DE1094400B - Ionen-Getter-Pumpe - Google Patents
Ionen-Getter-PumpeInfo
- Publication number
- DE1094400B DE1094400B DEA28089A DEA0028089A DE1094400B DE 1094400 B DE1094400 B DE 1094400B DE A28089 A DEA28089 A DE A28089A DE A0028089 A DEA0028089 A DE A0028089A DE 1094400 B DE1094400 B DE 1094400B
- Authority
- DE
- Germany
- Prior art keywords
- getter
- ion
- metal
- electrode
- getter pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 239000000843 powder Substances 0.000 claims description 12
- 238000001704 evaporation Methods 0.000 claims description 10
- 238000005086 pumping Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 17
- 238000005247 gettering Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052756 noble gas Inorganic materials 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- 241000282994 Cervidae Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL223799D NL223799A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1957-10-12 | ||
| DEA28089A DE1094400B (de) | 1957-10-12 | 1957-10-12 | Ionen-Getter-Pumpe |
| CH356554D CH356554A (de) | 1957-10-12 | 1958-01-15 | Ionen-Getter-Pumpe |
| GB6982/58A GB873906A (en) | 1957-10-12 | 1958-03-04 | Improvements in or relating to ion-getter pumps |
| US750255A US2948459A (en) | 1957-10-12 | 1958-07-22 | Ion getter pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEA28089A DE1094400B (de) | 1957-10-12 | 1957-10-12 | Ionen-Getter-Pumpe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1094400B true DE1094400B (de) | 1960-12-08 |
Family
ID=6926561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEA28089A Pending DE1094400B (de) | 1957-10-12 | 1957-10-12 | Ionen-Getter-Pumpe |
Country Status (5)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1240620B (de) * | 1961-05-29 | 1967-05-18 | Varian Associates | Ionen-Getter-Vakuumpumpe |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3377499A (en) * | 1966-05-16 | 1968-04-09 | Varian Associates | Relatively large consumable pelletized getter source element for sublimation type getter vacuum pumps |
| US3515171A (en) * | 1968-07-23 | 1970-06-02 | Sloan Instr Corp | Side pumped vacuum collar |
| US6667475B1 (en) * | 2003-01-08 | 2003-12-23 | Applied Materials, Inc. | Method and apparatus for cleaning an analytical instrument while operating the analytical instrument |
| US10121627B1 (en) * | 2017-10-26 | 2018-11-06 | Edwards Vacuum Llc | Ion pump noble gas stability using small grain sized cathode material |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE750230C (de) * | 1935-10-22 | 1944-12-20 | Rca Corp | Elektrische Entladungsroehre mit einer mittelbar geheizten Gluehkathode |
| DE885763C (de) * | 1942-07-24 | 1953-08-06 | Telefunken Gmbh | Pulverfoermiger, nicht verdampfender Fangstoff fuer elektrische Entladungsgefaesse |
| DE761089C (de) * | 1937-12-31 | 1954-04-29 | Siemens & Halske A G | Mittelbar geheizte Gluehkathode fuer Braunsche Roehren |
| GB768003A (en) * | 1953-11-23 | 1957-02-13 | Wisconsin Alumni Res Found | Improvements in high vacuum pumps |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2850225A (en) * | 1955-11-10 | 1958-09-02 | Wisconsin Alumni Res Found | Pump |
-
0
- NL NL223799D patent/NL223799A/xx unknown
-
1957
- 1957-10-12 DE DEA28089A patent/DE1094400B/de active Pending
-
1958
- 1958-01-15 CH CH356554D patent/CH356554A/de unknown
- 1958-03-04 GB GB6982/58A patent/GB873906A/en not_active Expired
- 1958-07-22 US US750255A patent/US2948459A/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE750230C (de) * | 1935-10-22 | 1944-12-20 | Rca Corp | Elektrische Entladungsroehre mit einer mittelbar geheizten Gluehkathode |
| DE761089C (de) * | 1937-12-31 | 1954-04-29 | Siemens & Halske A G | Mittelbar geheizte Gluehkathode fuer Braunsche Roehren |
| DE885763C (de) * | 1942-07-24 | 1953-08-06 | Telefunken Gmbh | Pulverfoermiger, nicht verdampfender Fangstoff fuer elektrische Entladungsgefaesse |
| GB768003A (en) * | 1953-11-23 | 1957-02-13 | Wisconsin Alumni Res Found | Improvements in high vacuum pumps |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1240620B (de) * | 1961-05-29 | 1967-05-18 | Varian Associates | Ionen-Getter-Vakuumpumpe |
Also Published As
| Publication number | Publication date |
|---|---|
| GB873906A (en) | 1961-08-02 |
| NL223799A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | |
| CH356554A (de) | 1961-08-31 |
| US2948459A (en) | 1960-08-09 |
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