DE1096539B - Ionen-Vakuumpumpe mit zerstaeubender Kathode - Google Patents

Ionen-Vakuumpumpe mit zerstaeubender Kathode

Info

Publication number
DE1096539B
DE1096539B DEV16934A DEV0016934A DE1096539B DE 1096539 B DE1096539 B DE 1096539B DE V16934 A DEV16934 A DE V16934A DE V0016934 A DEV0016934 A DE V0016934A DE 1096539 B DE1096539 B DE 1096539B
Authority
DE
Germany
Prior art keywords
pump
plates
cathode
magnetic field
permanent magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEV16934A
Other languages
German (de)
English (en)
Inventor
William Arthur Lloyd
Glen Andrew Huffman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of DE1096539B publication Critical patent/DE1096539B/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Particle Accelerators (AREA)
DEV16934A 1958-08-01 1959-07-20 Ionen-Vakuumpumpe mit zerstaeubender Kathode Pending DE1096539B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US752591A US2983433A (en) 1958-08-01 1958-08-01 Getter ion vacuum pump apparatus

Publications (1)

Publication Number Publication Date
DE1096539B true DE1096539B (de) 1961-01-05

Family

ID=25026948

Family Applications (1)

Application Number Title Priority Date Filing Date
DEV16934A Pending DE1096539B (de) 1958-08-01 1959-07-20 Ionen-Vakuumpumpe mit zerstaeubender Kathode

Country Status (6)

Country Link
US (1) US2983433A (fr)
CH (1) CH382364A (fr)
DE (1) DE1096539B (fr)
FR (1) FR1230921A (fr)
GB (2) GB910608A (fr)
NL (2) NL302901A (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
US3228589A (en) * 1963-10-16 1966-01-11 Gen Electric Ion pump having encapsulated internal magnet assemblies
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
DE1302292B (fr) * 1964-03-10 Varian Associates
US3376455A (en) * 1966-02-28 1968-04-02 Varian Associates Ionic vacuum pump having multiple externally mounted magnetic circuits
WO1996018204A1 (fr) * 1994-12-05 1996-06-13 Color Planar Displays, Inc. Structure de support pour ecrans plats
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
CN1366706A (zh) * 2000-03-13 2002-08-28 爱发科股份有限公司 离子溅射泵
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636664A (en) * 1949-01-28 1953-04-28 Hertzler Elmer Afton High vacuum pumping method, apparatus, and techniques
US2726805A (en) * 1953-01-29 1955-12-13 Ernest O Lawrence Ion pump

Also Published As

Publication number Publication date
GB910607A (fr)
NL111716C (fr)
CH382364A (de) 1964-09-30
GB910608A (en) 1962-11-14
US2983433A (en) 1961-05-09
FR1230921A (fr) 1960-09-21
NL302901A (fr)

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