System for Controlling Convective Flow in a Light-Sustained Plasma
US9099292B1 (en) 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
US9775226B1 (en) 2013-03-29 2017-09-26 Kla-Tencor Corporation Method and system for generating a light-sustained plasma in a flanged transmission element

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US8643840B2 (en) * 2010-02-25 2014-02-04 Kla-Tencor Corporation Cell for light source
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050168148A1 (en) 2004-01-30 2005-08-04 General Electric Company Optical control of light in ceramic arctubes
US20070228288A1 (en) 2006-03-31 2007-10-04 Energetiq Technology Inc. Laser-driven light source
US20070228300A1 (en) 2006-03-31 2007-10-04 Energetiq Technology, Inc. Laser-Driven Light Source
US9099292B1 (en) 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
US20120081793A1 (en) 2009-06-12 2012-04-05 Tokio Taguchi Antireflection film, display device and light transmissive member
WO2012032162A1 (de) 2010-09-09 2012-03-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Verfahren zur reduzierung der grenzflächenreflexion einer glasoberfläche
US20130003384A1 (en) 2011-06-29 2013-01-03 Kla-Tencor Corporation Adaptive optics for compensating aberrations in light-sustained plasma cells
US20130106275A1 (en) 2011-10-11 2013-05-02 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US20130181595A1 (en) 2012-01-17 2013-07-18 Kla-Tencor Corporation Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
US20140291546A1 (en) 2013-03-29 2014-10-02 Kla-Tencor Corporation Method and System for Controlling Convective Flow in a Light-Sustained Plasma
US9775226B1 (en) 2013-03-29 2017-09-26 Kla-Tencor Corporation Method and system for generating a light-sustained plasma in a flanged transmission element

Also Published As

Publication number Publication date
WO2015143150A1 (en) 2015-09-24
DE112015001355T5 (de) 2016-12-01
US20150271905A1 (en) 2015-09-24
JP2017513188A (ja) 2017-05-25
JP2020074307A (ja) 2020-05-14
JP6891261B2 (ja) 2021-06-18
US9530636B2 (en) 2016-12-27

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