DE112013006062B4 - Drucksensor und Verfahren zu dessen Fertigung - Google Patents

Drucksensor und Verfahren zu dessen Fertigung Download PDF

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Publication number
DE112013006062B4
DE112013006062B4 DE112013006062.0T DE112013006062T DE112013006062B4 DE 112013006062 B4 DE112013006062 B4 DE 112013006062B4 DE 112013006062 T DE112013006062 T DE 112013006062T DE 112013006062 B4 DE112013006062 B4 DE 112013006062B4
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DE
Germany
Prior art keywords
introduction hole
end opening
pressure
housing
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112013006062.0T
Other languages
German (de)
English (en)
Other versions
DE112013006062T5 (de
Inventor
Masamichi Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of DE112013006062T5 publication Critical patent/DE112013006062T5/de
Application granted granted Critical
Publication of DE112013006062B4 publication Critical patent/DE112013006062B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/26—Moulds
    • B29C45/33—Moulds having transversely, e.g. radially, movable mould parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/712—Containers; Packaging elements or accessories, Packages
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
DE112013006062.0T 2012-12-18 2013-12-12 Drucksensor und Verfahren zu dessen Fertigung Active DE112013006062B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-276032 2012-12-18
JP2012276032A JP6079206B2 (ja) 2012-12-18 2012-12-18 圧力センサ
PCT/JP2013/007303 WO2014097585A1 (ja) 2012-12-18 2013-12-12 圧力センサとその製造方法

Publications (2)

Publication Number Publication Date
DE112013006062T5 DE112013006062T5 (de) 2015-08-27
DE112013006062B4 true DE112013006062B4 (de) 2020-09-03

Family

ID=50977948

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013006062.0T Active DE112013006062B4 (de) 2012-12-18 2013-12-12 Drucksensor und Verfahren zu dessen Fertigung

Country Status (4)

Country Link
US (1) US9588000B2 (https=)
JP (1) JP6079206B2 (https=)
DE (1) DE112013006062B4 (https=)
WO (1) WO2014097585A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014209874A1 (de) * 2014-05-23 2015-11-26 Conti Temic Microelectronic Gmbh Steuergerät für ein Fahrzeug mit einem einen Drucksensor aufweisenden Gehäuse
JP6387912B2 (ja) * 2015-07-06 2018-09-12 株式会社デンソー 圧力センサ
DE102015121401A1 (de) * 2015-12-09 2017-06-14 ETO SENSORIC GmbH Drucksensorvorrichtung
EP3423252A1 (en) * 2016-03-04 2019-01-09 Imflux Inc. External sensor kit for injection molding apparatus and methods of use
EP3276242B1 (en) * 2016-07-28 2019-08-28 Sensirion AG Differential pressure sensor comprising an adaptor device
CN110955946B (zh) * 2019-10-29 2024-06-21 中国铁建电气化局集团第五工程有限公司 一种机房布线优化方法及系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57138037U (https=) * 1981-02-23 1982-08-28
JPS5866034A (ja) * 1981-10-14 1983-04-20 Nippon Denso Co Ltd 圧力検出装置
JPS61143040U (https=) * 1985-02-25 1986-09-04
JPH03200035A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH1114486A (ja) * 1997-06-25 1999-01-22 Matsushita Electric Works Ltd 圧力センサ
US20090007883A1 (en) * 2004-05-26 2009-01-08 Musashi Kazuhiro Throttle System and Sensor Unit
JP2009042056A (ja) * 2007-08-08 2009-02-26 Denso Corp 圧力センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010256186A (ja) * 2009-04-24 2010-11-11 Panasonic Electric Works Co Ltd 圧力センサ
JP2013003112A (ja) 2011-06-21 2013-01-07 Denso Corp 構造体
US9593995B2 (en) * 2014-02-28 2017-03-14 Measurement Specialties, Inc. Package for a differential pressure sensing die
US9310267B2 (en) * 2014-02-28 2016-04-12 Measurement Specialities, Inc. Differential pressure sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57138037U (https=) * 1981-02-23 1982-08-28
JPS5866034A (ja) * 1981-10-14 1983-04-20 Nippon Denso Co Ltd 圧力検出装置
JPS61143040U (https=) * 1985-02-25 1986-09-04
JPH03200035A (ja) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd 半導体圧力センサ
JPH1114486A (ja) * 1997-06-25 1999-01-22 Matsushita Electric Works Ltd 圧力センサ
US20090007883A1 (en) * 2004-05-26 2009-01-08 Musashi Kazuhiro Throttle System and Sensor Unit
JP2009042056A (ja) * 2007-08-08 2009-02-26 Denso Corp 圧力センサ

Also Published As

Publication number Publication date
JP2014119391A (ja) 2014-06-30
WO2014097585A1 (ja) 2014-06-26
JP6079206B2 (ja) 2017-02-15
US20150247772A1 (en) 2015-09-03
DE112013006062T5 (de) 2015-08-27
US9588000B2 (en) 2017-03-07

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Ipc: G01L0019140000

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