DE112011103858T8 - Verfahren zum Herstellen eines Spektroskopiesensors - Google Patents

Verfahren zum Herstellen eines Spektroskopiesensors Download PDF

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Publication number
DE112011103858T8
DE112011103858T8 DE112011103858T DE112011103858T DE112011103858T8 DE 112011103858 T8 DE112011103858 T8 DE 112011103858T8 DE 112011103858 T DE112011103858 T DE 112011103858T DE 112011103858 T DE112011103858 T DE 112011103858T DE 112011103858 T8 DE112011103858 T8 DE 112011103858T8
Authority
DE
Germany
Prior art keywords
producing
spectroscopy sensor
spectroscopy
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112011103858T
Other languages
English (en)
Other versions
DE112011103858T5 (de
DE112011103858B4 (de
Inventor
Katsumi Shibayama
Masaomi Takasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of DE112011103858T5 publication Critical patent/DE112011103858T5/de
Publication of DE112011103858T8 publication Critical patent/DE112011103858T8/de
Application granted granted Critical
Publication of DE112011103858B4 publication Critical patent/DE112011103858B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1111—Using solvent during delaminating [e.g., water dissolving adhesive at bonding face during delamination, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y10T156/1195—Delaminating from release surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
DE112011103858.5T 2010-11-22 2011-09-21 Verfahren zum Herstellen eines Spektroskopiesensors Expired - Fee Related DE112011103858B4 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2010260440A JP5634836B2 (ja) 2010-11-22 2010-11-22 分光センサの製造方法
JPJP-2010-260440 2010-11-22
JP2010-260440 2010-11-22
PCT/JP2011/071535 WO2012070301A1 (ja) 2010-11-22 2011-09-21 分光センサの製造方法

Publications (3)

Publication Number Publication Date
DE112011103858T5 DE112011103858T5 (de) 2013-08-29
DE112011103858T8 true DE112011103858T8 (de) 2013-09-19
DE112011103858B4 DE112011103858B4 (de) 2020-08-06

Family

ID=46145659

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112011103858.5T Expired - Fee Related DE112011103858B4 (de) 2010-11-22 2011-09-21 Verfahren zum Herstellen eines Spektroskopiesensors

Country Status (5)

Country Link
US (1) US8715443B2 (de)
JP (1) JP5634836B2 (de)
CN (1) CN103229029B (de)
DE (1) DE112011103858B4 (de)
WO (1) WO2012070301A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5707107B2 (ja) * 2010-11-22 2015-04-22 浜松ホトニクス株式会社 分光センサ
JP5757835B2 (ja) * 2011-10-04 2015-08-05 浜松ホトニクス株式会社 分光センサの製造方法
JP5988690B2 (ja) 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
JP5926610B2 (ja) * 2012-05-18 2016-05-25 浜松ホトニクス株式会社 分光センサ
JP5875936B2 (ja) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
US9923007B2 (en) * 2015-12-29 2018-03-20 Viavi Solutions Inc. Metal mirror based multispectral filter array
US9960199B2 (en) * 2015-12-29 2018-05-01 Viavi Solutions Inc. Dielectric mirror based multispectral filter array

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457134A (en) * 1987-08-27 1989-03-03 Minolta Camera Kk Spectrum measuring sensor
JP3423147B2 (ja) * 1996-04-15 2003-07-07 アルプス電気株式会社 光学多層膜フィルタの製造方法
JPH1152128A (ja) * 1997-08-08 1999-02-26 Tokai Rubber Ind Ltd 誘電体多層膜光フィルタおよびその製造方法
US6300612B1 (en) * 1998-02-02 2001-10-09 Uniax Corporation Image sensors made from organic semiconductors
JP4244410B2 (ja) * 1998-09-07 2009-03-25 エプソントヨコム株式会社 エタロンフィルタおよびその製造方法
JP2000206326A (ja) * 1999-01-14 2000-07-28 Japan Aviation Electronics Industry Ltd 多層膜光学素子
JP3975634B2 (ja) * 2000-01-25 2007-09-12 信越半導体株式会社 半導体ウェハの製作法
JP2003270042A (ja) * 2002-03-07 2003-09-25 Ind Technol Res Inst ファブリーペローフィルタ装置、それを製造する方法、及び操作する方法
US7560684B2 (en) * 2005-03-23 2009-07-14 Panasonic Corporation On-vehicle imaging device
US7890747B2 (en) * 2006-07-06 2011-02-15 Accenture Global Services Limited Display of decrypted data by a graphics processing unit
CN104316987A (zh) * 2006-08-09 2015-01-28 光学解决方案纳米光子学有限责任公司 光学滤波器及其生产方法以及用于检查电磁辐射的装置

Also Published As

Publication number Publication date
US20130153139A1 (en) 2013-06-20
DE112011103858T5 (de) 2013-08-29
CN103229029B (zh) 2015-01-21
CN103229029A (zh) 2013-07-31
DE112011103858B4 (de) 2020-08-06
JP5634836B2 (ja) 2014-12-03
US8715443B2 (en) 2014-05-06
WO2012070301A1 (ja) 2012-05-31
JP2012112723A (ja) 2012-06-14

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Representative=s name: HOFFMANN - EITLE, DE

Representative=s name: HOFFMANN - EITLE PATENT- UND RECHTSANWAELTE PA, DE

R012 Request for examination validly filed
R018 Grant decision by examination section/examining division
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee